• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.328-328
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• 2010

반도체 및 LCD 공정이 진행되는 진공 챔버는 유량계, 진공 펌프 및 밸브 등을 이용하여 적절한 공정용 기체와 압력을 제어하게 된다. 공정에 따라 매우 높은 온도를 유지해야 하는 경우도 있다. 챔버 내부의 압력은 유입되는 기체의 시간에 따른 유량 변화에 의하여 주기적으로 변화하게 된다. 이러한 유량 변화는 장기적으로는 결국 펌프의 신뢰성(내구수명)에 영향을 주게 되며, 특히 고유량 및 저유량을 반복하게 되는 공정에 있어서는 더욱 큰 영향을 미치게 된다. 또한 챔버 내부는 다양한 화학적 반응이 일어나며 이러한 공정 기체들의 높은 온도는 결국 챔버에 연결된 펌프의 성능 및 신뢰성에도 영향을 주게 된다. 대부분의 반도체 및 LCD 공정이 이루어지는 압력에서는 전도 및 대류의 열전달 형태 보다는 열복사에 의한 영향을 받게 되어 챔버를 적절히 설계한다면 펌프에 직접적으로 전달되는 복사량은 상대적으로 낮고, 펌프에 미치는 영향도 크지 않게 된다. 그러나 압력의 변화에 따라 전도 및 대류의 영향이 커지게 되는 경우에는 펌프 자체 및 성능에 큰 영향을 주게 될 것이다. 터보형 펌프의 국내(KS) 및 국제규격(ISO)의 성능시험방법에는 이러한 온도에 따른 펌프의 성능 특성 변화를 다루고 있지 않으며, 크라이오 펌프인 경우 열복사의 영향에 대한 시험방법이 일부 공개되어 있다[J. Vac. Sci. Technol. A17(5)]. 본 연구에서는 기체의 유량 및 온도 변화에 따른 진공 펌프의 성능 특성 변화를 고찰하고자 하며, 향후 이러한 시험방법에 대한 표준 절차를 확립하고자 한다.

• Proceedings of the KIPE Conference
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• 2011.07a
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• pp.138-139
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• 2011

무인 운반차(AGV, Automated Guided Vehicle)은 1955년에 개발된 자재 운반용 무인운송 시스템으로 초기에는 제조 현장에서 자재의 운송에 국한되어 사용되었다. 최근에는 창고, 컨테이너 터미널 그리고 지하공간에서의 반복되는 실내/외 운송으로까지 그 사용이 확산되고 있다. AGV는 제조현장에서 제조 공정과 관련된 모든 자재의 이송에 적용되고 반복되는 운송의 형태에 사용되며, 실내 용도로는 수입, 저장, 분류, 반출, 이송과 공정 간의 파레트(Pallet) 이송에 사용되며, 비교적 작은 용량의 AGV가 이러한 제조현장에서 산업용도에 쓰이고 있다. AGV는 실내에서 주로 사용되는 환경적 특성상 배터리를 사용하며, 충전하거나 교환하여야 하며, 이에 소요되는 시간이 시스템의 성능에 큰 영향을 미친다. 대부분의 제조현장이나 배송센터에서 AGV는 비교적 짧은 거리를 운행하므로 대기 시간 중에 배터리를 충전하거나 교환이 가능하다. 하지만 비교적 장거리를 운행하는 시스템에서는 AGV의 가동률을 50% 이하로 유지하거나 온라인 충전 시스템을 구비하여야만 배터리 전압 강하에 의한 시스템의 마비를 예방할 수 있다.

• Journal of the Korean Institute of Intelligent Systems
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• v.22 no.6
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• pp.694-699
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• 2012

In this paper, semiconductor package inspection results using white light interferometer with large F.O.V., in order to apply semiconductor product inspection process, are shown. Experimental 3D data repeatability test results for the same special bumps of each substrate are shown. Experimental 3D data repeatability test results for all the bumps in each substrate are also shown. Semiconductor package inspection using white light interferometer with large F.O.V. is very important for the fast 3D data inspection in semiconductor product inspection process. This paper is surely helpful for the development of in-line type fast 3D data inspection machine.

• Korean Journal of Construction Engineering and Management
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• v.12 no.1
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• pp.23-32
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• 2011

Domestic leading construction companies has been establishing and performing TACT scheduling method, similar to linear scheduling model such as line of balance and repetitive schedule, and etc. in which repetitive construction works are involved like high-rise building. Linear scheduling model has been researched as a visual scheduling method presenting the work space and time information. Likewise scheduling constraints of CPM network such as finish-to-finish, start-to-start, finish-to-start, start-to-start, linear scheduling model also has the relationships constraints, namely boundary conditions, between activities. It is especially necessary to define the boundary conditions of the activities' relationships in order to apply the linear scheduling model to be compatible with the network schedule. Therefore, this research considers the boundary conditions between activities for establishing the linear scheduling model. This paper also applies the proposed boundary conditions to TACT schedule and then deduces the main considerations in order to establish and perform TACT schedule.

• Journal of Life Science
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• v.25 no.10
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• pp.1164-1168
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• 2015

Previous research showed that chlorphenesin galactoside (CPN-Gal), a preservative in cosmetics, was safer than CPN against human skin cells [9]. To establish a stable and long-term process for CPN-Gal production, we investigated the repeated-batch process. In this process, β-gal-producing recombinant Escherichia coli cells were immobilized in calcium alginate beads, and CPN was converted to CPN-Gal by the transgalactosylation reaction. The process was conducted in a 300 ml flask, which contained E. coli cell-immobilized alginate beads, 33.8 mM of CPN, and 400 g/l of lactose. The pH and temperature were 7.0 and 40℃, respectively. During the repeated-batch operation, four consecutive batch operations were conducted successfully until 192 hr. The conversion yield of CPN to CPN-Gal was 64% during 192 hr, which was higher than the values in previous reports [3, 13]. Thereafter, however, the conversion yield gradually decreased until the operation was finished at 336 hr. Western blotting of immobilized E. coli cells revealed that β-gal gradually decreased after 192 hr. In addition, alginate beads were cracked when the operation was finished. It is probable that, including this loss of E. coli cells by cracks, deactivation, and product inhibition of E. coli β-gal might lead to a gradual decrease in the production of CPN-Gal after 192 hr. However, as the purification of β-gal is not necessary with β-gal-producing recombinant E. coli cells, β-gal-producing E. coli cells might be a practical and cost-effective approach for enzymatically synthesizing CPN-Gal. It is expected that this process will be extended to long-term production process of CPN-Gal for commercialization.

• Journal of the Korea Organic Resources Recycling Association
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• v.11 no.1
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• pp.70-76
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• 2003

Continuous anaerobic hydrogen production with a mixed culture was investigated. With a sucrose concentration of 5g COD/L in the feed, hydrogen production exceeded $0.5mole\;H_2/mole\;hexose$ was found at the early stage, however it did not maintain longer than 9days. It was assumed that the failure was caused by insufficient active hydrogen producing bacteria in the reactor. Therefore, effects of pH control, repeated heat treatment and substrate concentration on sustainable continuous anaerobic hydrogen production was examined to find out operating conditions to sustainable hydrogen production. Decrease of hydrogen production was not overcome by only pH control at 5.3. Repeated heat treatment could recover hydrogen producing activity without any external inoculum supply. However, frequent heat treatment was needed because the treated sludge also showed the tendency in decrease of hydrogen production. With a sucrose concentration of 30g COD/L in the feed, hydrogen production maintained $1.0-1.4mole\;H_2/mole\;hexose$ in continuously stirred tank reactor and $0.2-0.3mole\;H_2/mole\;hexose$ in anaerobic sequencing batch reactor) for 24days. More than 90% of soluble organics in effluent was organic acids, in which n-butyrate was the most one.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.9
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• pp.1219-1226
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• 2000

An efficient method is developed for plunger thermal cycle analysis in repeated forming process of the TV glass. The plunger undergoes temperature fluctuation during a cycle due to the repeated contact and separation from the glass, which attains a cyclic steady state having same temperature history at every cycle. Straightforward analysis of this problem brings about more than 80 cycles to get reasonable solution, and yet hard to setup stopping criteria due to extremely slow convergence. An exponential fitting method is proposed to overcome the difficulty, which finds exponential function to best approximate temperature values of 3 consecutive cycles, and new cycle is restarted with the fitted value at infinite time. Numerical implementation shows that it reduces the number of cycles dramatically to only 6-18 cycles to reach convergence within 10 accuracy. A system for the analysis is constructed, in which the thermal analysis is performed by commercial software ANSYS, and the fitting of the result is done by IMSL library. From the parametric studies, one reveals some important facts that although the plunger cooling or the glass thickness is increased, its counter part in contact is not much affected, duo to the low thermal conductance of the glass.

• Proceedings of the KSME Conference
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• 2000.11b
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• pp.192-198
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• 2000

Three dimensional thermal cycle analysis of the plunger is carried out in repeated forming process of the TV glass, which is continued work of two dimensional analysis where an efficient method has been proposed. The plunger undergoes temperature fluctuation during a cycle due to the repeated contact and separation from the glass, which attains a cyclic steady state having same temperature history at every cycle. Straightforward analysis of this problem brings about more than 90 cycles to get reasonable solution. An exponential function fitting method is proposed, which finds exponential function to best approximate temperature values of 3 consecutive cycles, and new cycle is restarted with the fitted value at infinite time. Number of cases are analyzed using the proposed method and compared to the result of straightforward repetition, from which one finds that the method always reaches nearly convergent solution within $9{\sim}12$ cycles, but turns around afterwards without further convergence. Two step use is found most efficient, in which the exponential fitting is carried out fer the first 12 cycles, followed by simple repetition, which shows fast convergence expending only 6 additional cycles to get the accuracy within 2 error. This reduces the computation cycle remarkably from 90 to 18, which is 80% reduction. From the parametric studies, one reveals that the overall thermal behavior of the plunger in terms of cooling parameters and time is similar to that of 2 dimensional analysis.

• Korean Journal of Optics and Photonics
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• v.8 no.3
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• pp.189-193
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• 1997

Aspheric pick-up lenses are increasingly used in consumer products such as computer and multimedia, as their mass production has become possible owing to the injection molding process. However still much work needs to be done for more effective manufacture of aspheric lenses, one area of which is the in-line inspection of produced lenses. In this paper, we present a lateral-shearing interferometer that has specially been designed to have a high immunity to external vibration and atmospheric disturbance. The interferometer comprises four prisms. They are directly attached to each other using an immersion oil so that relative sliding motions between the prisms are allowed. Their relative displacement can readily generate necessary lateral-shearing and phase-shifting to determine the wavefront of the beam collimated by the lens under inspection. A special phase-measuring algorithm of arbitrary-bucket is adopted to compensate the phase-shifting error caused by the thickness reduction in the immersion oil. Zernike polynomial fitting has done for determinating quantitative aberration of aspheric pick-up lenses. The interferometer built in this work is robust to external mechanical vibration and atmospheric disturbance so that experimental results show that it has a repeatability of less than λ/100.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.215.1-215.1
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• 2015

본 연구에서는 용액 공정 기반 ZrO2 절연막의 우수한 특성을 확인하기 위해 SiO2 절연막을 가지는 IGZO (Indium-Gallium-Zinc Oxide) 박막 트랜지스터와 비교했다. In:Ga:Zn=1:1:1의 비율의 0.3 M IGZO 용액과 0.2 M ZrO2용액을 사용하였다. ZrO2 박막 트랜지스터는 0.2M ZrO2 용액을 5번 반복 증착하며 140nm 두께의 ZrO2 절연막을 가지는 IGZO 박막 트랜지스터와 비교대상으로 동일한 두께의 SiO2의 절연막을 가지는 IGZO 박막 트랜지스터를 제작하였다. ZrO2 박막 트랜지스터의 문턱전압은 4.3V로 SiO2 박막 트랜지스터의 -6.1V보다 낮았고, 이동도는 $1.2356cm^2/V{\cdot}s$로 $0.0554cm^2/V{\cdot}s$ 보다 약 20배 높았다. 실험 결과를 통해 ZrO2를 절연막으로 사용한 박막 트랜지스터의 특성이 더 향상되었음을 확인하였다.