• Title/Summary/Keyword: 미세 전자기계 시스템

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Fabrication and Evaluation of the SnO2 Based Gas Sensor for CO and NOx Detection (SnO2를 이용한 CO 및 NOx 가스 감지 센서 제작 및 특성 연구)

  • Kim, Man Jae;Lee, Yu-Jin;Ahn, Hyo-Jin;Lee, Sang Hoon
    • Transactions of the Korean Society of Automotive Engineers
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    • v.23 no.5
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    • pp.515-523
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    • 2015
  • In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.

Surface Characteristics of Silicon Substrates Coated with Octadecyltrichlorosilane (옥타데실트리클로로실란 코팅에 의한 실리콘 표면 특성 변화)

  • 유희재;김수경;김진홍;강호종
    • Polymer(Korea)
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    • v.27 no.6
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    • pp.555-561
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    • 2003
  • The self-assembled monolayer coating of octadecyltrichlorosilane (OTS) on the silicon based MEMS was investigated and surface characteristics were considered as a function of coating conditions and reagent composition. The sulfuric peroxide mixture (SPM) solution was used to form -OH group which caused the hydrophilic characteristic on silicon surftce. Highest hydrophilicity was obtained by SPM solution with 85% acid content at room temperature. OTS was applied on the silicon surface by means of self-assembled monolayers (SAMs) coating. It was found that sol-gel reaction was took place between -OH group on the silicon surface and -Cl group in OTS. As a result, the contact angle increased due to the increase of hydrophobicity by Si-O bonding of SAMs. Sol-gel reaction could be controlled by coating conditions as well as reagent composition in OTS coating solution.

Performance Prediction and Analysis of a MEMS Solid Propellant Thruster (MEMS 고체 추진제 추력기의 성능예측 및 분석)

  • Jung, Juyeong;Lee, Jongkwang
    • Journal of the Korean Society of Propulsion Engineers
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    • v.21 no.6
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    • pp.1-7
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    • 2017
  • The performance of a MEMS solid propellant thruster was predicted and analyzed through internal ballistics model and CFD analysis. The nozzle throat was $416{\mu}m$, and the area ratio of the nozzle was 1.85. As a result of the internal ballistics model, chamber pressure increased up to 197 bar and the maximum thrust was 3,836 mN. In CFD analysis, the chamber pressure of the internal ballistics model was applied as the operating pressure, and the CFD model was divided into an adiabatic and a heat loss model. As a result, the maximum thrust of the adiabatic model was 14.92% lower than that of the internal ballistics model, and the effect of heat loss was insignificant.

Continuous Process for the Etching, Rinsing and Drying of MEMS Using Supercritical Carbon Dioxide (초임계 이산화탄소를 이용한 미세전자기계시스템의 식각, 세정, 건조 연속 공정)

  • Min, Seon Ki;Han, Gap Su;You, Seong-sik
    • Korean Chemical Engineering Research
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    • v.53 no.5
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    • pp.557-564
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    • 2015
  • The previous etching, rinsing and drying processes of wafers for MEMS (microelectromechanical system) using SC-$CO_2$ (supercritical-$CO_2$) consists of two steps. Firstly, MEMS-wafers are etched by organic solvent in a separate etching equipment from the high pressure dryer and then moved to the high pressure dryer to rinse and dry them using SC-$CO_2$. We found that the previous two step process could be applied to etch and dry wafers for MEMS but could not confirm the reproducibility through several experiments. We thought the cause of that was the stiction of structures occurring due to vaporization of the etching solvent during moving MEMS wafer to high pressure dryer after etching it outside. In order to improve the structure stiction problem, we designed a continuous process for etching, rinsing and drying MEMS-wafers using SC-$CO_2$ without moving them. And we also wanted to know relations of states of carbon dioxide (gas, liquid, supercritical fluid) to the structure stiction problem. In the case of using gas carbon dioxide (3 MPa, $25^{\circ}C$) as an etching solvent, we could obtain well-treated MEMS-wafers without stiction and confirm the reproducibility of experimental results. The quantity of rinsing solvent used could be also reduced compared with the previous technology. In the case of using liquid carbon dioxide (3 MPa, $5^{\circ}C$, we could not obtain well-treated MEMS-wafers without stiction due to the phase separation of between liquid carbon dioxide and etching co-solvent(acetone). In the case of using SC-$CO_2$ (7.5 Mpa, $40^{\circ}C$), we had as good results as those of the case using gas-$CO_2$. Besides the processing time was shortened compared with that of the case of using gas-$CO_2$.

Preliminary System Design of STEP Cube Lab. for Verification of Fundamental Space Technology (우주기반기술 검증용 극초소형 위성 STEP Cube Lab.의 시스템 개념설계)

  • Kwon, Sung-Cheol;Jung, Hyun-Mo;Ha, Heon-Woo;Han, Sung-Hyun;Lee, Myung-Jae;Jeon, Su-Hyeon;Park, Tae-Young;Kang, Su-Jin;Chae, Bong-Gun;Jang, Su-Eun;Oh, Hyun-Ung;Han, Sang-Hyuk;Choi, Gi-Hyuk
    • Journal of the Korean Society for Aeronautical & Space Sciences
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    • v.42 no.5
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    • pp.430-436
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    • 2014
  • The mission objective of STEP Cube Lab. (Cube Laboratory for Space Technology Experimental Project) classified as a pico-class satellite is to verify the technical effectiveness of payloads such as variable emittance radiator, SMA washer, oscillating heat pipe and MEMS based solid propellant thruster researched at domestic universities. In addition, the MEMS concentrating photovoltaic power system and the non-explosive holding and separation mechanism with the advantages of high constraint force and low shock level will be developed as the primary payloads for on-orbit verification. In this study, the feasibility of the mission actualization has been confirmed by the preliminary system design.

Current Status of Nanotechnology Development for Space Exploration (우주탐사용 나노기술 개발 동향)

  • Lee, Ho-Sung;Chae, Yeon-Seok
    • Current Industrial and Technological Trends in Aerospace
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    • v.6 no.1
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    • pp.90-98
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    • 2008
  • Nanotechnology(NT) refers to a field of advanced micro-technology covering the creation and manufacturing of materials on the atomic and molecular scale and requires interdisciplinary study with various fields including materials science, physics, chemistry, electronics and others. Whileas nanotechnology is a kind of micro and small scaled science, space technology(ST) is one of the larger and system technologies utilizing broad fields of mechanical, materials, electronics and communication technologies. It is necessary to select and concentrate the functional items of nanotechnology for efficient application to be utilized in space technology, due to the cross-sectional characteristics of nanotechnology within nanomaterials, nanoelectronics, and nanomanufacturing. This paper provides the current state of art of nanotechnology in space technology by evaluating NASA's activities and the 9th frame of the project ANTARES(Analysis of Nanotechnology Applications in Space Developments and Systems) with the support of the German Aerospace Center (DLR), Space Flight Management, Division Technology for Space Systems and Robotics. It has shown that it is necessary to apply nanotechnology to space technology in order to achieve international competitiveness, for the nanotechnology can bring the previously impossible things to reality. Since KARI plans to send an unmanned probe to the moon's orbit and land a probe on the moon's surface in 2025, it is urgently needed to incorporate nanotechnology to national space development plan.

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An Experimental Study of Synthesis and Characterization of Vanadium Oxide Thin Films Coated on Metallic Bipolar Plates for Cold-Start Enhancement of Fuel Cell Vehicles (연료전지 차량의 냉시동성 개선을 위한 금속 분리판 표면의 바나듐 산화물 박막 제조 및 특성 분석에 관한 연구)

  • Jung, Hye-Mi;Noh, Jung-Hun;Im, Se-Joon;Lee, Jong-Hyun;Ahn, Byung-Ki;Um, Suk-Kee
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.35 no.6
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    • pp.585-592
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    • 2011
  • The enhancement of the cold-start capability of polymer electrolyte fuel cells is of great importance in terms of the durability and reliability of fuel-cell vehicles. In this study, vanadium oxide films deposited onto the flat surface of metallic bipolar plates were synthesized to investigate the feasibility of their use as an efficient self-heating source to expedite the temperature rise during startup at subzero temperatures. Samples were prepared through the dip-coating technique using the hydrolytic sol-gel route, and the chemical compositions and microstructures of the films were characterized by X-ray diffraction, X-ray photoelectron spectroscopy, and field-emission scanning electron microscopy. In addition, the electrical resistance hysteresis loop of the films was measured over a temperature range from -20 to $80^{\circ}C$ using a four-terminal technique. Experimentally, it was found that the thermal energy (Joule heating) resulting from self-heating of the films was sufficient to provide the substantial amount of energy required for thawing at subzero temperatures.

Measurement of Tensile Properties for Thin Aluminium Film by Using White Light Interferometer (백색광간섭계를 이용한 알루미늄 박막의 인장 물성 측정)

  • Kim, Sang-Kyo;Oh, Chung-Seog;Lee, Hak-Joo
    • Journal of the Korean Society for Nondestructive Testing
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    • v.30 no.5
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    • pp.471-478
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    • 2010
  • Thin films play an important role in many technological applications including microelectronic devices, magnetic storage media, MEMS and surface coatings. It is well known that a thin film's material properties can be very different from the corresponding bulk properties and thus there has been a strong need for the development of a reliable test method to measure the mechanical properties of a thin film. We have developed an alternative and convenient test method to overcome the limitations of previous membrane deflection experiment and uniaxial tensile test by adopting a white light interferometer having sub-nanometer out-of-plane displacement resolution. The freestanding aluminium specimens are tested to verity the effectiveness of the test method developed and get the tensile properties. The specimens are 0.5 rum wide, $1{\mu}m$ thick and fabricated through MEMS processes including sputtering. 1 to 5 specimens are fabricated on Si dies. The membrane deflection experiments are carried out by using a homemade tester consisted of a motor-driven loading tip, a load cell, and 6 DOF alignment stages. The test system is compact enough to set it up beneath a commercial white light interferometric microscope. The white light fringes are utilized to align a specimen with the tester. The Young's modulus and yield point stress of the aluminium film are 62 GPa and 247 MPa, respectively.