• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2007.11a
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• pp.225-228
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• 2007

Micro solid propellant thruster is the most feasible for development with current MEMS. Basic components of micro solid propellant thruster are diverging nozzle, micro igniter, combustion chamber, and solid propellant. Micro nozzles and micro chambers were fabricated using photosensitive glass by anisotropic wet etching technique. Micro Pt heaters on glass membrane which ignited solid propellant were developed. Components of thruster were integrated. Successful ignition was observed.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.224-227
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• 1996

Platinum thin films were deposited on Si-wafer by DC magnetron sputtering for RTD (Resistance Thermometer Devices). We investigated the physical and electrical characteristics of these films under various conditions, the input power, working vacuum, temperature of substrate and also after annealing these films. The deposition rate was increased with increasing the input power but decreased with increasing Ar gas pressure. The resistivity were decreased wish increasing the temperature of substrate and the annealing time at 1000$^{\circ}C$. At substrate temperature 300$^{\circ}C$, input power 7(w/$\textrm{cm}^2$), working vacuum 5mtorr and annealing conditions 1000$^{\circ}C$, 240 min we obtained 10.65${\mu}$Ω$.$cm, resistivity of Pt thin film closed to the bulk value.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.11 no.10
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• pp.804-808
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• 1998

The inductively coupled plasma(ICP) etching of platinum with BCl$_3$/Cl$_2$ gas chemistry has been studied. X-ray photoelectron spectroscopy (XPS) was used to investigate the chemical binding states of the etched surface. The plasma characteristics was extracted from optical emission spectroscopy (OES) and a single Langmuir probe. In this case of Pt etching using BCl$_3$/Cl$_2$ gas chemistries, the result of OES and Langmuir probe showed the increase of Cl radicals and ion current densities in the plasmas with increasing Cl$_2$ gas ratio. At the same time, XPS results indicated that the intensities of Pt 4f decreased with increasing Cl$_2$ gas ratio. The decrease of Pt 4f intensities implies the increase of residue layer thickness on the etched Pt surface.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1999.11a
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• pp.354-357
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• 1999

This paper describes on the electrical and physical charateristics thin-film type Pt-RTD\\`s on Si wafers, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO$_2$ layer. The MgO medium layer had the properties of improving Pt adhesion to SiO$_2$ and insulation without chemical reaction to Pt thin-films and the resistivity of Pt thin-films was improved. In the analysis of properties of Pt-RTD, TCR value had 3927 ppm/$^{\circ}C$ and liner in the temperature range of room temperature to 40$0^{\circ}C$

• Proceedings of the KIEE Conference
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• 1996.11a
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• pp.242-244
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• 1996

Platinum thin films were deposited on Si-wafer by DC magnetron sputtering for RTD (Resistance Thermometer Devices). We investigated the physical and electrical characteristics of these films under various conditions, the input power, working vacuum, temperature of substrate and also after annealing these films. The Resistivity and Sheet Resistivity were decreased with increasing the temperature of substrate and the annealing time at $1000^{\circ}C$. At substrate temperature $300^{\circ}C$, input power 7(w/$cm^2$), working vacuum 5mtorr and annealing conditions $1000^{\circ}C$, 240min we obtained $10.65{\mu}{\Omega}{\cdot}cm$, Resistivity of Pt thin film and $3000{\sim}3900ppm/^{\circ}C$, TCR(temperature coefficient of resistance) closed to the bulk value.

• Korean Journal of Materials Research
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• v.3 no.6
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• pp.632-637
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• 1993

The optical properties and electrochromism of amorphous $WO_3$ thin films were studied. $WO_3$ thin films with thickness of 3000$\AA$~6000$\AA$ were deposited by vacuum evaporat.ion. All these films were transparent and found to be amorphous in structure by X-ray diffraction analysis and the visible wave length refractive indices were found to be between 1.9 and 2.1 and the optical energey gap to be 3.25 eV. Electrochromic devices were made consisting of IT0 transparent electrode, $WO_3$ thin films, $LiCIO_4$- propylene carbonate and Pt counter electrode. In terms of their operation, the amorphous $WO_3$ films were colored blue by a double injection of electrons from the transparent electrode and lithium ions from the $LiCIO_4$-propylene carbonate organic electrolyte and made colorless by electrochemical oxidation reaction. The electrochromic properties of $WO_3$ thin films including coloration and bleaching, optical density and response time were all found to be strongly dependent on the film deposition condition, electrolyte concentration, sheet resistance of the transparent electrode and applied voltage.

• Journal of Sensor Science and Technology
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• v.6 no.5
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• pp.400-406
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• 1997

The electrical and physical characteristics of aluminum oxide and Pt thin films on it, deposited by reactive sputtering and DC magnetron sputtering, respectively, were analyzed with increasing annealing temperature($400{\sim}800^{\circ}C$) by four point probe, SEM and XRD. Under $600^{\circ}C$ of annealing temperature, aluminum oxide had the properties of improving Pt adhesion to $SiO_{2}$ and insulation without chemical reaction to Pt thin films and the resistivity of Pt thin films was improved. But these properties of aluminum oxide and Pt thin films on it were degraded over $700^{\circ}C$ of annealing temperature because aluminum oxide was changed into metal aluminum and then reacted to Pt thin films deposited on it. The thermal characteristics of Pt micro heater were analyzed with Pt-RTD integrated on the same substrate. In the analysis of properties of Pt micro heater, active area was smaller size, Pt micro heater had better thermal characteristics. The temperature of Pt micro heater with active area, $200{\mu}m{\times}200{\mu}m$ was up to $400^{\circ}C$ with 1.5watts of the heating power.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.436-436
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• 2014

본 연구에서는 전 세계적으로 활발히 연구되고 있는 나노바이오센서 분야 중 가장 주목을 받고 있는 LSPR 원리를 이용한 바이오센서를 제작하였다. 금속 나노입자의 국소 표면 플라즈몬 공명현상에 의한 주위환경에 민감하게 반응하는 특성은 고감도 광학형 바이오센서, 화학물질 검출 센서등에 응용된다. 특히 금 나노막대와 같은 1차 나노구조물은 나노막대의 주변 환경 변화에 따라 뚜렷한 플라즈몬 흡수 밴드 변화를 나타냄으로 센서로 적용 했을 때 고감도의 측정이 가능하다. 본 연구에서는 다공성인 알루미늄 양극산화 박막 주형틀을 이용하여 다양한 종횡비를 가지는 금 나노막대를 합성하고, 나노막대 어레이 형태의 박막을 제작하였다. 금 나노막대의 합성은 알루미늄 양극산화막을 사용한 주형제조 방법(template method)을 사용하는 전기화학 증착법을 사용하였다. 우선 부도체인 알루미늄 양극 산화막의 한쪽면을 열증착 장비를 사용하여 금을 증착하여 작업 전극(working electrode)을 형성하였다. 백금 선(platinum wire)을 보조 전극(counter electrode)으로 사용하고 Ag/AgCl 전극을 기준 전극(reference electrode)으로 사용하여 삼전극계(three-electrode system)를 형성하였으며, 금 도금 용액(orotemp 24 gold plating solution, TECHNIC INC.)을 사용하여, 800 mV 전압에서 금 나노 막대를 합성하였다. 금 나노막대의 길이는 테플론 챔버를 통과한 전하량 또는 전기 증착 시간에 비례하여 결정된다. 금 나노막대를 성장시킨 알루미늄 양극산화막을 실리콘 웨이퍼에 은 페이스트를 사용하여 고정시킨 후 수산화나트륨 (NaOH)용액을 사용하여 알루미늄 양극산화막을 녹여내어 수직방향으로 정렬되어 있는 나노 막대 어레이 박막을 제조 하였다. 또한 제작된 금 나노막대 어레이의 광학적 특성을 평가하였다. 본 연구에서와 같이 나노막대를 직경방향으로 측정할 경우, 직경방향의 transverse mode만 측정된다. 금 나노 막대가 알루미늄 양극산화막 안에 포함된 상태로 측정된 금 나노로드 어레이 박막의 광 스펙트럼 분포는 금 나노막대의 가시광영역에서의 흡수 스펙트럼을 측정하였을시 직경 및 길이에 따라 transverse mode의 ${\lambda}$ max (최대 흡광)의 위치가 변화됨을 나타낸다. 실험 결과를 바탕으로 나노막대의 종횡비가 증가함에 따라 흡수 스펙트럼의 transverse mode ${\lambda}$ max가 미약하게 단파장 영역으로 이동하는 것을 확인할 수 있다. 이러한 결과는 원기둥 형태의 금 나노막대의 흡수 스펙트럼에 대한 이론적인 예측과 부합한다. 바이오센서로의 적용 가능성을 확인하기 위하여 자기조립단분자막을 형성하여 항체를 고정하고 CRP에 대한 응답특성을 평가하였다. CRP 항원-항체의 면역반응에 대한 실험 결과 CRP 항원의 농도가 증가함에 따라 넓은 측정범위에서 선형적으로 흡광도가 증가하는 결과를 나타내었으며, CRP 10 fg/ml의 농도까지 검출할 수 있었다. 센서의 선택성을 확인하기 위하여 감지하고자하는 대상물질이 아닌 Tn T 항원을 감지막에 반응시켜 흡광도 변화를 분석하였다. 결과적으로 제작된 센서칩은 선택성을 가지고 측정하고자하는 물질에만 반응함을 확인하였다. 이러한 결과는 다양한 직경을 사용한 부가적인 LSPR현상의 연구에 활용될 수 있을 것이다.

• Korean Chemical Engineering Research
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• v.46 no.4
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• pp.727-731
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• 2008

Mesoporous Pt-Au alloy films were successfully fabricated on ITO-coated glass by electrodeposition method using tri-blockcopolymer (P123) as a templating agent. The electrolyte consisted of 10 mM hydrogen hexachloroplatinate ($H_2PtCl_6$), 10 mM hydrogen tetrachloroaurate ($HAuCl_4$), and proper amount of P123. For comparison, control samples were electrodeposited without $HAuCl_4$ and P123. Film composition was determined by EDS(Energy Dispersive X-ray Spectroscopy), and the mesoporous structure was confirmed by TEM(Transmission Electron Microscopy). SEM(Scanning Electron Microscopy) was utilized to examine surface morphology, and it was observed that the addition of P123 affected the particle growth, resulting in the significant change of surface morphology. Methanol oxidation and CO oxidation were carried out to investigate electrocatalytic activities of synthesized samples. It was observed that the catalytic activity was strongly dependent on the film compositions. Compared with nonporous electrode prepared without P123 templating, mesoporous films prepared with P123 templating showed much higher catalytic activities and stability for both methanol oxidation and CO oxidation. These enhanced electrocatalytic activities were due to the high surface area and facilitated charge transfer of mesoporous films.

• Proceedings of the KIEE Conference
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• 2003.10a
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• pp.316-318
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• 2003

본 연구에서는 전기적 특성, 기계적 특성, 내수성 및 내유성이 우수한 고분자 화합물로 산업용, 콘덴서절연재료용, 의료센서용 등 각종 절연재료 및 유전재료로 활용되어 지고 있는 변환기용 PET박막에 광자선을 10[Gy] 15[MeV], 30[Gy] 15[MeV], 50[Gy] 15[MeV]를 조사하여 물성분석 및 전기적 특성중 유전정접 특성에 관하여 검토하였다. 물성분석으로 X-선 회절(XRD) 분석 결과 조사량에 따라 피크의 크기가 커지므로 결정성이 더욱 좁아짐을 알수 있었으며 적외선 분광(FTIR) 측정결과로 파수 1752[$cm^{-1}$]에서는 C=O기의 신축운동 기여로 피크가 나타나며 파수 1266[$cm^{-1}$]에서 =C-O기의 신축운동기여와 그리고 1019[$cm^{-1}$]에서는 벤젠환의 진동기여로 흡수 피크가 나타남을 알 수 있었고, 전자현미경을 이용하여 800배로 확대한 시료의 파단면을 조사한 결과 결정질과 비정질 영역이 혼재하고 있는 것을 확인하였다. 유전정접 특성으로는 측정온도범위 상온에서 130[$^{\circ}C$]와 인가전압 범위 1[V]에서 20[V]를 변화시켜 각각의 조사량에 대한 PET 박막의 유전특성의 온도의존성 및 주파수 의존성에 대하여 실험한 결과 변환기 재료의 가능성을 조사하였다.