한국기계가공학회지 (Journal of the Korean Society of Manufacturing Process Engineers)

  • 제21권4호
  • /
  • Pages.107-113
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  • 2022
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  • 1598-6721(pISSN)
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  • 2288-0771(eISSN)
한국기계가공학회 (The Korean Society of Manufacturing Process Engineers)
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임피던스 센서 제작을 위한 잉크젯 기반 패턴 IDE 적층공정 최적화 연구

A Study on Optimization of Inkjet-based IDE Pattern Process for Impedance Sensor

  • 투고 : 2022.02.09
  • 심사 : 2022.03.07
  • 발행 : 2022.04.30
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초록

At present, it is possible to manufacture electrodes down to several micrometers (~ ㎛) using inkjet printing technology owing to the development of precision ejection heads. Inkjet printing technology is also used in the manufacturing of bio-sensors, electronic sensors, and flexible displays. To reduce the difference between the electrode design/simulation performance and actual printing pattern performance, it is necessary to analyze and optimize the processable area of the ink material, which is a fluid. In this study, process optimization was conducted to manufacture an IDE pattern and fabricate an impedance sensor. A total of 25 IDE patterns were produced, with five for each lamination process. Electrode line width and height changes were measured by stacking the designed IDE pattern with a nanoparticle-based conductive ink multilayer. Furthermore, the optimal process area for securing a performance close to the design result was analyzed through impedance and capacitance. It was observed that the increase in the height of stack layer 4 was the lowest at 4.106%, and the increase in capacitance was measured to be the highest at 44.08%. The proposed stacking process pattern, which is optimized in terms of uniformity, reproducibility, and performance, can be efficiently applied to bio-applications such as biomaterial sensing with an impedance sensor.

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과제정보

본 논문은 한국생산기술연구원 기관주요사업 "2022년 청정 생산 공정기술 기반 스마트 웰니스케어 핵심기술 개발사업(4/5) (kitech EH-22-0001)"의 지원으로 수행한 연구입니다.

참고문헌

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