Microstructure and tribological properties of CrZr-Si-N films synthesized by unbalanced magnetron sputtering with Cr-Zr-Si segment target (Unbalanced magnetron sputtering과 Segment target을 활용한 CrZr-Si-N 박막의 미세구조와 마모특성)
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- Proceedings of the Korean Institute of Surface Engineering Conference
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- 2012.11a
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- pp.113-114
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- 2012