• Electrical & Electronic Materials
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• v.27 no.4
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• pp.23-30
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• 2014

• Electrical & Electronic Materials
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• v.31 no.2
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• pp.25-35
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• 2018

• Electrical & Electronic Materials
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• v.34 no.3
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• pp.22-29
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• 2021

• Electrical & Electronic Materials
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• v.35 no.6
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• pp.20-29
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• 2022

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.36 no.2
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• pp.99-108
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• 2023

Currently, semiconductor manufacturing industry heavily relies on a wide range of high global warming potential (GWP) gases, particularly during etching and cleaning processes, and their use and relevant carbon emissions are subject to global rules and regulations for achieving carbon neutrality by 2050. To replace high GWP gases in near future, dry etching using alternative low GWP gases is thus being under intense investigations. In this review, we report a current status and recent progress of the relevant research activities on dry etching processes using a low GWP gas. First, we review the concept of GWP itself and then introduce the difference between high and low GWP gases. Although most of the studies have concentrated on potentially replaceable additive gases such as C₄F₈, an ultimate solution with a lower GWP for main etching gases including CF₄ should be developed; therefore, we provide our own perspective in this regard. Finally, we summarize the advanced dry etch process research with low GWP gases and list up several issues to be considered in future research.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.35 no.6
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• pp.547-555
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• 2022

Color conversion layer refers to a layer that converts the blue light emitted from the backlight into the red and green light. Heavy metal-free quantum dots and perovskite nanocrystals have attracted great attention as base materials for color conversion layers due to their outstanding optical characteristics. Here, we review recent advances in the development of color conversion layers based on quantum dots. First, we overview the representative optical characteristics of quantum dots and perovskite nanocrystals, and then introduce printing techniques for color converting layers including photolithography, inkjet printing, and nanoimprinting. Finally, we conclude this review with a brief perspective.

• Electrical & Electronic Materials
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• v.17 no.9
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• pp.16-22
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• 2004

오늘날 반도체 기술의 획기적인 발전에 의해서 마침내 에디슨의 탄소 필라멘트 백열전구를 대체할 수 있는 "반도체 필라멘트"라 불리는 고출력 백색 LED(lighting emitting diode)가 차세대 조명광원으로 급부상하고 있다.(중략)

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.7-7
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• 2010

튜명전극소재의 개발로 21세기에 디스플레이를 비롯한 응용제품들이 폭발적으로 증가했다고 해도 과언은 아니다. 특히, 광학적, 전기적 특성과 밀접한 관련이 있는 디스플레이, 터치패널 및 솔라셀 등에서 투명전극의 역할은 절대적이다. 한편, 최근에 투명전극소지에 이어 투명산화물반도체 소재가 디스플레이구동소자로 큰 관심을 끌고 있다. 즉, 산화물반도체 기반의 트랜지스터는 TFT-LCD의 대형화 및 고속화, AMOLED의 고집적화를 비롯하여, 저온 공정용 플렉시블 디스플레이의 구동소자로 주목받고 있는 것이다. 이에, 본 Tutorial에서는 ETRI에서 개발해온 투명 산화물 전자소자와 그와 관련된 TCO 기술을 집중적으로 다룰 것이다.

• Korean Journal of Materials Research
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• v.34 no.3
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• pp.175-183
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• 2024

Geopolymer, also known as alkali aluminum silicate, is used as a substitute for Portland cement, and it is also used as a binder because of its good adhesive properties and heat resistance. Since Davidovits developed Geopolymer matrix composites (GMCs) based on the binder properties of geopolymer, they have been utilized as flame exhaust ducts and aircraft fire protection materials. Geopolymer structures are formed through hydrolysis and dehydration reactions, and their physical properties can be influenced by reaction conditions such as concentration, reaction time, and temperature. The aim of this study is to examine the effects of silica size and aging time on the mechanical properties of composites. Commercial water glass and kaolin were used to synthesize geopolymers, and two types of silica powder were added to increase the silicon content. Using carbon fiber mats, a fiber-reinforced composite material was fabricated using the hand lay-up method. Spectroscopy was used to confirm polymerization, aging effects, and heat treatment, and composite materials were used to measure flexural strength. As a result, it was confirmed that the longer time aging and use of nano-sized silica particles were helpful in improving the mechanical properties of the geopolymer matrix composite.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.113-113
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• 2016

반도체 산업이 발전하고 기술이 향상됨에 따라 미세화되고 복잡한 구조의 소자가 개발되고 있으며, 2차원 소재 등 다양하고 새로운 소재들이 발견 및 연구되고 있다. 새로운 소재 또는 기술을 이용한 고품질 소자를 개발하기 위해서는 우수한 특성(높은 순도, 우수한 분해 및 반응 특성)을 지닌 증착소재의 개발 및 평가가 선행되어야 한다. 기존의 증착소재의 기본 물성을 측정하는 방법인 단순 기상 Fourier transform infrared spectroscopy(FT-IR) 분석법은 실제 공정에서의 증착경향을 대변하기 어렵다는 단점이 있다. 이러한 단점을 보완하기 위해 개조된 attenuated total reflection (ATR) 액세서리를 이용하여 실제 공정에서의 증착경향을 대변하고자 하였다. 본 연구에서는 반도체 증착소재의 분해 및 표면 흡착 특성을 분석하기 위해 ATR-FTIR 분석법을 이용하여 수행하였으며, 분산안정도에 따른 nanoparticle을 ATR의 크리스탈 표면에 분포시켜 hexamethyldisilazane(HMDS) source의 흡착 효율을 향상시키는 연구를 수행하였다. Nanoparticle의 분산안정도를 높이기 위하여 suspension 상태에서 pH, sonication, 분산제를 이용하였으며, nanoparticle을 ATR crystal 표면에 분포하여 분석한 결과, 분산안정도에 따라 HMDS의 흡착효율이 달라짐을 확인하였다.