• Title/Summary/Keyword: 변형된 마스크

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질화규소 삽입층을 이용한 a면 질화갈륨 박막의 깊은 준위 연구

  • Song, Hu-Yeong;Seo, Ju-Yeong;Lee, Dong-Ho;Kim, Eun-Gyu;Baek, Gwang-Hyeon;Hwang, Seong-Min
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.08a
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    • pp.230-230
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    • 2010
  • 질화갈륨 기반의 III족-질화물 계열의 반도체 물질은 녹색-자외선 영역의 발광다이오드에 응용되어 왔으며 고효율, 고휘도 발광소자의 구현 및 성능 향상을 위해 많은 연구가 진행되었다. 일반적으로 널리 사용되어온 c축 방향으로 성장된 질화갈륨 기반 발광다이오드에서는 활성층의 에너지 밴드구조가 내부전기장에 의해 변형되어 전자와 정공의 재결합 확률이 저하된다. c축 방향으로 형성되는 내부전기장은 축방향으로의 자발적 분극화와 높은 압전 분극 현상에 기인한다. 이와 같은 분극 성장에서의 내부양자효율 저하 현상을 해결하기 위하여 내부 전기장이 존재하지 않는 a축과 m축과 같은 무분극 방향으로의 성장이 집중적으로 연구되고 있다. 현재 사파이어 기판위에서 무분극 성장된 박막은 높은 밀도의 결함이 발생하여 고품위의 발광다이오드 동작에 어려움을 겪고 있다. 최근 결함 밀도를 낮추고 높은 결정성을 갖는 무분극 질화갈륨 박막을 성장하기 위하여 2-단계 성장 방법, 나노구조층 삽입, 산화규소 마스크 패턴 등 다양한 성장 방법들이 연구되어 주목할 만한 연구 결과들이 보고되고 있다. 다양한 성장 방법들에 의해 성장된 박막들은 고유한 특성들을 보이는데, 특히 박막 성장방법에 따라 박막 내부에 형성되는 깊은 준위의 특성들은 발광다이오드의 소자 특성에도 큰 영향을 미치게 되므로 무분극 박막에서의 깊은 준위에 대한 연구가 필요하다. 본 연구에서는 금속-유기 화학기상증착 방법으로 r면의 사파이어기판 위에 a면의 질화갈륨을 성장시켰다. 고품질의 결정성을 구현하기 위해 저온 핵형성층, 3차원 성장층, 2차원 중간온도 성장층, 2차원 성장층의 4개 버퍼층을 사용하였으며, 질화규소 나노구조층을 삽입함으로써 고품 위의 a면 질화갈륨 박막을 구현하였다. 성장된 a면 질화갈륨 박막에 형성된 깊은 준위들은 접합용량과도분광법을 이용하여 분석되었으며 질화규소 삽입층의 유무에 따른 깊은 준위의 특성 차이에 대한 연구를 수행하였다.

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Music Recognition by Partial Template Matching (부분적 템플릿 매칭을 활용한 악보인식)

  • Yoo, Jae-Myeong;Kim, Gi-Hong;Lee, Guee-Sang
    • The Journal of the Korea Contents Association
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    • v.8 no.11
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    • pp.85-93
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    • 2008
  • For music score recognition, several approaches have been proposed including shape matching, statistical methods, neural network based methods and structural methods. In this paper, we deal with recognition for low resolution images which are captured by the digital camera of a mobile phone. Considerable distortions are included in these low resolution images, so when existing technology is used, many problems appear. First, captured images are not stable in the sense that they contain lots of distortions or non-uniform illumination changes. Therefore, notes or symbols in the music score are damaged and recognition process gets difficult. This paper presents recognition technology to overcome these problems. First, musical note to head, stick, tail part are separated. Then template matching on head part of musical note, and remainder part is applied. Experimental results show nearly 100% recognition rate for music scores with single musical notes.

고밀도 유도 결합형 플라즈마를 이용한 Mo 건식 식각 특성

  • 성연준;이도행;이용혁;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.126-126
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    • 1999
  • 본 실험의 목적은 FED의 상부, 하부 전극으로 사용되는 Mo를 건식, 습식 식각함으로써 DED 소자의 공정을 개발하는 것이다. Mo는 $261^{\circ}C$의 높은 융점을 지니고 있으며, 우수한 열적 안정성과 비교적 낮은 비저항을 가지는 재료로써 FED와 같은 전계 방출 소자의 cathod 팁 및 전극물질로 사용되어지는 가장 보편적인 물질이다. FED와 같은 전계방출소자가 갖추어야 할 요건은 전자 방출 영역이 소자 동작시 변형되지 않아야 하고, 기계적 ,화학적, 열적 내구성이 좋아야 함인데 이러한 요건을 충족시킬 수 있고 가장 범용적으로 사용되는 물질이 Mo이다. 실험에서 사용된 Mo는 DC magnetron sputter를 사용하여 Ar 가스를 첨가하여 5mTorr하에서 Si 기판위에 증착속도를 300$\AA$/min로 하여 1.6$\mu\textrm{m}$ 증착하였다. 본 실험의 Mo 식각은 고밀도 플라즈마원인 ICP를 이용하였다. 식각특성은 식각 가스조합, inductive power, bias voltage, 공정 압력의 다양한 공정 변수에 따른 식각특성 변화를 관찰하였다. 식각시 chlorine 가스를 주요 식각 가스로 사용하고 BCl3, O2, Ar을 첨가가스로 사용하였으며, inductive power는 300-600, bias voltage는 120-200V 사용하였고 압력은 15-30mTorr, 기판온도는 7$0^{\circ}C$로 유지하였으며 식각마스크로는 electron-beam evaporator로 1$\mu\textrm{m}$ 증착한 SiO2를 patterning하여 사용하였다. 식각속도는 stylus profiler를 이용하여 측정하였으며 식각후 profile은 scanning electron microscopy (SEM)을 통하여 관찰하였다. 실험 결과 순수한 Cl2 BCl3 가스만을 사용한 경우 보다는 Cl2 가스에 O2를 첨가하였을 때 좋은 선택비를 얻었다. 또한, inductive power와 bias voltage, Mo의 식각속도의 적절한 조절을 통해 SiO2에 대한 선택도를 변화시킬 수 있었다. Cl2:O2비를 1:1로 하고 400W/-150V, 20mTorr의 압력, 7$0^{\circ}C$ 기판온도에서 식각시 200$\AA$/min의 Mo 식각속도, SiO2와의 선택비 8:1을 얻을 수 있었다. 또한 실제 FED 소자 구조형성에 적용한 결과 비등방적인 식각형상을 형성할 수 있었다.

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The Edge-Based Motion Vector Processing Based on Variable Weighted Vector Median Filter (에지 기반 가변 가중치 벡터 중앙값 필터를 이용한 움직임 벡터 처리)

  • Park, Ju-Hyun;Kim, Young-Chul;Hong, Sung-Hoon
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.35 no.11C
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    • pp.940-947
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    • 2010
  • Motion Compensated Frame Interpolation(MCFI) has been used to reduce motion jerkiness for dynamic scenes and motion blurriness for LCD-panel display as post processing for high quality display. However, MCFI that directly uses the motion information often suffers from annoying artifacts such as blockiness, ghost effects, and deformed structures. So in this paper, we propose a novel edge-based adaptively weighted vector median filter as post-processing. At first, the proposed method generates an edge direction map through a sobel mask and a weighted maximum frequent filter. And then, outlier MVs are removed by average of angle difference and replaced by a median MV of $3{\times}3$ window. Finally, weighted vector median filter adjusts the weighting values based on edge direction derived from spatial coherence between the edge direction continuity and motion vector. The results show that the performance of PSNR and SSIM are higher up to 0.5 ~ 1 dB and 0.4 ~ 0.8 %, respectively.

Development of Polygonal Model for Shape-Deformation Analysis of Amorphous Carbon Hard Mask in High-Density Etching Plasma (고밀도 식각 플라즈마에서 비정질 탄소 하드 마스크의 형상 변형 해석을 위한 다각형 모델 개발)

  • Song, Jaemin;Bae, Namjae;Park, Jihoon;Ryu, Sangwon;Kwon, Ji-Won;Park, Taejun;Lee, Ingyu;Kim, Dae-Chul;Kim, Jong-Sik;Kim, Gon-Ho
    • Journal of the Semiconductor & Display Technology
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    • v.21 no.4
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    • pp.53-58
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    • 2022
  • Shape changes of hard mask play a key role in the aspect ratio dependent etch (ARDE). For etch process using high density and energy ions, deformation of hard mask shape becomes more severe, and high aspect ratio (HAR) etch profile is distorted. In this study, polygonal geometric model for shape-deformation of amorphous carbon layered hard mask is suggested to control etch profile during the process. Mask shape is modeled with polygonal geometry consisting of trapezoids and rectangles, and it provides dynamic information about angles of facets and etched width and height of remained mask shape, providing important features for real-time HAR etch profiling.

A Study on Elementary Students' Perceptions of Science, Engineering, and Technology and on the Images of Scientists, Engineers, and Technicians (초등학생의 과학, 공학, 기술에 대한 인식 및 과학자, 공학자, 기술자에 대한 이미지 조사)

  • Jung, Jinkyu;Kim, Youngmin
    • Journal of The Korean Association For Science Education
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    • v.34 no.8
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    • pp.719-730
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    • 2014
  • The purpose of this study was to investigate elementary school students' perceptions about science, engineering and technology and their images of scientists, engineers, and technicians. In order to investigate students' images of scientists, engineers, technicians and student's perception of science, engineering, and technology, we used the tools "Draw a scientist at work, Draw an engineer at work, and Draw a technician at work". We have revised the tool DAST (Draw a scientist test), which was used in Fralick et al.'s study (2009). Subjects were 209 6th grade students sampled from an elementary school in G-city in Korea. According to the results of this study, the students' representative image of a scientist was similar to stereotypical scientist image in previous studies, but the students perceived science as a field of research with various professionals. The students' representative image of an engineer was a man with short hair, no beard or mustache, wearing ordinary clothes but no glasses. The engineer was designing or constructing a ship, a robot, a computer, and an airplane. The students' representative image of a technician was a man with short hair, wearing protective goggles and a mask for welding. The technician was fixing a car, a robot, a rocket, etc. and working with wrenches, hammers, screw drivers, welding machines, etc. Many students didn't perceive engineering and technology as fields of research. Also, many students didn't variously perceive engineering and technology as fields and ways of study.

Recognition of Resident Registration Card using ART2-based RBF Network and face Verification (ART2 기반 RBF 네트워크와 얼굴 인증을 이용한 주민등록증 인식)

  • Kim Kwang-Baek;Kim Young-Ju
    • Journal of Intelligence and Information Systems
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    • v.12 no.1
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    • pp.1-15
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    • 2006
  • In Korea, a resident registration card has various personal information such as a present address, a resident registration number, a face picture and a fingerprint. A plastic-type resident card currently used is easy to forge or alter and tricks of forgery grow to be high-degree as time goes on. So, whether a resident card is forged or not is difficult to judge by only an examination with the naked eye. This paper proposed an automatic recognition method of a resident card which recognizes a resident registration number by using a refined ART2-based RBF network newly proposed and authenticates a face picture by a template image matching method. The proposed method, first, extracts areas including a resident registration number and the date of issue from a resident card image by applying Sobel masking, median filtering and horizontal smearing operations to the image in turn. To improve the extraction of individual codes from extracted areas, the original image is binarized by using a high-frequency passing filter and CDM masking is applied to the binaried image fur making image information of individual codes better. Lastly, individual codes, which are targets of recognition, are extracted by applying 4-directional contour tracking algorithm to extracted areas in the binarized image. And this paper proposed a refined ART2-based RBF network to recognize individual codes, which applies ART2 as the loaming structure of the middle layer and dynamicaly adjusts a teaming rate in the teaming of the middle and the output layers by using a fuzzy control method to improve the performance of teaming. Also, for the precise judgement of forgey of a resident card, the proposed method supports a face authentication by using a face template database and a template image matching method. For performance evaluation of the proposed method, this paper maked metamorphoses of an original image of resident card such as a forgey of face picture, an addition of noise, variations of contrast variations of intensity and image blurring, and applied these images with original images to experiments. The results of experiment showed that the proposed method is excellent in the recognition of individual codes and the face authentication fur the automatic recognition of a resident card.

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