• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.12
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• pp.1200-1209
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• 2010

The main subject of this paper is to develop analytic method with which output power or sensitivity variations of a magnetostrictive ultrasonic transducer can be estimated with no aid of experiments. After the bias magnetic field deployed over the patch is calculated using finite element analysis for magnetostatics, the representative value is extracted by averaging these field values. The operating point on the characteristic curve for magnetostriction is identified by this value and then the output performance is calculated from it. It is verified that the results from this simple model match well with those of its experimental version and some limits of this modeling technique are also considered.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2009.10a
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• pp.170-171
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• 2009

• Transactions of the Korean Society of Mechanical Engineers A
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• v.28 no.11
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• pp.1703-1710
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• 2004

The objective of this investigation is to formulate and carry out the topology optimization of a magnetic system consisting of permanent magnets and yokes. Earlier investigations on magnetic field topology optimization have been limited on the design optimization of yokes or permanent magnets alone. After giving the motivation for the simultaneous design of permanent magnets and yokes, we develop the topology optimization formulation of the coupled system by extending the technique used in structural problems. In the present development, we will also examine the effects of the functional form for permeability penalization on the optimized topology.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.26 no.7
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• pp.875-880
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• 2016

A new hybrid permanent magnet biased magnetic levitation actuator (maglev) is developed. This new maglev actuator is composed of two C-core electromagnetic cores separated with two permanent magnets. Compared to the conventional hybrid maglev actuators, the new actuator has unique flux paths such that bias flux paths are separated with control flux paths. The control flux paths have minimum reluctances only developed by air gaps, so the currents to produce control fluxes can be minimized. The gravity load can be compensated with the permanent magnet bias fluxes developed at off-centered air gap positions while external disturbances are controlled with control fluxes by currents. The consumed power to operate this levitation system can be minimized. 1-D magnetic circuit model is developed for this model such that the flux densities and magnetic forces are extensively analyzed. 3-D finite element model is also developed to analyze the performances of the maglev actuator.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05a
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• pp.101-104
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• 2003

The maximum coercive force of SmCo thin film was obtained at the Sm=28.2% and dc bias field was generated to CoZrNb, soft magnetic thin film, deposited on the SmCo thin film. DC field point having the maximum permeability for CoZrNb was shifted to higher dc field. DC field strength increased as the length of easy direction of magnetization decreased and 60Oe was measured for $3mm{\times}0.5mm$ sample.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.70-70
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• 2017

TSV(through silicon via)는 긴 종횡비를 갖는 패턴에 Cu, Ta, Ti을 높은 conformality를 갖도록 증착하는 공정이다. Magnetron cathode의 자석 배열 설계는 target 물질 종류에 따라서 multitrack, water drop type등이 있으며 target과 substrate 사이의 공간에 플라즈마를 형성시켜서 기판에 이온 입사량을 늘린 후 기판 바이어스를 이용하여 이온 충돌, re-sputtering을 통한 재증착 과정을 통해 치밀한 금속 박막을 연속적으로 형성할 수 있도록 하는 것이 목적이다. 또한 sputter가 사용되고 있는 분야에 효율을 증대시키고, 증착되는 막의 품질향상을 위해 UBMS를 사용하고 있으며, 산업에 사용되어 지는 300 mm wafer용 시스템은 제작비가 약 10억 원 정도 소요되며 다양한 테스트를 진행하기 위해선 많은 비용이 소요된다. 따라서 비용과 소요시간을 줄여 다양한 테스트를 위해 소규모 플라즈마 시스템을 설계하게 되었다. 61 l/sec 터보 분자 펌프와 다이아프램 펌프를 기초로한 TMP station에 2.75 인치 CF flange가 장착된 6 way cross를 main 챔버로 활용하고, 작은 size의 unbalanced magnetron cathode를 제작, 장착한 다음 6 way cross 주변에 전자석을 적절히 배치하여 300 mm wafer system에서와 동일한 물리적 현상을 테스트 할 수 있도록 하였다. Fig1. (a) UBMS system의 사진을 나타내었고, (b)에는 6 way cross 내부에 발생된 플라즈마의 형상을 나타내었다. 전원 장치는 Advanced Energy사의 MDX-1.5K DC power supply를 사용하였고, 방전 전압 - 전류 관계의 가스 압력에 따른 plasma 현상과 magnetron 배율에 따른 plasma 현상 그리고 전자석에 의한 영향을 주로 관찰 하였다.

• Journal of the Korean Magnetics Society
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• v.26 no.4
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• pp.137-141
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• 2016

There is a growing demand for non-contact current measurements for efficient use of electrical power and energy saving. In this study, I propose a non-contact current sensor using LC resonance by a resonance circuit composed of a sensor coil and 2 coupling coils for enabling a wireless measurement. The inductance of the sensor coil, which could be changed by applied current, causes the change of resonance frequency of the resonance circuit. A pair of magnet was attached to the ferrite core to apply a bias magnetic field that enabled the determination of the current direction. We obtained an output voltage change of 18 V with the current of -3~3 A. But, the output was nonlinear. In order to realize the non-contact current measuring method proposed in the present study, there is a need for a strict investigation of linearity and resolution for the future study.

• Journal of the Korean Vacuum Society
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• v.6 no.1
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• pp.85-90
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• 1997

A new ionized sputtering process was developed to fill small trench or via using additional ionizing mechanism of sputtered particles from 32cm $AlCu_x$(x=0.5%) cathode target with rotating magnet, then drawn toward substrate by small negative DC potential. The radial uniformity in RFI magnetron sputtering was studied by plasma diagnosis and appropriate RFI coil design to improve it. Optical emission intensities of excited species. $Ar^{\circ}, \;Ar^+;Al^+, \;Al^{\circ}$ are measured across the radial direction and showed close correlation with deposit's bottom to top thickness ratios in trenches and vias of submicron opening and 1.5 aspect ratio. After increase of the diameter of RF coil from 29 cm to 32 cm and improved the power leading feedthrough symmetry by removal of asymmetric single turn region, there was an increase of uniformity from 7.5% to 1.5% in bottom to top thickness ratio in 0.6 $\mu\textrm{m}$ vias.

• Journal of the Korean Vacuum Society
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• v.10 no.4
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• pp.431-439
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• 2001

In this paper, the a-Diamond films were synthesized using filtered vacuum arc source (FVAS), FVAS was composed of a torus structure with bending angle of 60 degree. The radius of torus was 266 mm, the radius of plasma duct was 80 mm and the total length was 600 mm. The magnet parts were composed of one permanent magnet and five solenoid magnets. The plasma duct was electrically isolated from the ground so that a bias voltage could be applied. The baffles inside plasma duct were installed in order to prevent the recoil effect of macro-particles. Cathode was made of graphite with 80 mm in diameter. The effects of solenoid magnet on plasma extraction were investigated by computer simulation and experiment using Taguchi's methode. The source and extraction magnet affected the arc stabilization. The extraction beam current was maximized with low value of the source magnet current and high value of the filtering magnet current. The beam current density was 3.2 mA/$\textrm{cm}^2$ and average deposition rate was 5 $\AA$/sec when the currents of arc discharge, source, extraction, bending, deflection and outlet magnet were 30 A, 1 A, 3 A, 5 A, 5 A, and 5 A, respectively. The beam current density and the efficiency of beam transportation were increased with the positive bias voltage of the plasma duct.