• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.371.1-371.1
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• 2014

반도체 트랜지스터의 크기가 점점 미세화 함에 따라 이에 수반되는 절연막에 대한 요구 조건도 까다로워지고 있다. 특히 게이트 산화 막의 두께는 10 nm 이하에서 고밀도를 갖는 높은 유전율 막에 대한 요구가 증가되고 있으며 또한 증착 온도 역시 낮아져야 한다. 이러한 요구사항을 충족하는 기술중의 하나는 매우 낮은 압력 및 200도 이하 저온에서 절연막을 증착하는 것이다. 본 연구에서는 플라즈마 화학 기상 증착(PE-CVD) 시스템을 이용하여 $180^{\circ}C$의 온도 및 10 mTorr의 압력에서 SiN 및 SiCN 박막을 제조하였다. 박막의 특성은 원자층 증착 공정 결과와 유사하면서 증착 속도의 향상을 위해 개조된 사이클릭 화학 기상 증착 공정을 이용하였다. Si 전구체와 산화제는 기판에 공급되기 전에 혼합되어 1차 리간드 분해를 하였으며, 리간드가 일부 제거된 가스가 기판에 흡착되는 구조이다. 기판흡착 후 플라즈마 처리 공정을 이용하여 2차 리간드 분해 공정을 수행하였으며, 반응에 참여하지 않은 가스 제거를 위해 불활성 가스를 이용하여 퍼지 하였다. 공정 변수인 플라즈마 전력, 반응가스유량, 플라즈마 처리 시간은 최적화 되었다. 또한 효율적인 리간드 분해를 위해 ICP와 CCP를 포함하고 있는 이중 플라즈마 시스템에 의해 2회에 걸쳐 분해되어지고, 그 결과로 불순물이 들어있지 않는 순수한 SiN과 SiCN 박막을 증착하였다. XRD 측정 결과 증착된 박막들은 모두 비정질 상이며, 550 nm 파장에서 측정한 SiN 및 SiCN 박막의 굴절률은 각 각 1.801 및 1.795이다. 또한 증착된 박막의 밀도는 2.188 ($g/cm^3$)로서 유전체 박막으로 사용하기에 충분한 값임을 확인하였다. 추가적으로 300 mm 규모의 Si 웨이퍼에서 측정된 비 균일도는 2% 이었다. 저온에서 증착한 SiN 및 SiCN 박막 특성은 고온 공정의 그것과 유사함을 확인하였고, 이는 저온에서의 유전체 박막 증착 공정이 반도체 제조 공정에서 사용 가능하다는 것을 보여준다.

• Journal of IKEEE
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• v.24 no.3
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• pp.743-753
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• 2020

In this paper, we propose a set of robustness indicators for immersive 360-degree video. With the full-fledged service of mobile carriers' 5G networks, it is possible to use large-capacity, immersive 360-degree videos at high speed anytime, anywhere. Since it can be illegally distributed in web-hard and torrents through DRM dismantling and various video modifications, however, evaluation indicators that can objectively evaluate the filtering performance for copyright protection are required. In this paper, a robustness indicators is proposed that applies the existing 2D Video robustness indicators and considers the projection method and reproduction method, which are the characteristics of Immersive 360-degree Video. The performance evaluation experiment has been carried out for a sample filtering system and it is verified that an excellent recognition rate of 95% or more has been achieved in about 3 second execution time.

• The Journal of the Korea Contents Association
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• v.11 no.3
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• pp.1-8
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• 2011

Automatic vehicle license plate recognition technology is widely used in gate control and parking control of vehicles, and police enforcement of illegal vehicles. However inherent geometric information of the license plate can be transformed in the vehicle images due to the slant and the sunlight or lighting environment. In this paper, a distortion invariant vehicle license plate extraction and recognition algorithm is proposed. First, a binary image reserving clean character strokes can be achieved by using a DoG filter. A plate area can be extracted by using the location of consecutive digit numbers that reserves distortion invariant characteristic. License plate is recognized by using neural networks after geometric distortion correction and image enhancement. The simulation results of the proposed algorithm show that the accuracy is 98.4% and the average speed is 0.05 seconds in the recognition of 6,200 vehicle images that are obtained by using commercial LPR system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.10
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• pp.1229-1237
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• 2013

In this study, the theory of spherical indentation based on incremental plasticity is extended to an indentation method for evaluating creep properties. Through finite element analysis (FEA), the point where the elastic strain effect is negligible and the creep strain gradient constant is taken as the optimum point for obtaining the equivalent strain rate and stress. Based on FE results for spherical indentation with various values of creep exponent and creep coefficient, we derive by regression an equation to calculate creep properties using two normalized variables. Finally a program is generated to calculate creep exponent and creep coefficient. With this method, we obtain from the load-depth curve creep exponents with an average error of less than 1.5 % and creep coefficients with an average error of less than 1.0 %.

• Journal of the Korean Society of Hazard Mitigation
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• v.8 no.3
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• pp.87-93
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• 2008

The large scale shaker can be employed to measure linear and nonlinear shear moduli of soils in situ as a function of shear strain. The method involves applying dynamic loads on a surface foundation measuring the dynamic response of the soil mass beneath the foundation with embedded instrumentation. This paper focuses on the development of a framework of the inverse analysis for the interpretation of test data to estimate linear and nonlinear shear moduli of soils along with the necessity of the inverse analysis. The suggested framework is based on the nonlinear least squares but it uses two iterative loops to account for the nonlinear behavior of soil that sensors are not located. The validity of the suggested inversion framework is tested through a series of numerical parametric studies. An example use of the suggested inversion framework is also shown. Because the field condition may affect the accuracy of suggested method, it is important to conduct a preliminary inverse analysis to quantify the discrepancy between the estimated modulus and the baseline.

• Journal of Biomedical Engineering Research
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• v.23 no.4
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• pp.281-286
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• 2002

In this study, blood flow in a carotid artery supplying blood to the human's brain has been numerically simulated to find out how the blood flow affects the genesis and the growth of atherosclerosis and arterial thrombosis. Velocity Profiles and hemodynamic parameters have been investigated for the carotid arteries with three different stenoses under physiological flow condition. Blood has been treated as Newtonian and non-Newtonian fluid. To model the shear thinning properties of blood for non-Newtonian fluid, the Carreau-Yasuda model has been employed. The result shows that the wall shear stress(WSS) increases with the development of stenosis and that the wall shear stress in Newtonian fluid is highly evaluated compared with that in non-Newtonian Fluid. Oscillatory shear index has been employed to identify the time-averaged reattachment point and this point is located farther from the stenosis for Newtonian fluid than for non-Newtonian fluid The wall shear stress gradient(WSSG) along the wall has been estimated to be very high around the stenosis region when stenosis is developed much and the WSSG peak value of Newtonian fluid is higher than that of non-Newtonian fluid.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.15 no.3
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• pp.399-407
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• 2002

A three-dimensional method of analysis is presented for determining the free vibration frequencies and mode shapes of hollow bodies of revolution (i.e., thick shells), not limited to straight line generators or constant thickness. The middle surface of the shell may have arbitrary curvatures, and the wall thickness may vary arbitrarily. Displacement components$U_\Phi, U_z, U_\theta$ in the meridional, normal and circumferential directions, respectively, are taken to be sinusoidal in time, periodic in$\theta$, and algebraic polynomials in the$\Phi$and z directions. Potential(strain) and kinetic energies of the entire body are formulated, and upper bound values of the frequencies are obtained by minimizing the frequencies. As the degrees of the polynomials are increased, frequencies converge to the exact values. Novel numerical results are presented for two types of thick conical shells and thick spherical shell segments having linear thickness variations. Convergence to four digit exactitude is demonstrated for the first five frequencies of both types of shells. The method is applicable to thin shells, as well as thick and very thick ones.

• Journal of the Korea Concrete Institute
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• v.26 no.6
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• pp.671-677
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• 2014

In this research, flow experiments and simulation of highly flowable concrete has been attempted using a viscoplastic particle method varying with dosages of SP admixture and water-cement (W/C) ratios. Rheological and flow characteristics of flowable concrete manufactured in domestic products of cement, aggregates, and SP admixtures were investigated by experimental programs varying with mix proportions. From experiment, the predictive model of rheological characteristics of flowable concrete has been newly proposed considering with the effects of the W/C ratio and the dosage of SP admixture, and the effect of mixing proportion has also been incorporated into shear stress and strain rate curve of flowable concrete in the current method. A series of L-box flow test of highly flowable concrete varying with dosages of SP admixture and W/C ratios was compared with the proposed model.

• Journal of the Korea Institute of Military Science and Technology
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• v.16 no.6
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• pp.857-866
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• 2013

This paper is concerned with the material properties of functional high explosive(FHX) simulant at various strain rates ranging from $10^{-4}/sec$ to $10^1/sec$. Material properties of FHX at high strain rates are important in prediction of deformation modes of FHX in a warhead which undergoes dynamic loading. Inert FHX stimulant which has analogous mechanical properties with FHX was utilized for material tests due to safety issues. Uniaxial tensile tests at quasi-static strain rates ranging from $10^{-4}/sec$ to $10^{-2}/sec$ and intermediate strain rates ranging from $10^{-1}/sec$ to $10^1/sec$ were conducted with JANNAF specimen using a tensile testing machine, INTRON 5583, and developed high speed material testing machine, respectively. Uniaxial compressive tests at quasi-static strain rates and intermediate strain rates were conducted with cylindrical specimen using a dynamic materials testing machine, INSTRON 8801. And cyclic compressive loading tests were performed with various strain rates and strains. Deformation behaviors were investigated using captured images obtained from a high-speed camera.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.8
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• pp.1035-1041
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• 2013

To evaluate the structural integrity and dynamic characteristic of the knuckle part of a KTX anti-roll bar, an experimental and a numerical approach were used in this study. In the experimental approach, the acceleration and strain data for the knuckle parts of the KTX and KTX-SANCHUN anti-roll bar were respectively measured to evaluate and compare its structural dynamic characteristics under the operating environments of the Honam line. In the numerical approach, the evaluation of its structural integrity was conducted using LS-DYNA 3D, and then, the reliability of the finite element model used was ensured by a comparative evaluation with the experiment. The numerical results showed that the stress and velocity field of the knuckle part composed of a layered structure of a thin steel plate and rubber were more moderate than those of the knuckle part made of only a thick steel block owing to the reduction of relative contact between the knuckle and the connecting rod. It was found that the knuckle part made of a thin steel plate and rubber was recommended as the best solution to improve its structural integrity resulting from the elastic behavior of the KTX anti-roll bar being enabled under a repeating external force.