• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.303-303
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• 2013

표면에 부착된 나노/마이크로 입자는 다양한 분야에서 오염물질로 작용한다. 특히 형상이 미세하고 공정 단계가 복잡한 반도체 및 디스플레이 등의 전자 소자 공정에서 미치는 영향이 크다. 따라서 입자상 오염물질의 제거에 관하여 상용화된 습식 세정 방법이 다양하게 존재하지만 표면 손상, 화학 반응, 부산물, 세정 효율 등 여러 가지 문제점이 있어 새로운 세정 방법이 요구된다. 이에 건식 세정 방법, 그 중에서도 입자의 충돌을 통해 제거하는 방법인 에어로졸 세정, 필렛 세정 등이 개발되었으나 마이크로 크기로 생성되는 입자로 인하여 형상의 손상이 크다. 따라서 본 연구에서는 나노 단위로 기체/고체 혼합물만 생성하여 세정하는 가스 클러스터 세정 방법을 이용하여 이러한 문제점을 해결하고자 하였다. 클러스터 세정 장비를 이용한 표면 처리는 충돌에 의한 제거에 기반한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사 거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 따라서 본 연구에서는 $CO_2$ 클러스터를 이용한 세정 특성을 정의 및 제어하기 위하여 생성되는 클러스터 특성에 관하여 이론적, 수치 해석적, 실험적 연구를 수행하였다. 먼저, $CO_2$의 물리적 특성 및 이를 이용한 특정 크기 오염 물질을 제거하는데 요구되는 임계 클러스터 크기 계산을 이론적으로 구하였다. 이는 오염물질의 부착력과 클러스터의 운동량 전달에 의한 제거력의 비교를 통해 이루어졌다. 두 번째로 클러스터 크기분포를 수치 해석적으로 예측하기 위하여 각 조건에 대하여 유동해석을 수행하고 이를 통해 구해진 노즐 내 기체의 냉각 속도를 GDE (General Dynamic Equation) 계산에 대입하여 구하였다. 마지막으로 PBMS(Particle Beam Mass Spectrometer)를 이용하여 실험적으로 클러스터 크기분포를 각 조건에 대하여 구할 수 있었다. 또한 크기 분포 경향에 대한 간접적 확인을 위하여 포토레지스트가 코팅된 웨이퍼에 클러스터의 충격으로 생성된 크레이터 크기의 경향을 분석하였다. 이와 같은 방법에 의하여 생성되는 클러스터는 노즐의 유량 증가, 온도 상승에 각각 비례하여 작아지는 것을 확인할 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.655-655
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• 2013

그래핀은 높은 전자 이동도, 열전도도, 기계적 강도, 유연성 등의 고유한 특성으로 다양한 분야에 응용하기 위한 연구가 수행되고 있으며, 특히 전자 소자에의 적용에 관한 연구가 활발히 이루어지고 있다. 전자 소자에 적용하기 위해서는 성장 및 물성에 관한 규명, 응용 소자에 따른 특성 평가가 필요하다. 이러한 소자 특성은 그래핀 물성에 의한 영향이 기본적이지만 에칭, 전사 등의 공정 중 발생하는 오염, 표면 특성, 잔여물 등에 의한 물성 변화 또한 분석 및 제어에 관한 연구가 필요하다. 열화학증착법(thermal chemical vapor deposition)을 이용한 그래핀 합성은 구리 기판을 사용하며, 합성된 그래핀의 에칭, 박리 및 전사 공정이 있다. 이러한 공정 중 발생하는 오염 입자가 그래핀 표면에 흡착되거나, 제거되지 않은 PMMA 잔여물이 그래핀의 특성에 영향을 미치게 된다. 따라서 본 연구에서는 $CO_2$ 클러스터의 표면 충돌을 이용하여 이러한 오염 물질 및 잔여물을 제거하고 그래핀 표면을 평탄화하는 것에 관한 연구를 수행하였다. 가스 클러스터란 작동기체의 분자가 수십에서 수백 개 뭉쳐 있는 형태를 뜻하며 이렇게 형성된 클러스터는 수 nm 크기를 형성하게 된다. 그리고 짧은 시간의 응축에 의해 수십 nm 크기 까지 성장 하게 된다. 클러스터를 이용한 표면 처리는 충돌에 의한 제거에 기반 한다. 따라서 생성 및 가속되는 클러스터로부터 대상으로 전달되는 운동량의 정도가 세정 특성에 영향을 미치며 이는 생성되는 클러스터의 크기에 종속적이다. 생성 클러스터의 크기 분포는 분사거리, 유량, 분사 각도, 노즐 냉각 온도 등의 변수에 관한 함수이다. 본 연구에서는 이러한 변수들을 제어하여 클러스터를 이용한 그래핀 표면 처리 실험을 수행하였다. 평가는 클러스터 표면 처리 전과 후의 특성 비교에 기반 하였으며, 광학 현미경을 이용한 표면 형상 측정, 라만분광 분석, AFM을 이용한 표면 조도 측정, 그래핀 면저항 측정 결과를 비교하였다. 평가 결과를 통하여 표면 처리를 하지 않은 그래핀에 비하여 면저항과 표면 조도가 낮아지는 것을 확인 할 수 있었다. 또한 클러스터 세정은 300 mm 웨이퍼 크기 이상의 대면적을 짧은 시간에 건식으로 세정할 수 있다는 장점이 있어 향후 최적화를 통해 그래핀 양산 시 특성 향상을 위한 후처리 방법으로 사용될 수 있음을 확인하였다.

• Journal of the Korean Institute of Gas
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• v.20 no.4
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• pp.1-6
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• 2016

A fuel supply system of heavy-duty CNG engine is composed as a module structure which is integrated by about 6 injectors. There are only one input and output passage for gas fuel supply in this injector module. The response performance for transient operation of an CNG engine is very poor because only one output fuel supply line is connected to the intake pipe after a throttle valve. In this study, a new guideline and internal flow design for the CNG injector module is suggested for the improvement of response performance by fluid dynamic simulations. As a result, the response performance of gas fuel supply can be improved by decreasing the total volume of internal flow passages and a same distance design from each injector to the exit of module shows good response performance and acquirement of linearity of fuel supply. But the injection order has little influence to injection performances.

• Journal of ILASS-Korea
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• v.29 no.1
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• pp.32-37
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• 2024

Macroscopic visualization of non-evaporating sprays was experimentally conducted to investigate spray tip penetration and spray angle under low-density conditions, corresponding to an early injection strategy. Furthermore, injectors with varying injection angles (146° and 70°) and numbers of holes (8 and 14) were employed to examine the impact of injector configuration. Compared to the baseline injector, 8H146, which has 8 holes and a 146° injection angle, the spray tip penetration of the 8H70 injector was found to be longer. This can be attributed to higher momentum due to a smooth flow field between the sac volume and the nozzle inlet, which is located closer to the injector tip centerline. The increase in velocity led to intense turbulence generation, resulting in a wider spray angle. Conversely, the spray tip penetration of the 14H70 injector was shorter than that of the 8H70 injector. The competition between increased velocity and decreased nozzle diameter influenced the spray tip penetration for the 14H70 injector; the increase in momentum, previously observed for the 8H70 injector, contributed to an increase in spray tip penetration, but a decrease in nozzle diameter could lead to a reduction in spray tip penetration. The spray angle for the 14H70 injector was similar to that of the 8H146 injector. Moreover, injection rate measurements revealed that the slope for a narrow injection angle (70°) was steeper than that for a wider injection angle during the injection event.

• Clean Technology
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• v.26 no.1
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• pp.1-6
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• 2020

Rapid expansion of supercritical solution (RESS) process was used to make molsidomine (MOL) loaded peracetyl-β-cyclodextrin (PAc-β-CD) nanoparticles, which were collected into the air. The effect of the concentration of the drug PAc-β-CD (0.5 and 1 wt%), extraction temperature (45 ~ 60 ℃), nozzle length (5 ~ 20 mm) and internal diameter (ID) (50 ~ 150 μm) of a capillary, and spray distance on the particle size and morphology of the resulting particles were investigated. The interaction of a drug and PAc-β-CD was confirmed by ¹H-NMR spectroscopy while the particle size was measured by means of a scanning electron microscope. It was found that increasing the temperature from 45 ℃ to 60 ℃ and decreasing the nozzle diameter from 150 μm to 50 μm had an increasing effect on the average particle size, while increasing the spray distance led to a decrease in the average particle size at a constant pressure of 34.5 MPa and temperature of 45 ℃. With 0.5 wt% of PAc-β-CD, the capillary nozzle of short length (5 mm) and small ID (50 μm) gave the smallest size (165 nm). The obtained nanoparticles showed increased dispersity and solubility in oil. The oil suspension of the inclusion complex showed increased sustainability, which can increase the in-vitro controlled release time of the drug.

• Journal of the Korean Applied Science and Technology
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• v.36 no.4
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• pp.1281-1289
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• 2019

This study was conducted to evaluate the optimal operating condition of ultra-fine bubble washing machine for removing calcium chloride from road concrete structure. The diameter of the ultra-fine bubble was measured to 196.6 ± 100.6 nm and the ultra-fine bubble concentration was measured to 1.36 × 108 cell/ml. As a result of the performance on the spray device of the washing machine, it was confirmed that the washing efficiency of 93% and 91% appeared at 100cm and 150cm of injection distance at 100bar injection pressure. By increasing the ultra-fine bubble generation cycles from 2 to 6, the chloride removal rate increased from 1% to 7%. As the ultra-fine bubble generation air flow was lowered from 4 ml/min to 0.5 ml/min, it was confirmed that the washing efficiency increased up to 30%. The washing efficiency of ultra-fine bubble water was 25% higher than normal water.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.36 no.12
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• pp.1151-1159
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• 2012

Spray visualization and computer simulation of a DME injector have been conducted to investigate the enlarged injection hole diameter effect. To increase the reliability of the computational result, simulation results have been compared with the visualization test results, and the behaviors of a DME spray under various high-pressure and -temperature conditions have been computed. This study shows a discrepancy of 3.57% between the experimental and the computational results of penetration length for an injection pressure of 35 MPa and ambient pressure of 5 MPa. When simulating the engine conditions, the maximum penetration length of a fully developed DME spray is 42 mm when the temperature to pressure ratio is 300 K/MPa. The DME spray behavior is dominantly affected by the ambient pressure under the condition that the ratio is less than 300 K/MPa, and by the ambient temperature under the condition that the ratio is more than 300 K/MPa.

• Journal of Korean Ophthalmic Optics Society
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• v.17 no.3
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• pp.305-309
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• 2012

Purpose:This study was conducted to research any effect on aided distance visual acuity and refractive error changes by using smartphone at near for long term. Methods: 20($20.6{\pm}0.9$ years) young adults subjects with no ocular diseases, over 0.8 of aided distance visual acuity, normal amplitude of accommodation and normal accommodative facility agreed to participate in this study. The subjects were divided into two group, Group 1 (15 cm fixation distance) included 10 subjects and Group 2(40 cm fixation distance) included 10 subjects. Aided distance visual acuity and refractive error were measured before and after using smartphone for 30 minutes by auto-chart project (CP-1000, Dongyang, Korea), phoropter (VT-20, Dongyang, Korea), auto refractor-keratometer (MRK-3100, Huvitz, Korea). After then, the subjects looked at distance with wearing spectacles. Refractive error was measured at 5 minutes, 10 minutes, and 15 minutes later, respectively. Results: After using smartphone at 15 cm for 30 minutes, there was statistically significant reduction of aided distance visual acuity (p=0.030) and increasing myopia (p=0.001). The increased myopia was not statistically significant after 5 minutes rest (p${\geq}$0.464). However there was no statistically significant changes in aided distance visual acuity (p=0.163) and refractive error (p=0.077) after using smartphone at 40 cm for 30 minutes. Conclusions: It is recommend to keep 40 cm off the smartphone from eyes to avoid any aided distance visual acuity and refractive error changes. If smartphone is used closer than 40 cm, a rest for 5 minutes is also recommend after every 30 minutes use with smartphone to avoid any aided distance visual acuity and refractive error changes.

• Transactions of the Korean Society of Automotive Engineers
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• v.17 no.2
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• pp.82-89
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• 2009

In order to investigate the spray characteristics according to diesel and bioethanol blending with biodiesel fuel, macroscopic spray characteristics were analyzed from the comparison of the effect of the injection pressure, ambient pressure and density on the spray tip penetration and spray cone angle. In addition, spray atomization characteristics were studied with local and overall Sauter mean diameter (SMD) and the contour map of SMD distribution at various injection conditions. It was revealed that the spray tip penetration of biodiesel fuels blended with diesel and ethanol was shorter than that of an undiluted biodiesel fuel at low injection pressure. However, the difference of spray tip penetration among three test fuels reduces at a high injection pressure. Increase of the ambient gas density leads to the decrease of the spray tip penetration of three test fuels. When diesel and ethanol fuels add to an undiluted biodiesel fuel, spray cone angle increases due to the decrease of the fuel density at the same ambient pressure condition. On the other hand, the droplet mean diameter decreases due to the reduction of the kinematic viscosity and surface tension.

• Journal of ILASS-Korea
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• v.17 no.4
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• pp.205-209
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• 2012

This study focused on comparing macroscopic characteristics of DME and diesel fuel experimentally. DME fuel is one of the most promising alternative fuels because of its superiority in atomization characteristic and clearness in terms of exhaust gas compared with existing fossil fuels. In addition, DME fuel has high cetane number so it could be applied to compression ignition engine. However because DME fuel exists in gas phase at room temperature and atmospheric pressure, and it corrodes rubber parts of fuel line, DME fuel is hard to apply to commercial vehicles. To establish knowledge about DME fuel and furthermore, to develop commercial DME vehicles such as passenger cars, many research have been proceeded steadily. The present study, by comparing spray characteristics of DME fuel to those of diesel fuel, improved atomization characteristics in DME were revealed. Injection quantity measurement and spray visualization experiment were progressed and it was revealed that DME fuel shows small injection quantity than that of diesel fuel and axial development of spray in terms of spray tip penetration decreases when DME fuel was injected.