• Title/Summary/Keyword: 미세전극

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Effect of RuO$_2$ Thin Film Microstructure on Characteristics of Thin Film Micro-supercapacitor ($RuO_2$박막의 미세 구조가 박막형 마이크로 슈퍼캐패시터의 특성에 미치는 영향)

  • Kim, Han-Ki;Yoon, Young-Soo;Lim, Jae-Hong;Cho, Won-Il;Seong, Tae-Yeon;Shin, Young-Hwa
    • Korean Journal of Materials Research
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    • v.11 no.8
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    • pp.671-678
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    • 2001
  • All solid-state thin film micro supercapacitor, which consists of $RuO_2$/LiPON/$RuO_2$ multi layer structure, was fabricated on Pt/Ti/Si substrate using a $RuO_2$ electrode. Bottom $RuO_2$ electrode was grown by dc reactive sputtering system with increasing $O_2/[Ar+O_2]$ ratio at room temperature, and a LiPON electrolyte film was subsequently deposited on the bottom $RuO_2$ electrode at pure nitrogen ambient by rf reactive sputtering system. Room temperature charge-discharge measurements based on a symmetric $RuO_2$/LiPON/$RuO_2$ structure clearly demonstrates the cyclibility dependence on the microstructure of the $RuO_2$ electrode. Using both glancing angle x-ray diffraction (GXRD) and transmission electron microscopy (TEM) analysis, it was found that the microstructure of the $RuO_2$ electrode was dependent on the oxygen flow ratio. In addition, x- ray photoelectron spectroscopy(XPS) examination shows that the Ru-O binding energy is affected by increasing oxygen flow ratio. Furthermore, TEM and AES depth profile analysis after cycling demonstrates that the interface layer formed by interfacial reaction between LiPON and $RuO_2$ act as a main factor in the degradation of the cyclibility of the thin film micro-supercapacitor.

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A Study on the Effect of Magnetic Field in Electrostatic Precipitator for Improving Precipitation Efficiency of Particulate Matter (미세먼지의 집진효율 향상을 위한 전기집진기의 자계인가특성에 대한 연구)

  • Park, Jae-Youn;Han, Sang-Bo;Park, Sang-Hyun
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.22 no.12
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    • pp.122-129
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    • 2008
  • This paper gives the experimental results for the effective precipitation of particulated matter(PM) below 1[${\mu}m$] of diameter using the electrostatic precipitator, which is designed by ourselves. In order to improve the precipitation efficiency, the vertical and parallel magnetic field to the electric field is applied simultaneously by arranging ferrite magnets. When the parallel magnetic field is applied, the precipitation efficiency does not improve in comparison with non-magnets. However, when the vertical magnetic field is applied, it is improved about 5[%] more than the case of non-magnetized ferrite plate used. In addition, when the magnets are installed at the center of ground plate electrodes, the precipitation efficiency is ranged from 17 to 32[%] under the applied voltage of 5[kV]. It is similar to the case of the magnet arrangement at the front part of ground electrode. Also, the precipitation efficiency is more improved by arranging magnets as the inside part and zigzag on the electrodes. Especially, large particles of 0.7 and 1[${\mu}m$] is more easily captured by electrostatic precipitator. Consequently, it is convinced that the vertical magnetic field is more desirable than parallel magnetic field on the electric field for the effective treatment of particulated matter.

Analysis of Heat-generating Performance, Flexural Strength and Microstructure of Conductive Mortar Mixed with Micro Steel Fiber and MWCNT (마이크로 강섬유와 MWCNT를 혼입한 전도성 모르타르의 발열성능, 휨강도 및 미세구조 분석 )

  • Beom-gyun Choi;Gwang-hee Heo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.28 no.3
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    • pp.47-58
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    • 2024
  • This study were conduced experimentally to analyze the heat-generating performance, flexural strength, and microstructure of conductive mortar mixed with micro steel fiber and multi-wall carbon nanotube (MWCNT). In the conductive mortar heat-generating performance and flexural strength tests, the mixing concentration of MWCNT was selected as 0.0wt%, 0.5wt%, and 1.0wt% relative to the weight of cement, and micro steel fibers were mixed at 2.0vol% relative to the volume. The performance experiments were conducted with various applied voltages (DC 10V, 30V, 60V) and different electrode spacings (40 mm, 120 mm) as parameters, and the flexural strength was measured at the curing age of 28 days and compared and analyzed with the normal mortar. Furthermore, the surface shape and microstructure of conductive mortar were analyzed using a field emission scanning electron microscope (FE-SEM). The results showed that the heat-generating performance improved as the mixing concentration of MWCNT and the applied voltage increased, and it further improved as the electrode spacing became narrower. However, even if the mixing concentration of MWCNT was added up to 1.0 wt%, the heat-generating performance was not significantly improved. As a result of the flexural strength test, the average flexural strength of all specimens except the PM specimen and the MWCNT mixed specimens was 4.5 MPa or more, showing high flexural strength due to the incorporation of micro steel fibers. Through FE-SEM image analysis, Through FE-SEM image analysis, it was confirmed that a conductive network was formed between micro steel fibers and MWCNT particles in the cement matrix.

Microsturcture Control and Compression Characteristics at Room and High Temperature for$\gamma$-TiAI Intermetallic Compounds with Addition Elements (제 3원소가 첨가된 금속간 화합물$\gamma$-TiAI의 미세조직 제어와 상온 및 고온 압축 특성)

  • Jeong, Jin-Seong;Lee, Dong-Hui
    • Korean Journal of Materials Research
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    • v.6 no.1
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    • pp.67-78
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    • 1996
  • 제 3원소가 첨가된 금속간 화합물 TiAI 금속간 화합물 분말을 PREP법(플라즈마 회전전극법)으로 제조하여, 통.방전 강압소결법에 의해 치밀한 소결체를 만들었다. 이에 대해 첨가 원소의 종류와 열처리에 따른 고온 및 상온 압축 특성의 변화를 조사하였다. 소결체의 미세조직은 ${\gamma}$/$\alpha$2 lamella로 이루어진 완전 변태구조였고, 결정립의 크기는 140-150$\mu\textrm{m}$였으며 계단형 결정립계를 나타내었다. 소결체를 ($\alpha$+${\gamma}$)구역인 130$0^{\circ}C$에서 2시간 동안 열처리한 결과, 모든 조성의 시편이 등축점 ${\gamma}$와 lamella로 이루어진 전형적인 duplexrn조로 변태하였다. 상온 압축 시험에서 시편은 파괴될 때까지 가공경화 현상이 나타났으며, Cr을 첨가한 시편이 가장 큰 파괴응력과 변형률을 나타내었다. 한편, 고온 압축 시험의 경우 온도상승 때문에 가공경화의 속도가 감소되었고, 80$0^{\circ}C$에서는 가공경화와 회복이 균형을 이루는 소위 정상 상태의 변형을 보였다.

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Estimation of Oxygen Consumption Rates by Using an Oxygen Microelectrode in Ganghwa Intertidal Flat (강화도 남부 갯벌퇴적물에서 산소 미세전극을 이용한 산소소모율 추정)

  • Kim, Dong-Seon
    • Ocean and Polar Research
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    • v.28 no.2
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    • pp.119-127
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    • 2006
  • We measured oxygen microprofiles using an oxygen microelectrode in Ganghwa intertidal flat in April and September. Oxygen consumption rate was calculated by using three different methods based on the oxygen microprofiles. The method using the PROFILE software was thought to be the most reliable among the three methods. The oxygen consumption rates calculated at station D1 by using the PROFILE software were 10.5 and 6.27mmol $m^{-2}d^{-1}$ in April and September, respectively. At station D2, they were 10.9mmol $m^{-2}d^{-1}$ in April and 5.39 mmol $m^{-2}d^{-1}$ in September. There was little spatial variation, but large seasonal variation, with almost two times larger values in April than in September. The higher rate in April is ascribed to higher oxygen concentration in the seawater and higher organic carbon content in the surface sediments, which probably accelerate oxygen consumption for organic matter decomposition in the sediments. Aerobic remineralization rates estimated from the oxygen consumption rates ranged from 4.14 to 8.07 mmol C $m^{-2}d^{-1}$ in Ganghwa intertidal flat, which were much lower than the anaerobic remineralization rate.

Microstructures and Electrical properties of Multilayer PTCR ceramics as a function of Sintering Additives (소결첨가제에 따른 적층 PTCR 세라믹스의 미세구조와 전기적 특성)

  • Myoung, Seong-Jae;Park, Myoung-Sung;Chun, Myoung-Pyo;Cho, Jeong-Ho;Nam, Chung-Hee;Kim, Byung-Ik
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.11a
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    • pp.180-181
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    • 2008
  • 화학양론적 $BaTiO_3$의 소결은 고온의 에너지를 필요로 하며, 내부전극과 세라믹충의 동시소성과정에서 Ni이 세라믹층으로의 확산이 발생되어 PTC의 물성저하를 초래한다. 본 연구에서는 저온에서 액상을 형성하여 소결온도를 낮추는 것으로 알려진 산화물 및 비산화물계 소결첨가제가 적층 PTC 세라믹스의 미세구조 및 전기적 특성에 미치는 영향에 대하여 고찰하였다. 소결과정에서 분해되어 기체를 형성하는 BN, $Li_2CO_3$, LiF의 경우 기공율을 증가시켜 산소의 이동경로를 형성하였으며, 이는 입계의 재산화를 용이하게 하여 PTC 효과를 보였다.

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Fabrication of Micro-electrodes using Liner Block Moving Electrical Discharge Grinding and Characteristics of Micro-hole Machining of Graphene Nanoplatelet-reinforced Al2O3Composites (블록직선이송 방전연삭에 의한 미세전극 가공 및 그래핀 강화 알루미나 복합소재의 마이크로 홀 가공특성)

  • Jeong, Hyeon-A;Lee, Chang Hoon;Kang, Myung Chang
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.16 no.1
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    • pp.149-156
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    • 2017
  • Graphene nanoplatelet (GNP)-reinforced alumina ($Al_2O_3$) is a promising material for micro-partapplications, particularly micro-nozzle shapes, because of its excellent wearresistance. In this study, a $Al_2O_3$/GNPcomposite with 15 vol% graphene nanoplatelets (GNP) was highly densified and fabricated via spark plasma sintering for micro-electrical discharge drilling (Micro-ED drilling) and the wear resistance property of the composite is evaluated via the ball-on-disk method. In addition, the diameter and shape of the micro-electrodes machined by wire electrical discharge grinding (WEDG), block electrical discharge grinding (BEDG), and new linear block moving electrical discharge grinding (LBMEDG) methods are systematically compared and analyzed to observe the micro-hole machining in the micro-ED drilling of the $Al_2O_3$/15vol% GNP composite.

Microstructure and Strength of the Microjoined Electrode for the Lamp of the LCD Backlight Unit (TFT-LCD 백라이트 유닛(BLU) 램프용 전극 미세 접합부의 강도 및 미세조직)

  • Kim, Gwang-Soo;Kim, Sang-Duck
    • Korean Journal of Materials Research
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    • v.19 no.1
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    • pp.7-12
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    • 2009
  • TFT-LCD is the most popular type of flat display panel in the information technology field. The back light unit is a main part of the structure of a TFT-LCD panel. Occasionally, studies have shown that failures of the CCFL of the BLU occur due to the poor weld characteristics of these materials. The aim of this study was to prepare some technical data and to characterize a microjoined electrode for the CCFL. Microstructure examinations, microhardness measurements, resistance measurements and microtensile tests of the microjoined electrode were carried out. The result indicates that a large amount of grain coarsening exists in the heat-affected zone (HAZ) of the weld between the cup and the pin. This grain coarsening of the HAZ between the cup and pin is caused by the welding cycle, which may have an influence on the lowest microhardness values. Fracturing of the microjoined electrode also occurred at the HAZ close to the cup between the weld holding the cup and the pin. Additionally, no specific changes of the electrical resistance among the cup, pin, and lead wire themselves or in the microjoined electrode were observed.

A Study on Optimization of Inkjet-based IDE Pattern Process for Impedance Sensor (임피던스 센서 제작을 위한 잉크젯 기반 패턴 IDE 적층공정 최적화 연구)

  • Jeong, Hyeon-Yun;Ko, Jeong-Beom
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.21 no.4
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    • pp.107-113
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    • 2022
  • At present, it is possible to manufacture electrodes down to several micrometers (~ ㎛) using inkjet printing technology owing to the development of precision ejection heads. Inkjet printing technology is also used in the manufacturing of bio-sensors, electronic sensors, and flexible displays. To reduce the difference between the electrode design/simulation performance and actual printing pattern performance, it is necessary to analyze and optimize the processable area of the ink material, which is a fluid. In this study, process optimization was conducted to manufacture an IDE pattern and fabricate an impedance sensor. A total of 25 IDE patterns were produced, with five for each lamination process. Electrode line width and height changes were measured by stacking the designed IDE pattern with a nanoparticle-based conductive ink multilayer. Furthermore, the optimal process area for securing a performance close to the design result was analyzed through impedance and capacitance. It was observed that the increase in the height of stack layer 4 was the lowest at 4.106%, and the increase in capacitance was measured to be the highest at 44.08%. The proposed stacking process pattern, which is optimized in terms of uniformity, reproducibility, and performance, can be efficiently applied to bio-applications such as biomaterial sensing with an impedance sensor.

TCO 박막의 결정 구조 및 표면 특성에 따른 OLED 소자의 특성

  • Lee, Bong-Geun;Lee, Yu-Rim;Lee, Gyu-Man
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.11a
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    • pp.183-183
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    • 2009
  • OLED소자의 양극재료로써 현재는 산화인듐주석(ITO : indium tin oxide) 박막이 널리 이용되고 있다. 그러나 낮은 전기 비저항과 높은 투과도를 갖는 ITO 박막을 얻기 위해서는 $300^{\circ}C$ 이상의 고온에서 성막되어야 하며, 원료 물질인 인듐의 수급량 부족으로 인한 문제점과 독성, 저온증착의 어려움, 스퍼터링 시 음이온 충격에 의한 막 손상으로 저항의 증가의 문제점이 있고, 또한 유기발광소자의 투명전극으로 쓰일 경우에 유기물과의 계면 부적합성, 액정디스플레이의 투명전극으로 사용될 경우에 $400^{\circ}C$정도의 놓은 온도와 수소 플라즈마 분위기에서 장시간 노출 시 열화로 인한 광학적 특성변화가 문제가 된다. 이러한 문제점을 지닌 ITO 박막을 대체할 수 있는 물질로 산화 인듐아연(lZO) 박막이 많은 각광을 받고 있다. IZO(Indium Zinc Oxide) 박막은 저온 ($100^{\circ}C$ 이상)에서 증착이 가능하고 추가적인 열처리 없이도 가시광 영역에서 90% 이상의 광 투과도와 ${\sim}10^{-4}{\Omega}cm$ 이하의 낳은 전기 비저항을 갖는 것으로 알려져 있다. 이러한 IZO박막은 성막 후 고온의 열처리 과정이 필요 없기 때문에 폴리카보네이트와 같은 유기물 기판을 사용하여 제작 가능한 유연한 평판형 표시 소자의 제작에도 적용될 수 있다. IZO(Indium Zinc Oxide) 박막은 상온 공정에서도 우수한 전기적, 광학적, 표면 특성을 나타낼 뿐만 아니라 양극재료로써 높은 일함수를 가지고 있어 고효율의 유기 발광 소자를 구현하는데 유리한 재료라 판단된다. 본 연구에서는 TCO 박막의 면 저항과 표면 거칠기가 OLED 소자의 성능에 미치는 영향을 조사하였다. R.F Magnetron Sputtering을 이용하여 투명 전도막을 성막 형성 하였으며, 기판온도와 증착과정에서 주입되는 산소, 수소의 유랑 변화가 박막의 구조적, 전기적 특성에 어떠한 영향 미치는 것인가를 자세히 규명하였다 ITO 와 IZO박막은 챔버 내 다양한 가스 분위기(Ar, $Ar+O_2$ and $Ar+H_2$) 에서 R.F Magnetron Sputtering 방법으로 증착했다. TCO박막의 구조적인 이해를 돕기 위해서 X-ray diffraction 과 FESEM으로 분석했다. 광학적 투과도와 박막의 두께는 Ultraviolet Spectrophotometer(Varian, cary-500)와 Surface profile mersurement system으로 각각 측정하였다. 면저항, charge carrier농도, 그리고 TCO박막의 이동성과 길은 전기적특성은 Four-point probe와 Hall Effect Measurement(HMS-3000)로 각각 측정한다. TCO 박막의 표면 거칠기에 따른 OLED소자의 성능분석 측면에서는 TCO 박막의 표면 거칠기 조절을 위해 photo lithography 공정을 사용하여 TCO 박막을 에칭 하였다. 미세사이즈 패턴 마스크가 사용되고 에칭의 깊이는 에칭시간에 따라 조절한다. TCO박막의 표면 형태는 FESEM과 AFM으로 관찰하고 그리고 나서 유기메탈과 음극 전극을 연속적으로 TCO 박막위에 증착한다. 투명전극으로 사용되는 IZO기판 상용화를 위해 IZO기판 위에 $\alpha$-NPB, Alq3, LiF, Al순서로 OLED소자를 제작하였다. 전류밀도와 전압 그리고 발광과 OLED소자의 전압과 같은 전기적 특성은 Spectrometer (minolta CS-1000A) 에 의하여 I-V-L분석을 했다.

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