• Journal of Sensor Science and Technology
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• v.9 no.2
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• pp.146-152
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• 2000

Lithium doped zinc oxide(ZnO:Li) films are prepared by rf magnetron sputtering on Corning 7059 glass substrate using specifically designed ZnO targets containing different amount of $Li_2CO_3$ powder as the Li doping source. The structural properties of the Li doped ZnO films are investigated by XRD, SEM and AFM. The electrical properties of the ZnO:Li films are measured for various deposition conditions, such as the substrate temperature, $O_2$/Ar gas ratio and rf power. The effects of the $Li_2CO_3$ content in target and the deposition conditions on the structural and electrical properties were studied. When ZnO:Li films were sputtered at the substrate temperature of $200^{\circ}C$, $O_2$/Ar gas ratio of 100% and rf power of 100W with a target containing less than 1wt% content of $Li_2CO_3$, showed good surface morphology, strong c-axis orientation and high resistivity of more than $10^8{\Omega}cm$.

• Progress in Superconductivity
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• v.13 no.1
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• pp.7-11
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• 2011

The effects of Sm:Ba:Cu composition ratio in SmBCO coated conductor on their superconducting properties were investigated. The SmBCO coated conductors were fabricated by reactive co-evaporation method using EDDC(Evaporation using Drum in Dual Chamber) system. In this system, we could obtain various samples with different composition ratios in a batch by the technique providing composition gradient at deposition zone. From the specimens prepared by EDDC system, we found that composition ratio is uniform parallel to the drum axis, but gradient along the circumferential direction of the drum. We installed a shield having parallelogram open area between the deposition chamber and the evaporation chamber in EDDC system, and attached a 30 cm long template, which is parallel to drum axis, onto the drum surface. In this configuration, we could obtain SmBCO coated conductors having a gradient composition along the length of template. We measured the composition ratios and surface morphologies with periodic interval by SEM and EDAX, and confirmed the profile of composition ratio. We also measured critical current using non-contact Hall probe critical current measurement system and thereby could plot composition ratio vs. critical current. The maximum critical current was obtained, and the surface morphology with the shape of roof tile was observed at the corresponding composition ratio of Sm:Ba:Cu = 1.01:1.99:4.87. It was also found that composition ratio had an effect on not only critical current but also surface morphology.

• Journal of the Korean Magnetics Society
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• v.8 no.6
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• pp.374-379
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• 1998

$Mn_1-xCr_xPt_3$ alloy films have been prepared by depositing (Mn, Cr)/Pt multilayers using a rf magnetron sputterer followed by heat treatment. Small and wide angle x-ray diffractometry, magnetic hysteresis loops and Kerr rotation angle spectra of the films have been measured and used to investigate structural, magnetic and magneto-optic properties of the films. The films had a crystal structure of ordered AuCu$_3$ type and the strong preferred orientation of a (111)plane parallel to the film surface. The saturation magnetization of the films was decreased with Cr content reaching almost zero near x=0.58 and then increased for further increasement of Cr content up to x=0.77 over that stayed almost constant. This indicated that Cr atoms were antiferromagnetically coupled with Mn atoms. The magnetic easy axis of MnPt$_3$(x=0) film was parallel to the film surface but those of the films with x$\geq$0.58 increased as Cr content increased reaching about 4 kOe at x=1(CrPt$_3$). The dependence of the Kerr rotation angle on the Cr content was similar to that of the saturation magnetization on the Cr content. The films with x=0.77 and x=1 showed the larger Kerr rotation angle at the wavelengths of near infrared compared to the magneto-optic recording medium, TbFeCo, currently being used.

• Korean Journal of Materials Research
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• v.9 no.8
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• pp.775-781
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• 1999

Palladium thin films of uniform and highly dense microstructure were prepared by the eletroplating method using novel PdCl$_2$-based plating bath. Principal variables taken into account in this study were the plating temperature and the current density. Electroplated Pd films were characterized for Crystalline orientation, morphology and hardness. The optimal temperature and current density were found be $50^{\circ}C$ and 5mA/$\textrm{cm}^2$, repectively. The measured hardness value for the Pd films when prepared under the optimal condition was as high as 600kg/$\textrm{mm}^2$. A correlation study between variables and properties seems to indicate that the hardness was significantly affected by the microstructure, but not by crystallite orientation.

• Applied Chemistry for Engineering
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• v.23 no.1
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• pp.65-70
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• 2012

Structural changing materials which can induce the physical deformation of materials are interesting research topics with various potential applications. Particularly, light among many driving mechanisms is a non-contact energy source, hence the light-responsive system can be used where non-destructive, local irradiation, and remote control is needed. Here, a mainchain azobenzene polymer is synthesized and its physical and optical properties are observed and compared to that of a polymer having a light-responsive azobenzene moiety on its side chain. Further dispersion onto polyvinylalcohol hydrogel is made and its dual stability and actuation are observed upon UV-visible light irradiation. Extended azobenzene polymer blend films show an anisotropic light-actuation with non-polarized UV light at room temperature. This physical shape change is quite reversible and occurs at lower temperature than that of any other reported systems including liquid crystalline elastomers. It is successfully demonstrated that the simple physical azobenzene/polymer blending has a very good actuation compared to that of LCEs which need an elaborate chemical design and it can be further used in the areas requiring a dimensional shape change.

• Polymer(Korea)
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• v.34 no.1
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• pp.32-37
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• 2010

Photo-alignment property of groove patterned surface prepared from blend of poly (vinyl cinnamate) (PVCi) and oligomeric dicinnamate was investigated for the application for alignment layer of liquid crystal display. The study of the photoreaction kinetics using UV-vis spectrum with the irradiation time showed that the reaction rate of oligomeric cinnamate was enhanced compared to that of PVCi. Blend where PVCi was main component showed a slight improvement on the photoreaction rate. It was unable to obtain groove patterned surface only using oligomeric cinnamate itself owing to the high crystalline character. However, blending of PVCi made it possible to obtain clear surface pattern. Molecular orientation could be confirmed from the polar plot data. It can be suggested that blend of oligomeric cinnamate and polymeric cinnamate is promising material for the photoalignment layer.

• Korean Journal of Materials Research
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• v.5 no.8
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• pp.988-996
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• 1995

CuInSe$_2$this films as a light absorber layer were fabricated by vacuum evaporation using In$_2$Se$_3$and Cu$_2$Se precursors and their properties were analyzed. Indium selenide films of 0.5${\mu}{\textrm}{m}$ thickness were first deposited by vacuum evaporation of In$_2$Se$_3$ on a Corning 7059 glass substrate. The films deposited at suscepor temperature of 40$0^{\circ}C$ showed a flat surface morphology with densely Packed grain structure. CuInSe$_2$films directly formed by evaporating Cu$_2$Se on the predeposited In$_2$Se$_2$films also showed a very flat surface when the susceptor temperature was $700^{\circ}C$. Cu$_2$Se, a second phase in the CuInSe$_2$film, was removed by evaporating additional In$_2$Se$_3$on the CuInSe$_2$film at $700^{\circ}C$. The grain size of 1.2${\mu}{\textrm}{m}$ thick CuInSe$_2$, film was about 2${\mu}{\textrm}{m}$ and the film had a (112) preferred orientation. As the amount of deposited In$_2$Se$_3$increased, the electrical resistivity of CuInSe$_2$films increased because of the decrease of hole concentration. But the optical band gap was almost constant at the value of 1.04eV, The CuInSe$_2$film grown on a Mo/glass substrate had a similar smooth microstructure compared to that on a glass substrate. A solar cell with ZnO/CdS/CuInSe$_2$/Mo structure may be realized based on the above CuInSe$_2$films.

• Korean Journal of Materials Research
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• v.10 no.12
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• pp.812-818
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• 2000

We studied the effects of Ge preamorphization (PAM) on 0.25$\mu\textrm{m}$ Ti-salicide junctions using comparative study with As PAM. For each PAM schemes, ion implantations are performed at a dose of 2E14 ion/$\textrm{cm}^2$ and at 20keV energy using $^{75}$ /As+and GeF4 ion sources. Ge PAM showed better sheet resistance and within- wafer uniformity than those of As PAM at 0.257m line width of n +/p-well junctions. This attributes to enhanced C54-silicidation reaction and strong (040) preferred orientation of the C54-silicide due to minimized As presence at n+ junctions. At p+ junctions, comparable performance was obtained in Rs reduction at fine lines from both As and Ge PAM schemes. Junction leakage current (JLC) revels are below ~1E-14 A/$\mu\textrm{m}^{2}$ at area patterns for all process conditions, whereas no degradation in JLC is shown under Ge PAM condition even at edge- intensive patterns. Smooth $TiSi_2$ interface is observed by cross- section TEM (X- TEM), which supports minimized silicide agglomeration due to Ge PAM and low level of JLC. Both junction break- down voltage (JBV) and contact resistances are satisfactory at all process conditions.

• Korean Journal of Metals and Materials
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• v.50 no.1
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• pp.78-85
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• 2012

Aluminum nitride(AlN) is a compound (III-V group) of hexagonal system with a crystal structure. Its Wurzite phase is a very wide band gap semiconductor material. It has not only a high thermal conductivity, a high electrical resistance, a high electrical insulating constant, a high breakdown voltage and an excellent mechanical strength but also stable thermal and chemical characteristics. This study is on the preferred orientation characteristics of AlN thin films by reactive evaporation using $NH_3$. We have manufactured an AlN thin film and then have checked the crystal structure and the preferred orientation by using an X-ray diffractometer and have also observed the microstructure with TEM and AlN chemical structure with FT-IR. We can manufacture an excellent AlN thin film by reactive evaporation using $NH_3$ under 873 K of substrate temperature. The AlN thin film growth is dependent on Al supplying and $NH_3$ has been found to be effective as a source of $N_2$. However, the nuclear structure of AlN did not occur randomly around the substrate a particle of the a-axis orientation in fast growth speed becomes an earlier crystal structure and is shown to have an a-axis preferred orientation. Therefore, reactive evaporation using $NH_3$ is not affected by provided $H_2$ amount and this can be an easy a-axis orientation method.