• Transactions of the Korean Society of Mechanical Engineers A
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• v.35 no.6
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• pp.599-607
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• 2011

In this paper, a reaction-force compensation system for an XY linear motion stage, without an additional external isolation structure or extra motors, is developed. This system consists of a movable magnet track, a spring, a dummy weight, and a dedicated sensor module that measures the relative positions of the movable magnet track with respect to the motor coil. The reaction force compensation system is modeled, and simulations are carried out to optimize design parameters such as the moving distance of the magnet track, the transmission force, the dummy weight, and the allowed size of the mechanism. An XY linear motion stage is built, incorporating the reaction force compensation system, and the performance of the system is verified experimentally. For acceleration and deceleration values of 10 m/$s^2$, 85% of the reaction force is absorbed by the reaction force compensation system.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.10
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• pp.929-934
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• 2014

Reaction force compensation (RFC) mechanism can relieve the vibration of base system caused by acceleration and deceleration of mover. In this paper, we propose a new passive RFC mechanism with a movable additional mass to reduce vibration of the system base as well as displacement of the magnet track. First, equation of motion for the new passive RFC mechanism is derived and simulated to tune design parameters such as masses and spring coefficients. Simulation results show that the vibration of the system base of the stage with the new RFC mechanism.