• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.199-199
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• 2012

최근 그래핀의 대면적 합성 및 롤투롤 전사 공정의 개발로 그래핀의 상용화가 가시화 되고 있다. 하지만, 그래핀의 독특한 특성인 선형적이고 밴드갭이 없는 에너지 띠 분포 때문에 반도체 소자로서의 직접적인 적용에는 한계가 있다. 이러한 문제를 해결하기 위한 돌파구로써, 그래핀 복합체의 연구와 개발이 활발히 진행되고 있으며 본 연구에서는 그래핀 복합 적층 구조를 다룬다. 이는 디스플레이, 초고속 반도체 소자, 고성능 광전자소자 및 초고감도 센서 등 다양한 분야에 대한 그래핀의 실용화 가능성이 높아진 것을 의미한다. 특히, 높은 가시광 투과도와 낮은 면저항으로 기존 투명 전극에 대표적으로 사용되고 있는 ITO (Indium Tin Oxide)를 그래핀으로 대체하는 것에 관한 연구가 활발히 진행되고 있다. 하지만 그래핀이 높은 전자이동도를 가지는 것에 비하여 비저항과 투과도 측면에 있어서는 ITO의 성능을 뛰어넘지 못하는 실정이다. 따라서 본 연구에서는 ITO가 가지는 취약점인 기판과의 약한 접착력, 높은 취성, 기판과의 열팽창률 차이 등의 공정상 문제점을 극복하고자 하였다. 그래핀 복합 적층 필름은 플라스틱 기판 (PET) 위에 열 화학기상증착법(Chemical Vapor Deposition, CVD)을 이용하여 합성한 그래핀을 전사하고, ITO 용액을 도포한 다음 다시 그래핀을 씌워 제작하여 샌드위치 구조(sandwich structure)를 형성하였다. 완성된 필름은 광학적, 전기적 특성 분석을 수행하였다. 광학적 분석으로는 라만 분광을 이용한 그래핀 품질평가와 파장대에 따른 광 투과도, 그리고 반사도 측정을 하였으며, 전기적 특성은 면저항을 측정함으로써 분석한다. 결함이 적고, 대면적에 걸쳐 한 층을 이루어야 하는 고품질 그래핀의 요구사항에 따라 라만 분광의 G, 2D, D 띠를 분석하였다. G와 2D 띠의 비율을 통해 그래핀의 층 수를, D 띠의 강도를 통해 결함의 유무를 판단하였다. 또한, 가시광 영역에서 90% 이상의 광 투과도를 보여야 하는 투명 소자의 요구사항 달성 정도를 UV-VIS를 이용하여 확인하였다. 마지막으로, 제작한 필름의 면저항 또한 4-프로브 멀티미터를 이용하여 측정하고, 일반적인 터치스크린의 면저항인 $500{\Omega}/sq$를 만족하는지 평가하였다.

• Clean Technology
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• v.26 no.4
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• pp.311-320
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• 2020

In this study, the photocatalytic degradation of rhodamine B (RhB), methyl orange (MO) and methylene blue (MB) was carried out under visible light irradiation using CdS and CdZnS/ZnO photocatalysts prepared by a simple precipitation method. This study focused on examining the effect of physicochemical properties of dye and photocatalyst on the reaction pathway of photocatalytic degradation. The prepared photocatalysts were characterized by XRD, UV-vis DRS and XPS. Both the CdS and CdZnS/ZnO photocatalysts exhibit an excellent absorption in the visible light and the UV light regions. It was observed that the photocatalytic degradation of MO proceeds via the same reaction mechanism on both the CdS and CdZnS/ZnO photocatalysts. However, the photocatalytic degradation of RhB and MB was found to proceed through a different reaction pathway on the CdS and CdZnS/ZnO catalysts. It is interesting to note that MB dimer was formed on the CdS catalyst at the beginning of the photocatalytic reaction, while the MB monomer was degraded during the overall photocatalytic reaction on CdZnS/ZnO. The above results may be mainly ascribed to the difference of band edge potential of the conduction band in the CdS and CdZnS/ZnO semiconductors and the adsorption property of dye on the catalysts.

• Food Science of Animal Resources
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• v.31 no.1
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• pp.115-121
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• 2011

The objective of this study was to develop models to predict freshness factors (total viable counts (TVC), pH, volatile basic nitrogen (VBN), trimethylamine (TMA), and thiobarbituric acid (TBA) values) and the storage period in beef using a visible and near-infrared (NIR) spectroscopic technique. A total of 216 beef spectra were collected during the storage period from 0 to 14 d at a $10^{\circ}C$ storage. A spectrophotometer was used to measure reflectance spectra from beef samples, and beef freshness spectra were divided into a calibration set and a validation set. Multi-linear regression (MLR) models using the stepwise method were developed to predict the factors. The MLR results showed that beef freshness had a good correlation between the predicted and measured factors using the selected wavelength. The correlation of determination ($r^2$), standard error of prediction (SEP), and ratio of standard deviation to SEP (RPD) of the prediction set for TVC was 0.74, 0.64, and 2.75 Log CFU/$cm^2$, respectively. The $r^2$, SEP, and RPD values for pH were 0.43, 0.10, and 1.10; those for VBN were 0.73, 1.45, and 2.00 mg%; those for TMA were 0.70, 0.19, and 2.58 mg%; those for TBA values were 0.73, 0.13, and 2.77 mg MA/kg; and those for storage period were 0.77, 1.94, and 2.53 d, respectively. The results indicate that visible and NIR spectroscopy can predict beef freshness during storage.

• Journal of the Korean Vacuum Society
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• v.5 no.2
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• pp.133-138
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• 1996

Epitaxial cubic silicon carbide films have been deposited on carbonized Si(001) substrates using the single precursor 1, 3-disilabutane in the temperature range 900-$1000^{\circ}C$ under high vacuum conditions. The films grown were characterized by in situ RHEED, XPS, XRD, x-ray pole figure, SEM, and TEM. The results show that epitaxial cubic SiC films with smooth morphology and good crystallinity were formed in this temperature range. The single precursor 1, 3-disilabutane has been found suitable for the epitaxial growth of cubic SiC on Si(001) substrates.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.357.2-357.2
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• 2014

Ruthenium (Ru) 박막은 우수한 화학적 열적 안정성 및 높은 일함수(4.7eV) 특성으로 인해 20 nm급 이하의 차세대 DRAM capacitor의 전극 물질 및 Cu metalization을 위한 seed layer로 각광을 받고 있다. Ru박막의 나노스케일 정보전자소자로의 적용을 위해서는 두께제어가 용이하고 3D 구조에서 우수한 단차 피복 특성을 갖는 atomic layer deposition (ALD)을 이용한 박막 형성이 필수적이다. 이에 본 연구에서는 ALD 방법을 이용하여 0가의(cymene) (1,5-hexadiene) Ru (0) (C16H24Ru) 전구체를 합성, ALD 방법을 이용하여 우수한 초기성장거동을 갖는 Ru 박막을 증착 하였다. 형성된 Ru 박막의 표면 형상, 두께, 밀도를 주사전자현미경(Scanning electron microscopy)과 X-선 반사율 측정(X-ray reflectometer)으로 조사하였다. 또한 전기적 특성을 4침법(four-point-probe)으로 측정하였고, 박막의 화학적 조성과 결정성의 정보를 X-선 광전자분광법(X-ray photoelectron spectroscopy)과 X-선 회절(X-ray diffraction)을 이용하여 확인하였다.

• Analytical Science and Technology
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• v.6 no.5
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• pp.479-487
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• 1993

Potassium-Graphite Fiber Intercalation Compounds(K-GFIC) have been prepared from well oriented pitch-based Graphite fiber by the transformed two-bulbs method with variation of reaction temperatures of graphite($T_g$ : $450^{\circ}C$, $400^{\circ}C$, $350^{\circ}C$, $300^{\circ}C$, $250^{\circ}C$). The stage transition process of K-GFICs was studied by X-ray diffraction methods, and we have observed peaks with d-values of (001) diffraction of $5.40{\AA}$ and $8.78({\pm}0.01){\AA}$, which are charecteristic for the stage 1 and stage 2, respectively. The stage stability and energy states of K-GFICs were studied by UV/VIS spectrophotometer. As a results, We found that the minimum values of reflactance of K-GFICs with pure stage was moved to higher energy pristine Graphite fiber's. But because of mixtured stage, we could not observe minimum reflectance in the visible region at high reaction temperatures($400^{\circ}C$, $450^{\circ}C$). From X-ray diffraction and UV/VIS sepctrophotometry data, we can suggest that K-GFICs with lower stage has many charge carriers existed between C atoms of graphite Layers. And then, these results also provides information on the electrical and other physical properties of K-GFICs.

• Korean Journal of Remote Sensing
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• v.36 no.2_1
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• pp.103-119
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• 2020

Recently, the rapid redeposition and erosion of rivers artificially created by climate change and the Four Rivers Restoration Project is questionable. According to the revised law in Korea, the river management agency will periodically carry out bed changes surveys. However, there are technical limitations in contrast to the trend of increasing spatial coverage, density and narrowing of intervals. National organizations are interest in developing innovative bed changessurvey techniquesfor efficiency. Core of bathymetry survey is to measure the depth of rivers under a variety of river conditions, but that is relatively more risky, time-consuming and expensive compared to conventional ground surveys. To overcome the limitations of traditional technology, echo sounder, which has been mainly used for ocean depth surveying, has been applied to rivers. However, due to various technical limitations, it is still difficult to periodically investigate a wide range of areas. Therefore, technique using the remote sensing has been spotlighted as an alternative, especially showing the possibility of depth measurement using spectral characteristics. In this study, we develop and examine a technique that can measure depth of water using reflectance from spectral characteristics. As a result of applying the technique proposed in thisstudy, it was confirmed that the measured depth and the correlation and error corresponding to 0.986 and 0.053 m were measured in the depth range within 0.95 m. In the future, this study could be applied to the measurement of spatial depth if it is applied to the hyperspectral sensor mounted on the drone.

• Journal of the Korean Vacuum Society
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• v.6 no.2
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• pp.159-164
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• 1997

We have studied initial oxidation of the alkali metal(AM)/Si(111) surface using X-ray photoelectron spectroscopy(XPS) and reflection high energy electron diffraction(RHEED) at room temperature(RT) and high temperature(HT)(300~50$0^{\circ}C$). The oxidation of the Si(111)7$\times$7 surface was promoted by the adsorption of 1 momolayer(ML) AM, whereas no promotion occurred for submonolayer(<0.5 ML) adsorbed Si(111)7$\times$7 surface at RT. O Is core level spectra were measured with increasing oxygen exposure. It was found that the oxygen adsorbed on the Si(111)7$\times$7-AM surface have two different bond configuration, Si-O and Am-O, respectively. From these results, we discussed the role of AM-O bonding in the promoted oxidation. At HT(300~50$0^{\circ}C$), the AM-adsorbed surface became very inactive with the structural transformation to the 3$\times$1-AM. We present the results of the oxidation of the Si(111)3$\times$1-AM(Na, K, Cs) surface.

• Journal of Animal Environmental Science
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• v.13 no.2
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• pp.113-120
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• 2007

This study was conducted to measure Nitrogen(N), Phosphate($P_2O_5$), Potassium ($K_2O$), Organic matter(OM) and Moisture content of liquid pig manure by Near Infrared Spectroscopy(NIRS) and to develop an alternative and analytical instrument which are used for measurement of N, $P_2O_5$, $K_2O$, OM, and Moisture contents for liquid pig manure. The liquid pig manure sample's transmittance spectra were measured with a NIRS in the wavelength range of 400 to 2,500 nm. Multiple linear regression and partial least square regression were used for calibrations. The correlation coefficient(RSQ) and standard error of calibration(SEC) obtained for nitrogen were 0.9190 and 2.1649, respectively. The RSQ for phosphate, potassium, organic matter and moisture contents were 0.9749, 0.5046, 0.9883 and 0.9777, and the SEC were 0.5019, 1.9252, 0.1180 and 0.0789, respectively. These results are indications of the rapid determination of components of liquid pig manure through the NIR analysis. The simple analytical instrument for liquid pig manure consisted of a tungsten halogen lamp for light source, a sample holder, a quartz cell, a SM 301 spectrometer for spectrum analyzer, a power supply, an electronics, a computer and a software. Results showed that the simple analytical instrument that was developed can approximately predict the phosphate, organic matter and moisture content of the liquid pig manure when compared to the analysis taken by NIRS. The low predictability value of potassium however, needs further investigation. Generally, the experiment proved that the simple analytical instrument was reliable, feasible and practical for analyzing liquid pig manure.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.83-83
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• 2012

금속 실리사이드는 낮은 비저항, 실리콘과의 좋은 호환성 등으로 배선 contact 물질로 널리 연구되고 있다. 특히 $CoSi_2$는 선폭의 축소와 관계없이 일정하고 낮은 비저항과 열적 안정성이 우수한 특성 등으로 배선 contact 물질로 활발히 연구되고 있다. 금속 실리사이드를 실리콘 평면기판에 형성시키는 방법으로는 열처리를 통한 금속박막과 실리콘 기판 사이에 확산작용을 이용한 SALICIDE (self-algined silicide) 기술이 대표적이며 CoSi2도 이와 같은 방법으로 형성할 수 있다. Co 박막을 증착하는 방법에는 물리적 기상증착법 (PVD)과 유기금속 화학 증착법 등이 보고되어있지만 최근 급격하게 진행 중인 소자구조의 나노화 및 고 단차화에 따라 기존의 증착 기술은 낮은 단차 피복성으로 인하여 한계에 부딪힐 것으로 예상되고 있다. ALD(atomic layer deposition)는 뛰어난 단차 피복성을 가지고 원자단위 두께조절이 용이하여 나노 영역에서의 증착 방법으로 지대한 관심을 받고 있다. 앞선 연구에서 본 연구진은 CoCp2 전구체과 $NH_3$ plasma를 사용하여 Plasma enhanced ALD (PE-ALD)를 이용한 고 순도 저 저항 Co 박막 증착 공정을 개발 하고 이를 SALICIDE 공정에 적용하여 $CoSi_2$ 형성 연구를 보고한 바 있다. 하지만 이 연구에서 PE-ALD Co 박막은 플라즈마 고유의 성질로 인하여 단차 피복성의 한계를 보였다. 이번 연구에서 본 연구진은 Co(AMD)2 전구체와 $NH_3$, $H_2$, $NH_3$ plasma를 반응 기체로 사용하여 Thermal ALD(Th-ALD) Co 및 PE-ALD Co 박막을 증착 하였다. 고 단차 Co 박막의 증착을 위하여 Th-ALD 공정에 초점을 맞추어 Co 박막의 특성을 분석하였으며, Th-ALD 및 PE-ALD 공정으로 증착된 Co 박막의 단차를 비교하였다. 연구 결과 Th-ALD Co 박막은 95% 이상의 높은 단차 피복성을 가져 PE-ALD Co 박막의 단차 피복성에 비해 크게 향상되었음을 확인하였다. 추가적으로, Th-ALD Co 박막에 고 단차 박막의 증착이 가능한 Th-ALD Ru을 capping layer로 이용하여 CoSi2 형성을 확인하였고, 기존의 PVD Ti capping layer와 비교하였다. 이번 연구에서 Co 박막 및 $CoSi_2$ 의 특성 분석을 위하여 X선 반사율 분석법 (XRR), X선 광전자 분광법 (XPS), X선 회절 분석법 (XRD), 주사 전자 현미경 (SEM), 주사 투과 전자 현미경 (STEM) 등을 사용하였다.