• Clean Technology
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• v.28 no.2
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• pp.131-137
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• 2022

The semiconductor process currently emits various by-products and unused gases. Emissions containing pollutants are generally classified into categories such as organic, acid, alkali, thermal, and cabinet exhaust. They are discharged after treatment in an atmospheric prevention facility suitable for each exhaust type. The main components of organic exhaust are volatile organic compounds (VOC), which is a generic term for oxygen-containing hydrocarbons, sulfur-containing hydrocarbons, and volatile hydrocarbons, while the main components of alkali exhaust include ammonia and tetramethylammonium hydroxide. The purpose of this study was to determine the combustion characteristics and analyze the NO_X reduction rate by maintaining a direct combustion and temperature to process organic and alkaline exhaust gases simultaneously. Acetone, isopropyl alcohol (IPA), and propylene glycol methyl ether acetate (PGMEA) were used as VOCs and ammonia was used as an alkali exhaust material. Independent and VOC-ammonia mixture combustion tests were conducted for each material. The combustion tests for the VOCs confirmed that complete combustion occurred at an equivalence ratio of 1.4. In the ammonia combustion test, the NO_X concentration decreased at a lower equivalence ratio. In the co-combustion of VOC and ammonia, NO was dominant in the NO_X emission while NO₂ was detected at approximately 10 ppm. Overall, the concentration of nitrogen oxide decreased due to the activation of the oxidation reaction as the reaction temperature increased. On the other hand, the concentration of carbon dioxide increased. Flameless combustion with an electric heat source achieved successful combustion of VOC and ammonia. This technology is expected to have advantages in cost and compactness compared to existing organic and alkaline treatment systems applied separately.

• Clean Technology
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• v.29 no.2
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• pp.126-134
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• 2023

Direct catalytic decomposition is a promising method for controlling the emission of nitrous oxide (N₂O) from the semiconductor and display industries. In this study, a γ-Al₂O₃ catalyst was developed to reduce N₂O emissions by a catalytic decomposition reaction. The γ-Al₂O₃ catalyst was prepared by an extrusion method using boehmite powder, and a N₂O decomposition test was performed using a catalyst reactor that was approximately 25.4 mm (1 in) in diameter packed with approximately 5 mm of catalysts. The N₂O decomposition tests were carried out with approximately 1% N₂O at 550 to 750 ℃, an ambient pressure, and a GHSV=1800-2000 h^-1. To confirm the N₂O decomposition properties and the effect of O₂ and steam on the N₂O decomposition, nitrogen, air, and air and steam were used as atmospheric gases. The catalytic decomposition tests showed that the 1% N₂O had almost completely disappeared at 700 ℃ in an N₂ atmosphere. However, air and steam decreased the conversion rate drastically. The long term stability test carried out under an N₂ atmosphere at 700 ℃ for 350 h showed that the N₂O conversion rate remained very stable, confirming no catalytic activity changes. From the results of the N₂O decomposition tests and long-term stability test, it is expected that the prepared γ-Al₂O₃ catalyst can be used to reduce N₂O emissions from several industries including the semiconductor, display, and nitric acid manufacturing industry.

• Journal of Radiation Protection and Research
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• v.9 no.1
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• pp.33-42
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• 1984

A great variety of nuclear gamma rays emitted from fission and activation products of spent nuclear fuel contains much information that can be elicited without affecting the integrity of the fuel elements. But the extraction of such information from the complex spectrum is difficult and requires computer codes. In the present work, a versatile code 'CAERI' was developed which locates peaks and calculates their areas for X-rays as well as gamma rays using elegant features of some widely used programs for gamma-ray peak fitting. 'CAERI' coded in FORTRAN used infinite series approximation more accurate than other workers various, simple, piecewise series approximations for evaluations of the Voigt function which represents the X-ray peak with non-negligible natural line width. 'CAERI' can handle even a complex multiplet consisting of peaks from X-rays and gamma rays in arbitrary mixture, which one often encounters in the isotopic analysis of heavy elements such as U and Pu. The results of the fitting performed on the test spectra of $^{177m}\;Lu\;{\gamma}-ray\;and\;^{235}U\;K_{\alpha}$X-ray show good agreement with those by previous workers.

• Journal of Korean Society of Environmental Engineers
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• v.29 no.8
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• pp.909-914
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• 2007

Fluorine compounds are the essential chemicals for wet processes of semiconductor and LCD production line. Problems of conventional treatments for fluoride wastewater are their high operation costs and low fluoride removal capacity. In this study, cement paste containing various Ca-bearing hydrates such as portlandite, calcium silicate hydrate(CSH), and ettringite was investigated for fluoride removal. The objectives of this study are to assess the feasibility of using cement paste cured mixture of cement and water as an alternative agent for treatment of fluoride wastewater and to investigate fluoride removal capacity of the cement paste. The performance of cement paste was comparable to that of lime in the kinetic test. In column experiment where the effluent fluoride concentrations were below 0.5 mg/L. Then the leached calcium reached the maximum level of 800 mg/L. The nitrate reduced to the level of less than 10 mg/L. Nitrate in the wastewater was exchanged with interlayer sulfate of these cement hydrate LDHs. Phosphate concentration could be reduced to 10 mg/L by forming calcium phosphate. These results indicate that the cement paste generally has advantageous characteristics as an economical and viable substitute for lime to remove fluoride.

• The Journal of the Korea Contents Association
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• v.10 no.6
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• pp.329-335
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• 2010

Digital imaging detectors can use a variety of detection materials to convert X-ray radiation either to light or directly to electron charge. Many detectors such as amorphous silicon flat panels, CCDs, and CMOS photodiode arrays incorporate a scintillator screen to convert x-ray to light. The digital radiography systems based on semiconductor detectors, commonly referred to as flat panel detectors, are gaining popularity in the clinical & hospital. The X-ray detectors are described between a-Silicon based indirect type and a-Selenium based direct type. The DRS of detectors is used to convert the x-ray to electron hole pairs. Image processing is described by specific image features: Latitude compression, Contrast enhancement, Edge enhancement, Look up table, Noise suppression. The image features are tuned independently. The final enhancement result is a combination of all image features. The parameters are altered by using specific image features in the different several hospitals. The image in a radiological report consists of two image evaluation processes: Clinical image parameters and MTF is a descriptor of the spatial resolution of a digital imaging system. We used the edge test phantom and exposure procedure described in the IEC 61267 to obtain an edge spread function from which the MTF is calculated. We can compare image in the processing parameters to change between original and processed image data. The angle of the edge with respect to the axes of detector was varied in order to determine the MTF as a function of direction. Each MTF is integrated within the spatial resolution interval of 1.35-11.70 cycles/mm at the 50% MTF point. Each image enhancement parameters consists of edge, frequency, contrast, LUT, noise, sensitometry curve, threshold level, windows. The digital device is also shown to have good uniformity of MTF and image parameters across its modality. The measurements reported here represent a comprehensive evaluation of digital radiography system designed for use in the DRS. The results indicate that the parameter enables very good image quality in the digital radiography. Of course, the quality of image from a parameter is determined by other digital devices in addition to the proper clinical image.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1992.10a
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• pp.48-52
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• 1992

진동원을 가진 장비를 임의의 구조물에 설치할 경우 관심이 되는 문제는 구 조물의 임의의 위치에서의 진동 수준을 추정하는 일이다. 특히 정밀장비를 다루는 반도체 공장에서 크린룸이나, 정밀측정, 분석 실험실등 미진동을 제 어해야 하는 분야에서는 더욱 그 필요성이 대두되고 있다. 진동제어가 필요 한 공간에 대한 진동수준의 예측이 가능할 경우 진동윈이나 수진점(active and passive type)방진에서 최적화된 전달률(transmissibility)을 명확히 결정 할 수 있어 설계와 시행오차를 최소화 할 수 있다. 그러나 이러한 실제문제 를 다룰 경우 대부분 진동제어 구조물은 복잡하고 설치 운용되는 장비들은 대형, 복합장비가 사용되는 것이 일반적이고 수행기간도 여러가지 공정상 단 시간에 이루어져야 하는 현실적인 어려움이 있다. 진동제어가 필요한 구조물 에 대한 임의의 공간에서 진동수준을 신속하고 정확하게 예측하기 위해서는 최소한 두 가지 정보만이라도 명확히 해야 한다. 하나는 장비의 주파수별 정 확한 가진력의 산정이고 다른 하나는 장비가 설치되고 진동제어가 필요한 구조물에 대한 동적특성(dynamic property)이다. 가진력에 대한 정보는 일반 적으로 장비제작사가 제시하는 것이 원칙이나 그렇지 못할 경우 구조해석 기술자(structure engineer)가 해석적으로 추정하거나 또는 명확히 가진 특성 을 알지 못하는 복잡한 장비는 실험적으로 결정해야 한다. 구조물의 동적 특 성을 나타내는 모빌리티(mobility)를 구하는 방법은 해석적인 방법과 실험적 인 방법이 있으나 복합재료, 복잡한 구조형태나, 지지조건, 다양한 결합부의 동적 특성을 정의하여 해석적으로 정확히 해결하기에는 어려움이 있다. 이러 한 제한조건을 손쉽게 해결하는 방법은 실 구조물에 대한 동적실험(dynamic test)을 통하여 단기간에 동적특성을 결정하고 SDM(structure dynamic modification)이나 FRS(force response simulation)를 수행하여 임의의 좌표 공간에 대한 진동수준을 해석적으로 예측할 뿐만 아니라 구조물의 진동제어 를 위한 동적인자를 변경시킬 수 있는 정보를 제공하며 장비를 방진할 경우 신뢰성 있는 전달률을 결정할 수 있다. 실험적으로 철교, 교량이나 건물의 철골구조 및 2층 바닥 등 대,중형의 복잡한 구조물에 대항 동특성을 나타내 는 모빌리티를 결정할 경우 충격 가진 실험이 사용되는 실험장비 측면에서 나 실험을 수행하는 과정이 대체적으로 간편하다. 그러나 이 경우 대상 구조 물을 충분히 가진시킬수 있는 용량의 대형 충격기(large impact hammer)가 필요하게 된다. 이러한 동적실험은 약 길이 61m, 폭 16m의 4경간 교량에 대 하여 동적실험을 수행하여 가능성을 확인하였다. 여기서는 실험실 수준의 평 판모델을 제작하고 실제 현장에서 이루어질 수 있는 진동제어 구조물에 대 한 동적실험 및 FRS를 수행하는 과정과 동일하게 따름으로써 실제 발생할 수 있는 오차나 error를 실험실내의 차원에서 파악하여 진동원을 있는 구조 물에 대한 진동제어기술을 보유하고자 한다.

• Journal of the Korean Society for Nondestructive Testing
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• v.32 no.4
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• pp.393-400
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• 2012

In recent years, nano-structured thin film systems are often applied in industries such as MEMS/NEMS device, optical coating, semiconductor or like this. Thin films are used for many and varied purpose to provide resistance to abrasion, erosion, corrosion, or high temperature oxidation and also to provide special magnetic or dielectric properties. Quite a number of articles to evaluate the characterization of thin film structure such as film density, film grain size, film elastic properties, and film/substrate interface condition were reported. Among them, the evaluation of film adhesive to substrate has been of great interest. In this study, we fabricated the polymeric thin film system with different adhesive conditions to evaluate the adhesive condition of the thin film. The nano-structured thin film system was fabricated by spin coating method. And then V(z) curve technique was applied to evaluate adhesive condition of the interface by measuring the surface acoustic wave(SAW) velocity by scanning acoustic microscope(SAM). Furthermore, a nano-scratch technique was applied to the systems to obtain correlations between the velocity of the SAW propagating within the system including the interface and the shear adhesive force. The results show a good correlation between the SAW velocities measured by acoustic spectroscope and the critical load measured by the nano-scratch test. Consequently, V(z) curve method showed potentials for characterizing the adhesive conditions at the interface by acoustic microscope.

• Journal of the Korean Society of Radiology
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• v.14 no.5
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• pp.517-522
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• 2020

Electron beam have many factors that affect dose distribution, so even if identical settings are used, they should be identified and used for radiation treatment, and the effects on the structures in the body are sensitive, making it difficult to investigate uniform dose distribution on tumors. In this study, a dosimeter was produced using PbI₂ which is a photoelectric material, and electrical characteristics were analyzed for 6, 9, and 12 MeV electronics in linear accelerators. The reproducibility test results showed that RSD were 1.1215%, 1.0160%, and 0.05137% respectively at 6, 9, and 12 MeV energies, indicating that the output signals were stable. The linearity evaluation results showed that the R² values of the reliability indicator for straight line trend lines were 0.9999, 0.9999, and 0.9994, respectively, at 6, 9, and 12 MeV, to confirm that the output signal was proportional to PbI₂ as dose increased. The PbI₂ dosimeter in this study is judged to be highly applicable to electromagnet measurement and is thought to be able to be used as a basic study of electron detector through photoelectric material.

• Journal of Biomedical Engineering Research
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• v.25 no.5
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• pp.329-334
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• 2004

The electronic nose (E-nose) recently finds its applications in medical diagnosis, specifically on detection of diabetes, pulmonary or gastrointestinal problem, or infections by examining odors in the breath or tissues with its odor characterizing ability. The odor recognition performance of E-nose can be improved by manipulating the sensor array responses of vapors in time-profile forms. The different chemical interactions between the sensor materials and the volatile organic compounds (VOC's) leave unique marks in the signal profiles giving more information than collection of the conventional piecemal features, i.e., maximum sensitivity, signal slopes, rising time. In this study, to use them in vapor recognition task conveniently, a novel time-profile method was proposed, which is adopted from digital image pattern matching. The degrees of matching between 8 different vapors were evaluated by using the proposed method. The test vapors are measured by the silicon-based gas sensor array with 16 CB-polymer composites installed in membrane structure. The results by the proposed method showed clear discrimination of vapor species than by the conventional method.

• Solar Energy
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• v.12 no.2
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• pp.62-78
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• 1992

The solar cells of $ITO_{(n)}/Si_{(p)}$, which are ITO thin films deposited and heated on Si wafer 190[$^{\circ}C$], were fabricated by two source vaccum deposition method, and their electrical properties were investigated. Its maximum output is obtained when the com- position of the thin film consist of indium oxide 91[mole %] and thin oxide 9[mole %]. The cell characteristics can be improved by annealing but are deteriorated at temperature above 600[$^{\circ}C$] for longer than 15[min]. Also, we investigated the spectral response with short circuit current of the cells and found that the increasing of the annealing caused the peak shifted to the long wavelength region. And by experiment of the X-ray diffraction, it is shown to grow the grains of the thin film with increasment of annealing temperature. The test results from the $ITO_{(n)}/Si_{(p)}$ solar cell are as follows. short circuit current : Isc= 31 $[mW/cm^2]$ open circuit voltage : Voc= 460[mV] fill factor : FF=0.71 conversion efficiency : ${\eta}$=11[%]. under the solar energy illumination of $100[mW/cm^2]$.