• Korean Chemical Engineering Research
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• v.61 no.1
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• pp.62-67
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• 2023

Due to the prolonged impact of COVID-19, the demand for Information Technology (IT) products is increasing, and their production facilities are expanded. Consequently, the use of harmful and dangerous chemicals are increased, the risk of fire(s) and explosion(s) is also elevated. In order to mitigate these risks, the government sets standards, such as KS C IEC 60079-10-1, and manages explosion-prone hazardous facilities where flammable substances are manufactured, used, and handled. However, using the standards of KS, it is difficult to predict the actual possibility of an explosion in a facility, because ventilation (an important factor) is not considered when setting up a hazardous work environment. In this study, the SEMI S6, Tracer Gas Test was applied to the chemical vapor deposition (CVD) facility, a major part of the display industry, to evaluate ventilation performance and to confirm the possibility of creating a less explosive environment. Based on the results, it was confirmed that the ventilation performance in the assumed scenarios met the standards stipulated in SEMI S6, along with supporting the possibility of creating a less explosive working condition. Therefore, it is recommended to use the prediction tool using engineering techniques, as well as KS standards, in such hazardous environments to prevent accidents and/or reduce economic burden following accidents.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.32 no.1
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• pp.1-6
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• 2022

In this research, a ring-shaped silicon carbide (SiC) single crystal manufactured using the PVT (Physical Vapor Transport) method was proposed to be applied to a SiC focus ring in semiconductor etching equipment. A cylindrical graphite structure was placed inside the graphite crucible to grow a ring-shaped SiC single crystal by the PVT method. SiC single crystal ring without crack was successfully obtained in case of using SiC single crystal wafer as a seed. A plasma etching process was performed to compare plasma resistance between the CVD-SiC focus ring and the PVT-SiC focus ring. The etch rate of ring materials in PVT-single crystal SiC focus ring was definitely lower than that of CVD-SiC focus ring, indicating better plasma resistance of PVT-SiC focus ring.

• Applied Chemistry for Engineering
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• v.34 no.6
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• pp.590-595
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• 2023

Novel aromatic imine derivatives with yellow were designed and synthesized for their potential application in color filters for image sensors. The synthesized compounds possessed chemical structures using aromatic imine groups. This innovative material was evaluated thoroughly, considering its optical and thermal properties under conditions similar to commercial device manufacturing processes. Following a rigorous performance evaluation, it was found that (E)-3-methyl-4-((3-methyl-5-oxo-1-phenyl-1H-pyrazol-4(5H)-ylidene)methyl)-1-phenyl-1H-pyrazol-5(4H)-one, abbreviated as MOPMPO, exhibited an impressive solubility of 0.5 wt% in propylene glycol monomethyl ether acetate, predominantly utilized as the solvent in the industry. Furthermore, MOPMPO showed exceptional performance as a color filter material for image sensors, having a high decomposition temperature of 290 ℃. These data unequivocally establish MOPMPO as a viable yellow dye additive for coloring materials in image sensor applications.

• Clean Technology
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• v.29 no.2
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• pp.126-134
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• 2023

Direct catalytic decomposition is a promising method for controlling the emission of nitrous oxide (N₂O) from the semiconductor and display industries. In this study, a γ-Al₂O₃ catalyst was developed to reduce N₂O emissions by a catalytic decomposition reaction. The γ-Al₂O₃ catalyst was prepared by an extrusion method using boehmite powder, and a N₂O decomposition test was performed using a catalyst reactor that was approximately 25.4 mm (1 in) in diameter packed with approximately 5 mm of catalysts. The N₂O decomposition tests were carried out with approximately 1% N₂O at 550 to 750 ℃, an ambient pressure, and a GHSV=1800-2000 h^-1. To confirm the N₂O decomposition properties and the effect of O₂ and steam on the N₂O decomposition, nitrogen, air, and air and steam were used as atmospheric gases. The catalytic decomposition tests showed that the 1% N₂O had almost completely disappeared at 700 ℃ in an N₂ atmosphere. However, air and steam decreased the conversion rate drastically. The long term stability test carried out under an N₂ atmosphere at 700 ℃ for 350 h showed that the N₂O conversion rate remained very stable, confirming no catalytic activity changes. From the results of the N₂O decomposition tests and long-term stability test, it is expected that the prepared γ-Al₂O₃ catalyst can be used to reduce N₂O emissions from several industries including the semiconductor, display, and nitric acid manufacturing industry.