• Proceedings of the KSME Conference
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• 2004.11a
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• pp.1761-1766
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• 2004

In this lecture, we reviewed the principle and types of force sensors with strain gages, tactile sensors based on MEMS and force sensor as well as nano force sensors. Also we investigated applications of force sensors for NT, BT and RT.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.3
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• pp.7-12
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• 2002

• Proceedings of the KSME Conference
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• 2001.06a
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• pp.854-859
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• 2001

An eigenvalue analysis of a tunable micro-mechanical actuator is presented. The actuator is modeled as a continuum structure. The eigenvalue modified by the tuning voltage is computed through the linearization of the relation between the electrostatic force and the displacement at the equilibrium. A staggered algorithm is employed to perform the coupled analysis of the electrostatic and elastic fields. The stiffness matrix of the actuator is modified at this equilibrium state. The displacement field is perturbed using an eigenmode profile of the actuator. The configuration change of the actuator due to perturbation modifies the electrostatic field and thus the electrostatic force. The equivalent stiffness matrix corresponding to the perturbation and the change in the electrostatic force is then added to stiffness matrix in order to explain natural frequency shifting. The numerical examples are presented and compared with the experiments in the literatures.

• 유체기계공업학회:학술대회논문집
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• 2002.12a
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• pp.482-485
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• 2002

Development projects in KAIST rotted to the micro thermal device is introduced. Multi disciplinary research team is composed by combustion group and semiconductor group in KAIST and catalyst research center in KRICT to develop micro thermal/fluidic device and various items are on development. Among the projects, various kind of componenst that is required by the micro thermal devicesystem is introduced. Technology related to development of micro combustor, Micro igniter, micro fabrication of 3D structure, micro reactor and micro catalyst preparation is introduced.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.497-502
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• 2002

This paper describes a design methodology of a tri-axial silicon-based farce sensor with square membrane by using micromachining technology (MEMS). The sensor has a maximum farce range of 5 N and a minimum force range of 0.1N in the three-axis directions. A simple beam theory was adopted to design the shape of the micro-force sensor. Also the optimal positions of piezoresistors were determined by the strain distribution obtained from the commercial finite element analysis program, ANSYS. The Wheatstone bridge circuits were designed to consider the sensitivity of the force sensor and its temperature compensation. Finally the process for microfabrication was designed using micromachining technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.1063-1066
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• 1995

This paper presents a precition control of an electrostatic microactuator. For the generation of sufficient electrostatic force, a donse comb-type electrostatic microactuator is designed and manufactureed via MEMS (micro-electro-mechanical systems) process. The nonlinear plant and the linear plant of the microactuator are established through the comparison of experimental results and simulation results. A feedforward controller is designed via MATLAB simulation using the inverse function of the nonlinear plant. the experiment for the precise position tracking control is undertaken to show the control efficiency of the proposed controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1029-1032
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• 2002

This paper describes a design of a tactile sensor, which can measure three components force and temperature due to thermal conductive. The bio-mimetic tactile sensor, alternative to human's finger, is comprised of four micro force sensors and four thermal sensors, and its size being 10mm$\times$10mm. Each micro force sensor has a square membrane, and its force range is 0.1N - 5N in the three-axis directions. On the other hand, the thermal sensor for temperature measurement has a heater and four temperature sensor elements. The thermal sensor is designed to keep the temperature. $36.5^{\circ}C$, constant, like human skin, and measure the temperature $0^{\circ}C$ to $50^{\circ}C$. The MEMS technology is applied to fabricate the sensing element of the tactile sensor.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.6 s.171
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• pp.199-206
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• 2005

In this work, a theoretical investigation on the energy harvesting is undertaken using one of potential smart materials; piezoelectric material. The energy equations fur both square and circular types of the piezoelectric material are derived, and the energy generated from two commercially available Products: $PZT (Lead/Zirconium/Titanium: Pb(Zr,\;Ti)O_3)$ and PVDF (polyvinylidene fluoride) are investigated in terms of the thickness and area. In addition, a finite element analysis (FEA) is undertaken to obtain the generated energy due to the uniform pressure applied on the surface of the piezoelectric materials. A comparative work between the theory and the FEA is made followed by the brief discussion on the usage of the harvested energy for Bio MEMS.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.9
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• pp.21-25
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• 2004

최근 국가의 10대 신성장 동력산업에 포함 되어 있는 RT(robot technology)는 향후 포스트 반도체산업의 중요한 산업으로 국내 경제를 활성화 시키는 원동력이 될 것으로 전망된다. 이와 더불어 향후에는 현재의 산업용 로봇이 아닌 감각과 지능을 가진 인간친화적인 로봇이 출현할 것으로 기대된다. 즉 주변 환경을 인지하여 정보를 획득하고 지능적 판단, 행위 및 상호작용을 통하여 인간을 지원하는 지능형 로봇은 인간과의 상호작용을 통하여 감성을 이해하며 서비스 제공, 인간의 동작이나 작업을 지원 그리고 위험작업 수행, 인간이 불가능한 작업을 대신 할 수 있을 것이다. (중략)

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.888-891
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• 2005

Compared to the simple-beam springs, double-folded springs have advantages of the linearity even at the long stroke, so that they have been widely used for optical components such as optical switches and optical attenuators. Until now only the stiffness of the double-folded springs dn the perpendicular direction of the shuttle movement has been considered for the stable operation, however, the rotational stiffness of the splings has not been researched as much. Therefore, this paper suggests the double-folded springs of the maximum rotational stiffness with the constant stiffness in the stroke direction using the reliability based topology optimization (RBTO), whose operation properties were experimentally characterized.