• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1783-1788
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• 2004

In the present paper, a micro flow sensor, which can be used at bio-delivery systems and micro heat pumps, is developed. For this, the micro flow sensor is integrated on a quartz wafer ($SiO_2$) and is manufactured by simple and convenient microfabrication processes. The micro flow sensor aims for measuring mass flow rates in the low range of about $0{\sim}20$ SCCM. The micro flow sensor is composed of temperature sensors, a heater, and a flow microchannel. The temperature sensors and the heater are manufactured by the sputtering processes in this study. In the microfabrication processes, stainless steel masks with different patterns are used to deposit alumel and chromel for temperature sensors and nichrome for the heater on the quartz wafer. The microchannel is made of Polydimethylsiloxane(PDMS) easily. A deposited quartz wafer is bonded to the PDMS microchannel by using the air plasma. Finally, we confirmed the good operation of the present micro flow sensor by measuring flow rate.

• Journal of the Korean Society of Propulsion Engineers
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• v.2 no.2
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• pp.24-29
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• 1998

An experimental study was carried out to investigate the characteristics of spray pattern such as discharge coefficient, spray angle, and mass distribution for two-fluid airblast swirl injector, within the range of fluid supply pressure 0~13kg/$\textrm{cm}^2$. In general atomization is promoted with increasing total gas mass flow and performance of the splay pattern was more stable when radial mass flow was greater than axial mass flow, radial swirler was better than Axial swirler for atomization. Equivalent spray angle did not change with water mass flow except for the condition of 3kg/$\textrm{cm}^2$ and showed the same for the gas mass flow. Mass distribution from the patternator shows that maximum value of the distribution were lowered but distributed larger area when gas flow rate increased. Center of mass position did not change with increasing water mass flow.