• 한국섬유공학회:학술대회논문집
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• 한국섬유공학회 2007년도 학술발표회 논문집
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• pp.283-284
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• 2007

• 안전기술
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• 제167호
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• pp.24-25
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• 2011

• 한국의류학회지
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• 제25권6호
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• pp.1037-1045
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• 2001

This research is done to design and manufacture prototype clean room garments to improve the product yield of the clean room processing. To assist the research, other papers and references on the same subject were collected for analysis. Also the researcher made interviews with the workers at the clean room. The prototype garments made for this project was compared against the commercially available clean room garments used in the industry. A set of test was conducted to measure particle release from the garments. The prototype clean room garments was manufactured after having considered all the aspects stated above, and tested for the level of particle release. The test subjects performed 4 different movements(marching, arms stretch, squat and rise, and jogging) while wearing the prototype garments and commercially available clean room garments. Particle counts produced by each movement were measured. The data collected was statistically analyzed. The followings are the result of the test. 1) Overall, the prototype garments yielded less particle release.(p<0.001) 2) It showed greatest difference of particle counts for jogging(p<0.001) and squat and rise(p<0.001). In the arms stretch test. the prototype garments was also more effective in controling the particle, however, in the marching test. no significant difference was detected. 3) The prototype garments had less particle release in upper(p<0.001), middle(p< 0.001), and lower level(p<0.01) than the commercially available clean room garments. Manufacturing a new fabric for the clean room processing is important, but this research proves that the design of the clean room garments also determines the efficiency garments in the particle control. Therefore the same fabric can perform differently according to how it is designed. Improving the design will also improve the 7article control and reduce the cost of research. Eventually, the manufacturers will increase the product yield.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2007년도 춘계학술대회
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• pp.132-138
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 디스플레이장비용 능동 방진 시스템을 설계하였다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 춘계학술대회논문집
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• pp.185-190
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공, 측정 등이 필요함에 따라, 외란과 내부 진동을 차단하는 방진 시스템에 대한 연구가 활성화 되고 있다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 기존의 레벨링 밸브를 이용한 수동 방진 시스템을 분석하여 이를 개선하고 능동 방진 시스템을 설계한다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.731-736
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• 2007

최근 반도체 및 디스플레이 산업 등에서 초정밀 가공 및 측정에 방진 시스템을 많이 필요로 한다. 기존에 소개된 여러 방진 시스템 중에서 가장 많이 연구되는 공기스프링은 압축 공기를 이용하여 큰 하중을 지지할 수 있으면서 상대적으로 낮은 강성으로 낮은 고유진동수를 유지할 수 있다. 본 연구는 Takagi-Sugeno 퍼지 방법을 이용해서 능동 방진 시스템을 설계한다. 공기의 비선형 특성에 기인하는 복잡한 비선형 시스템 제어에 PID 제어기 보다 유리한 퍼지 제어기를 설계하였고, 실험과 해석을 비교하였다.

• 한국의류학회지
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• 제26권6호
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• pp.811-820
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• 2002

The physical responses and subjective sensations of different cleanroom garments were compared in order to discover which cleanroom garment design could minimize pollution of the working environment by dust from the worker, maintain a pleasant microclimate and provide effective thermoregulation. A. Coverall with non-detachable hood, kimono sleeves (front), raglan sleeves (back), raschell net on the bodice B. Coverall with detachable hood, kimono sleeves (front), raglan sleeves (back), raschell net on the bodice C. Separate top with non-detachable hood, kimono sleeves (front), raglan sleeves (back), raschell net on the bodice D. Coverall with non-detachable hood, set-in sleeves, raschell net on the bodice E. Coverall with non-detachable hood, raglan sleeves (back), l00% cotton inner wear (upper body) The results of the experiment were as follows. Because the hood covered the shoulder and the chest areas, the chests temperature of the worker wearing garment E was quite higher than those wearing other garment designs. For fabric that has been coated in order to prevent dust, layered designs should be avoided in order to prevent skin temperature from rising. Compared with layers of underwear, it would be more effective to attach a see-through raschell net which clings to the body. Thermal sensations were also highest in garment E, reinforcing the finding that layered designs should be avoided. Through the experiment, it was found that a new material coverall with a non-detachable hood was effective in minimizing dust, suppressing skin temperature increases, maintaining a superior microclimate and providing pleasant subjective sensations.

• 한국의류학회지
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• 제26권2호
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• pp.337-348
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• 2002

Based upon literature survey and questionnaire survey, this research tries to develop four new Cleanroom Garment in semiconductor industrial environment. The designs emphasize to minimize workers disconmfort so that they can not only cover human body fully but also reduce dust as much as possible during work hour in clean room. The new designs characteristics and results from both function test and dust emission test are as follows: 1. In order to reduce dust-emission, we develop new designs with hood, kimono sleeve, and back zipper. The designs with hood face positive test results in term of motion suitability and dust-omission. The design with seam in front, in particular, is effective to control dust-emission. 2. For the purpose of reducing dust-emission, we also emphasize to minimize ease of dust-proof wear, with reference to previous research and clothing experiment. The experiment participants report that the new wears are not so comfortable as existing ones, but they accept the new wears positive as effective in reducing dust-emission owing to reduced ease of Cleanroom Garment and sleeves. 3. A1so to reduce dust-emission in inner wear, we put inner wear in both Cleanroom Garments and inner wear, resulting to remove discomfort of wearers when changing clothes and of tight waist due to inner-trousers. 4. We develop new designs with elastic bands in both waist through the side lines and with velcro only at the back side. To remove twist in front contributes to reduce emission arising out of friction, also to free the appearance minding woman workers from worrying about exposed stomach. The new designs need to be accepted as a valuable alternative of Cleanroom Garment, in that they are highly effective to reduce dust-emission, which is the most important factor in the wear, in spite of some drawbacks in terms of motion-suitability, ease and appearance as shown in wearing test.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2008년도 추계학술대회논문집
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• pp.243-244
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• 2008

• 한국소음진동공학회논문집
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• 제17권7호
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• pp.565-571
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• 2007

In the process of accurate manufacture and measurement, it is necessarily required to isolate external or internal vibration due to external disturbance and internal actuators. The higher vibration isolation system gets damping around resonance, the better it is generally. This paper analyzes the performance of an existing passive air-spring for vibration isolation table by using experiment and simulation. Optimal design for a passive air spring can be obtained by tuning the size of the orifice. Also design for an active isolation system is carried out by applying PID controller and considering non-linearity of pneumatic characteristics with help of look-up table. We have developed the active vibration isolation table with the better isolation performance.