Fast Simulation of Output Voltage for High-Shock Piezoresistive Microaccelerometer Using Mode Superposition Method and Least Square Method (모드중첩법 및 최소자승법을 통한 고충격 압저항 미소가속도계의 출력전압 해석)
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- Transactions of the Korean Society of Mechanical Engineers A
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- v.36 no.7
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- pp.777-787
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- 2012