• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.1072-1075
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• 2001

$Al_2O_3$ ceramics are generally used as components in processing equipment, devices or machinery because it can perform some functions better than competing metals or polymers. Many of these applications rely on $Al_2O_3$ ceramics special electromagnetic properties, its relative chemical inertness, hardness, strength and its temperature capabilities. But $Al_2O_3$ ceramics are brittle materials, a fact that may cause problems and at the same time be helpful while machining with laser. This study described a basic study of the input parameters effect on the dimension of the microhole at the $Al_2O_3$ ceramics using Excimer laser. In the laser microhole machining of $Al_2O_3$ ceramics, major input parameters are pulse energy, pulse power, pulse frequency and pulse numbers. In conclusion, we can get a smaller microhole and diameter rate by an appropriate pulse energy, pulse frequency and pulse number.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.12
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• pp.152-158
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• 2001

In this paper, we have developed an electro discharge machine for micro drilling driven by a voice coil actuator. Because the voltage signal of the electro-discharging circuit shows a lot of peaks and valleys, the active type low-pass filtering technique is adopted to get the average of the signal. Since the motion of the voice coil is precisely controlled by the error value between the object voltage value and the measured one, it is possible to prevent the mechanical contact between the rotating electrode and the workpiece and to maintain the appropriate machining conditions during the process. The electro-chemical machining technology was also adopted to make small diameter electrodes. Pure water is used as a dielectric. The machining procedure is performed to verify the feasibility of the developed system. It takes about 10 seconds to drill the ${\phi}m$100${\mu}m$ hole to the 100${\mu}m$ thickness stainless steel plate. The machining time depends on the values of the resister and the capacitor. There may exist the optimal values of time constant and the tendency is displayed In the appendix.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.7
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• pp.139-144
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• 2008

Micro electrochemical machining was investigated to machine micro internal features. This method uses a micro disk tool electrode and can easily machine micro features inside of a micro hole, which are very difficult to make by the conventional processes. In order to limit the machining area and localize the electrochemical dissolution, ultra short pulses were used as power source and a micro disk electrode with insulating layer on its surface was used as a tool electrode. By electrochemical process, internal features, such as groove array, were fabricated on the stainless steel plate.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.12
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• pp.42-49
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• 2007

When micro holes are machined by EDM, machining characteristics of machined holes are changed according to the machining conditions. Typical machining conditions are the kind of dielectric fluids, capacitance and ultrasonic vibrations. They influence electrode wear, machining time, radial clearance and taper angle. In this paper, machined holes whose depths are 300, 500, $1000\;{\mu}m$ are observed for each machining conditions. Using deionized water as a dielectric fluid makes electrode wear small, machining time short, radial clearance large and taper angle small. High capacitance makes electrode wear high. Ultrasonic vibrations make electrode wear large, machining time short, radial clearance small and taper angle small. From the results of experiments, the optimal machining conditions were obtained to machine highly qualified micro holes.

• Journal of the Korean Society for Precision Engineering
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• v.15 no.1
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• pp.117-129
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• 1998

Micro-hole drilling (holes less than 0.5 mm in diameter with aspect ratio larger than 10) is recently having more attention in a wide spectrum of precision production industries. Alternative methods such as EDM. laser drilling, etc. can sometimes replace the mechanical micro-hole drilling but are not acceptable in PCB manufacture because of the inferior hole quality and accuracy. The major difficulties in micro-hole drilling are related to small signal to noise ratios, wandering motions of the inlet stage, high aspect ratios, high temperatures and so forth. Of all the difficulties. the most undesirable one is the increase of drilling force as the drill proceeds deeper into the hole. This is caused mainly from the chip effects. Peck-drilling is thus widely used for deep hole drilling despite that it suffers from low productivity. In the paper, a method of cutting force regulation is proposed to achieve continuous drilling. A PD and a sliding mode control algorithms were implemented through controlling the spindle rotating frequency. Experimental results show that the sliding mode control reduces the nominal cutting force and the variation of the cutting force better than the PD control. The advantages of the regulation, such as increase of drill life, fast stabilization of a wandering motion, and the precise positioning of the hole are verified in experiment.

• Proceedings of the KSME Conference
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• 2003.04a
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• pp.1052-1058
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• 2003

The possibility of micro/nano machining through electro-chemical process is discussed in this research. Electro-chemical dissolution region is localized within 1 ${\mu}m$ by applying ultra short pulses with tens of nanosecond duration. The effects of voltage, pulse duration, and pulse frequency on the localization distance are investigated. Localization distance can be manipulated by controlling the voltage and pulse duration, and various hole shapes are produced including stepped holes and taper free hole. High quality micro-hole with 8 ${\mu}m$ diameter with 20 ${\mu}m$ depth and micro-groove with 9 ${\mu}m$ width with 10 ${\mu}m$ depth are machined on 304 stainless steel.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.02a
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• pp.239-244
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• 2002

In this study, we developed the manufacturing technology of micro-hole and micro-shaft for micro punching system using micro electrical discharge machining and micro electro chemical machining. Micro punching dies of tungsten carbide with $55\;{\mu}m\;and\;110\;{\mu}m$ diameter and $250\;{\mu}m$ depth were made by micro electrical discharge machining. The form accuracy and surface roughness of die hole were pretty good and it was shown that the punched hole quality was fine. WC micro-shaft with $30\;{\mu}m$ diameter was made by the multistep micro electro chemical machining. The developed technologies can be effectively used in precision manufacturing of micro punching die and mass production of micro-shaft.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.12 no.2
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• pp.623-628
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• 2011

Micro EDM(Electric Discharge Machining) is one of the most powerful technologies which are capable of fabricating micro-structure without any problems from high cutting force. However, there is a significant defect in the part machining with deep holes or pockets, because debris which are generated by electric discharging may frequently cause a short circuit between an electrode and workpiece material. Vibration flushing can reduce the undesirable phenomena with dynamic flow of EDM fluid in a deep and choked area. In this study, Vibration flushing with solenoid is suggested and the results show that the method can generate a remarkable EDM efficiency with high amplitude at a low frequency in comparison with current vibration flushing methods with high frequency using piezo actuators.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1202-1205
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• 2005

Micro hole is one of basic elements for micro device or micro parts. By micro ECM, micro holes less than $50\mu{m}$ in diameter can be machined easily. Machining characteristics of micro ECM were investigated according to machining conditions such as electrolyte concentration and pulse conditions. From the investigation, optimal machining conditions were suggested for micro ECM of stainless steel. For the micro machining with high resolution, the change of machining gap should be predicted. By using electrochemical principle equations, the change of machining gap was simulated.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.14 no.3
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• pp.105-111
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• 2015

Ultrasonic machining (USM) does not involve heating or any electrochemical effects, and subsequently causes low surface damage, has small residual stress, and does not rely on the conductivity of the workpiece. These characteristics are suitable for the machining of brittle materials, such as glass or ceramics. However, USM for brittle materials generates cracks on the workpiece while machining, especially at the hole exit with a small diameter. In this study, wax coating was used to deposit wax on the back side of the workpiece to decrease the occurrence of cracks at the exit holes in USM, and it was finally removed with a cleaning process. The experimental results show that this technique is beneficial for restricting the occurrence of cracks in glass or ceramics.