Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)
- 1999.11a
- /
- Pages.354-357
- /
- 1999
Characteristics of Thin-film Type Pt-RTD's Fabricated on Si Wafers
Si기판상에 제작된 박막형 백금 측온저항체 온도센서의 특성
Abstract
This paper describes on the electrical and physical charateristics thin-film type Pt-RTD\\`s on Si wafers, in which MgO thin-films were used as medium layer in order to improve adhesion of Pt thin-films to SiO