• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1938-1940
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• 2003

본 연구는 요소 센서 제작을 위한 과정으로서, 전기화학적 방법을 이용한 다공질 실리콘 구조 형성과, PDV(Physical Vapor Deposition) 법에 의한 백금 박막 코팅 및 전기화학적 전도성 고분자 코팅과 urease 고정화 단계를 고찰하고 감도 특성을 제시 하였다. 전극 기질로서 B을 도우핑한 p-type 실리콘웨이퍼를 사용하였고, HF:$C_2H_5OH:H_2O$=1:2:1의 부피비를 갖는 에칭 용액에서 5분간 -7 $mA/cm^2$의 일정 전류를 가하여 폭 2 ${\mu}m$, 깊이 10 ${\mu}m$의 다공질 실리콘(PS) 충을 형성하였다. 그 위에 200 ${\AA}$의 Ti 층을 underlayer로서 증착하고, 2000 ${\AA}$의 Pt를 중착하여 PS/Pt 박막 전극을 제작하고, 전도성 고분자로서 polypyrrole (PPy), 또는 poly(3-mehylthiophene) (P3MT)을 전기화학적으로 코팅한 후, urease(EC 3.5.1.5, type III, Jack Bean, Sigma)를 고정화 하였다. 고정화 시 전해질 수용액의 pH는 7.4로 하여 urease표면이 음전하를 갖도록 하고, 전극에 0.6 V (vs. SCE(Saturated Calomel Electrode))의 일정 전압을 가함으로써 urease가 전도성 고분자 표면에 전기적으로 흡착되도록 하였다. 이상의 방법으로 제작한 요소 센서의 감도는 PPy와 P3MT를 전자 전달 매질로 사용한 경우, 각각 8.44 ${\mu}A/mM{\cdot}cm^2$와 1.55 ${\mu}A/mM{\cdot}cm^2$의 감도를 보였다.

• Journal of Sensor Science and Technology
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• v.17 no.3
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• pp.178-182
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• 2008

Planar type micro catalytic combustible gas sensor was developed by using nano crystalline $SnO_2$ Pt thin film as micro heater was deposited by thermal evaporation method on the alumina substrate. The thickness of the Pt heater was around 160 nm. The sensor showed high reliability with prominent selectivity against various gases(Co, $C_3H_8,\;CH_4$) at low operating temperature($156^{\circ}C$). The sensor with nano crystalline $SnO_2$ showed higher sensitivity than that without nano crystalline $SnO_2$. This can be explained by more active adsorption and oxidation of hydrogen by nano crystalline $SnO_2$ particles. The present planar-type catalytic combustible hydrogen sensor with nano crystalline $SnO_2$ is a good candidate for detection of hydrogen leaks.

• Transactions of the Korean hydrogen and new energy society
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• v.20 no.4
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• pp.331-336
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• 2009

수소가 Pt/$MoO_3$로 흡장되는 현상을 XRD, TEM, CO 화학흡착 분석방법을 사용하여 조사하였다. 소성과정은 Pt/$MoO_3$ 촉매의 Chlorine 함유량을 감소하며 박막을 형성하였다. 소성전과 비교하여 수소 흡장량은 소성 후에 증가하였다. Orthorhombic Pt/$MoO_3$은 Hexagonal Pt/$MoO_3$보다 항상 수소 흡장량이 증가하였다. 상대적으로 Hexagonal Pt/$MoO_3$에서 수소 흡장량이 감소하는 이유는 Hexagonal 결정격자 내에 존재하는 $NH_4^+$ 이온에 기인하는 것으로 판단된다. 결정격자 내부로의 수소 침투시 암모니움 이온이 수소내부 기공에 장애물 역할을 하므로, 수소 흡장량이 감소하는 것으로 판단된다.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.6
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• pp.451-455
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• 1999

The highest etch rate of Pt film was obtained at 10% $Cl_2$/90% Ar gas mixing ratio in our previous investigation. However, the problems such as the etch residues(fence) remained on the pattern sidewall, low selectivity to oxide as mask and low etch slope were presented. In this paper, the etching by additive $O_2$ gas to 10% $Cl_2$/90% Ar gas base was examined. As a result, the fence-free pattern and higher etch slope as about 60$^{\circ}$was observed and the selectivity to oxide increased to 2.4 without decreasing of the etch rate $1500{\AA}$/min. XPS surface analysis proved that a only little $O_2$ gas removes the Pt-CI compounds as residues on the etched surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.372-372
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• 2011

염료 감응형 태양전지는 상,하판 투명전극(TCO), 나노입자의 다공질 TiO2, 염료 고분자 층으로 구성된 광전극과 투명전극 및 백금(Pt) 박막으로 구성된 상대전극 그리고 두 전극 사이를 산화 환원용 전해질 용액으로 채우고 있는 구조이다. 이 구조에서 투명전극(TCO)은 재료비의 많은 부분을 차지하므로 제작비용 절감을 위한 TCO-less에 관한 연구가 활발히 진행 중이다. 본 연구에서는 TCO-less 염료 감응형 태양전지 제작을 위해 이중층 Ti 전극 구조를 제안하였다. 제작과정은 광조사 부분을 확보한 유리기판에 e-beam 증착법을 이용해 Ti 전극을 증착시킨 후 TiO2를 Ti전극과 일부 중첩하여 인쇄하고 그 위에 두 번째 Ti전극을 제작한다. 이중층 Ti전극 구조는 SEM, EIS 등의 분석장비를 사용하였고 기존 FTO 구조에 비해 단락전류밀도, 에너지 변환효율은 감소하였으나 직렬 내부저항이 약 27% 감소하여 fill factor가 28% 향상된 결과를 얻을 수 있었다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.11a
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• pp.71-74
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• 2002

Currently small and accurate dosimeters are on the rise. In this study, the feasibility and energy dependency of the electret dosimeter that made of PET (polyethylene terephtalate) were observed by irradiating 4, 6, 15 MV photon beams from the clinical linear accelerator to develop a dosimeter for the clinical field. $10{\times}10cm$ field size of the photon beams were irradiated to the electret dosimeter where the 2.5 cm depth in the polystylene phantom from 100 cm SSD, while 300 DCV was applied to the electret dosimeter. The result showed that the absorbed dose was proportional to the charge linearly, and the volume of a dosimeter could be reduced and the signals were high enough. According to this study, it was found that the polymer electret detector could be produced as a large quantity with a small cost and showed the feasibility of a realtime measurement.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.8 no.3
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• pp.62-67
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• 2009

Pt thin films on Cr or Ti interlayer were deposited onto a tungsten carbide(WC) substrate by the ion beam assisted DC magnetron sputtering. The various atomic percent of Cr and Ti underneath of the Pt films were prepared to examine the total thin film characteristics. The microstructure and surface analysis of the specimen were conducted by using the SEM, XRD and AFM. Mechanical properties such as hardness and adhesion strength of Pt thin film also were examined. The interlayer of pure Ti was formed with 40 nm thickness while that of pure Cr was done with 50 nm as standard reference. The growth rate of either Cr or Ti thin film was almost same under the same deposition conditions. The SEM images showed that anisotropic grain of Pt thin films consisting of dense columnar structures irrespectively grew from the different target compositions. The values of hardness and adhesion strength of Cr/Pt thin film coated on a WC substrate were higher than those of Ti/Pt thin film.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1520-1521
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• 2007

고분자 전해질 연료전지(PEMFC, polymer electrolyte membrane fuel cell)는 수소이온특성을 갖는 고분자막을 전해질로 사용하는 연료전지로서 무공해 차량의 동력원, 가정용 발전, 우주선용 전원, 군사용 전원 등 매우 다양한 부분에서 사용되어질 것으로 사료된다. 하지만 현재 높은 가격과 짧은 수명 등의 문제로 상용화에 이르지 못하고 있다. 고분자전해질 연료전지의 스택 가격을 부품별로 조사하여 보면 분리판이 전체 스택가격의 60% 정도가 가장 높은 비중을 차지하며 기체 확산층으로 사용되는 탄소재료가 12%,전해질이 10%, 촉매가 8% 정도를 차지한다. 촉매 또한 저가의 비귀금속 촉매를 개발하거나 백금 촉매의 성능을 향상시켜 촉매 사용량을 낮춤으로써 가격을 낮추기 위한 연구가 진행되어지고 있으며 전해질로 사용하는 고분자막도 가격이 매우 높은 Nafion 대신 저가 고분자를 개발하거나, 또는 가능한 얇은 전해질을 사용하기 위한 노력이 이루어지고 있다. 하지만 아직까지는 뚜렷한 진척성과가 없는 것으로 알려져 있다. 그래서 본 연구에서는 고분자 전해질 연료전지의 고분자 Membrane의 특성을 향상시키고 또한 박막의 배양성과 특성에 대해서 고찰해 보고자한다.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.154-162
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• 1998

A planar Bi-Sb multijunction thermal converter with high thermal sensitivity and small ac-dc transfer error has been fabricated by preparing the bifilar thin film Pt-heater and the hot junctions of thin film Bi-Sb thermopile on the $Si_{3}N_{4}/SiO_{2}/Si_{3}N_{4}$-diaphragm, which functions as a thermal isolation layer, and the cold junctions on the dielectric membrane supported with the Si-substrate, which acts as a heat sink, and its ac-dc transfer characteristics were investigated with the fast reversed dc method. The respective thermal sensitivities of the converter with single bifilar heater were about 10.1 mV/mW and 14.8 mV/mW in the air and vacuum, and those of the converter with dual bifilar heater were about 5.1 mV/mW and 7.6 mV/mW, and about 5.3 mV/mW and 7.8 mV/mW in the air and vacuum for the inputs of inside and outside heaters, indicating that the thermal sensitivities in the vacuum, where there is rarely thermal loss caused by gas, are higher than those in the air. The ac-dc voltage and current transfer difference ranges of the converter with single bifilar heater were about ${\pm}1.80\;ppm$ and ${\pm}0.58\;ppm$, and those of the converter with dual bifilar heater were about ${\pm}0.63\;ppm$ and ${\pm}0.25\;ppm$, and about ${\pm}0.53\;ppm$ and ${\pm}0.27\;ppm$, respectively, for the inputs of inside and outside heaters, in the frequency range below 10 kHz and in the air.

• Journal of the Mineralogical Society of Korea
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• v.28 no.1
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• pp.29-38
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• 2015

Cyanide can be leached out from the cyanidation method which has been used to extract high-purity gold and silver from ores, and it becomes a variety of cyanide complexes associated with heavy metals contained in ores. Such cyanide complexes are considered as persistent and non-degradable pollutants which cause adverse effects on humans and surrounding environments. Based on binding force between heavy metals and cyanide, cyanide complexes can be categorized weak acid dissociable (WAD) and strong acid dissociable (SAD). This study comparatively evaluated the performance of photo-catalytic process with regard to forms of cyanide complexes. In particular, both effects of UV LED wavelength and surface modification of photo-catalyst on the removal efficiency of cyanide complexes were investigated in detail. The results indicate that the performance of photo-catalytic oxidation is significantly affected by the form of cyanide complexes. In addition, the effect of UV LED wavelength on the removal efficiency was quite different between free cyanide and cyanide complexes associated with heavy metals. The results support that the surface modification of photo-catalyst, such as doping can improve overall performance of photo-catalytic oxidation of cyanide complexes.