• Title/Summary/Keyword: 물리세정

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RF magnetron Sputtering법에 의해 Plasma Etching된 Glass에 증착한 다양한 친수 박막의 특성

  • Lee, Dong-Uk;Baek, Cheol-Heum;Kim, Dong-Yeong;Yang, Jeong-Min;Kim, Hwa-Min;Lee, Jong-Yeong
    • Proceedings of the Korean Vacuum Society Conference
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    • 2012.02a
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    • pp.133-133
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    • 2012
  • 일반적으로 TiO2는 광촉매 작용으로 표면 살균성을 가지며, 친수특성으로 인한 자가세정 능력도 가지고 있다. 또한 지구상에 많이 존재하는 광물로 원료의 가격이 저렴하다는 장점이 있어 산업 전반에 사용되고 있다. 하지만 외부의 환경적 오염으로 인한 광촉매 반응 면적의 감소에 따라 반응효율이 저하되는 단점이 있으며, SiO2는 투명한 유리와 같이 비정질상태가 안정하고 높은 굴절률을 가지며 내구성이 외부환경에 강해 무반사 코팅이나 금속박막의 보호층으로 주로 사용된다. WO3는 높은 굴절률과 가시광선 영역에서의 우수한 투과율을 가지고 있으나 conduction band에서 생성된 광캐리어들이 빠르게 재결합 하여 광분해 효율이 좋지 않기 때문에 흔히 쓰이지 않고 있다. 이러한 박막들의 단점을 보완하기 위해 물리적 구조를 변화시켜 반응 면적을 극대화하기 위해 버퍼층이나 다층박막을 사용하는 등 다양한 연구가 진행되고 있다. 본 실험에서는 Slide glass에 Plasma etching 하였을때 친수성이 나타나는 특성을 이용하여 대면적 코팅과 표면 경도를 우수하게 만들 수 있는 RF Magnetron sputtering법으로 Slide glass에 Ar Gas 분위기에서 각 파워별 Plasma etching한 후 TiO2, SiO2, WO3 박막을 증착하여 광학적, 구조적 특성을 분석하였다. 광투과율 측정장치(UV-VIS Spectrophotometer)를 사용하여 투과율을 측정한 결과 모든 박막이 가시광 영역에서 80% 이상의 높은 투과율을 나타내었으며, 접촉각 측정결과 100w로 etching한 glass에 TiO2를 증착한 박막에서 가장 낮은 $3^{\circ}$ 이하의 접촉각을 나타내었다. SEM (Scanning Electron Microscope) 분석을 통해 표면구조를 관찰한 결과 100w로 etching한 후 TiO2를 증착한 박막이 가장 조밀한 구조를 보였으며, AFM (Atomic Force MicroScope) 분석 결과 100w로 etching한 후 TiO2를 증착한 박막의 표면이 가장 거칠어지는 것을 볼 수 있었는데, 이는 물과 닿는 박막의 유효 표면적의 증가로 인하여 광촉매 효과가 증가하였기 때문에 친수성이 향상된 것으로 사료된다. 이러한 박막은 건물 유리벽과 자동차의 내 외장재 전자기기용 광학 필름에 자가세정, 내반사 코팅소재, 디스플레이 표시장치로 활용할 수 있을 것으로 예상된다. 본 연구는 중소기업청에서 지원하는 2011년도 산학연 공동기술개발 지원사업의 연구수행으로 인한 결과물임을 밝힙니다.

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A study on the intake of foods causing dental caries and the effect of nutrition education for primary students (초등학교 아동의 치아우식성 식품섭취 및 영양교육 효과에 관한 연구)

  • 김혜영;원복연;류시현
    • Korean journal of food and cookery science
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    • v.18 no.6
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    • pp.704-715
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    • 2002
  • This study intended to compare dietary and snack habits of primary students in the schools providing and non-providing lunch to clarify the correlation between those conditions and the occurrence of dental caries. Furthermore, this study also focused on evaluating educational effects by providing children with nutritional education program. 1. As a result of dietary habit analysis, it was found that children from the school providing lunch were better in terms of breakfast regularity, eating speed. optimum amount of intake, and meal time regularity than those from the school non-providing lunch. In particular, it was noted that children from the school providing lunch took a little more meat, fish, seaweed and milk or dairy products than those from school non-providing lunch. Thus, it could be assumed hat children provided with lunch have more reasonable dietary habit than those without lunch program. In general, it was found that there was a slight positive change in children's dietary habit after nutritional instruction than before, suggesting that the nutritional education had effects on improving their dietary habit. 2. It was found that primary students often took snacks causing dental caries such as caramel, chocolate, sweets and biscuits, and children from the school providing lunch were more willing to reduce those snacks upon recognizing the causes of dental caries than those from the school non-providing lunch. For the children who chewed gum with physical cleansing effects, it was shown that the highest frequency wat twice or three times a week. Moreover, the ratio of children who took snacks following dinner which might affect their dental caries and the ratio of children who selected snacks because of TV commercial were both reduced after nutritional education. Also the consumption of detergent foods like vegetable, fruit, protein. seaweed. milk or dietary products after nutritional education was increased. 3. It was found that children from the school providing lunch took more often all food groups except for food group IV affecting dental caries than those from the school non-providing lunch. The average number of consuming foods which cause dental caries was 5.04 times per person a day, and most of those were rather taken by liquid than solid food. The average eating times of rinsing foods which kill the bacteria on the surface of teeth and prevent from dental caries, was 9.33 for a person a day, which was a little higher than recommended time. Exposed time for dental caries for a person a day was 100.9 min, of which liquid dental caries was 56.2 min and solid dental caries was 44.6 min, suggesting that liquid food had a high potential to cause dental caries.

The Congestion Control using Selective Slope Control under Multiple Time Scale of TCP (TCP의 다중 시간 간격에서 선택적 기울기 제어를 이용한 혼잡 제어)

  • Kim, Gwang-Jun;Kang, Ki-Woong;Lim, Se-Jung
    • The Journal of the Korea institute of electronic communication sciences
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    • v.2 no.1
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    • pp.10-18
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    • 2007
  • In this paper, we extend the multiple time scale control framework to window-based congestion control, in particular, TCP. This is performed by interfacing TCP with a large time scale control module which adjusts the aggressiveness of bandwidth consumption behavior exhibited by TCP as a function of "large time scale" network state. i.e., conformation that exceeds the horizon of the feedback loop as determined by RTT. Performance evaluation of multiple time scale TCP is facilitated by a simulation bench-mark environment which is based on physical modeling of self-similar traffic. If source traffic is not extended exceeding, when RTT is 450ms, in self similar burst environment, performance gain of TCP-SSC is up to 45% for ${\alpha}$=1.05. However, its is acquired only 20% performance gain for ${\alpha}$=1.95 relatively. Therefore we showed that by TCP-MTS at large time scale into a rate-based feedback congestion control, we are able to improve two times performance significantly.

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Comparison of Cleansing Regimes for Efficacy and Comfort of Iontophoretic Transdermal Lidocaine Delivery (세정방법에 따른 국소마취제 이온도입의 효율과 편안감 비교)

  • Jeong, Myung-A;Song, In-Yong;Lee, Jae-Hyoung
    • The Journal of Korean Physical Therapy
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    • v.18 no.4
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    • pp.41-50
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    • 2006
  • Purpose: The purpose of this study was to determined that the efficacy and comfort of iontophoretic transdermal delivery of lidocaine by comparison of local anesthetic duration, sensory threshold, pain threshold and pain tolerance levels according to four different cleansing regimes. Methods: Forty healthy volunteers were randomly assigned to four groups; oil cleansing group, lotion cleansing group, solution cleansing group and alcohol cleansing group. All subjects were received lidocaine iontophoresis on the forearm using direct current with 4 mA for 10 minutes. All subjects were measured the duration of local anesthesia after lidocaine iontophoresis, also evaluated the sensory threshold, pain threshold and pain tolerance level during iontophoresis. For comparisons of the efficacy and the sensory characteristics of iontophoresis within the groups, an one-way ANOVA was used. Results: The duration of local anesthesia were found significant difference between groups (p<0.001). The anesthetic duration in solution and alcohol cleansing groups were significantly longer than oil and lotion cleansing group by post hoc (p<0.05). Statistically significant difference were noted in respect to all sensory characteristics such as sensory threshold, pain threshold and pain tolerance between groups (p<0.001). The sensory threshold in solution and alcohol cleansing group were significantly lower than oil and lotion cleansing group by post hoc using Duncan multiple range test (p<0.05). The pain threshold and pain tolerance in solution and alcohol cleansing group were significantly higher than oil and lotion cleansing group by post hoc (p<0.05). Conclusion: These results demonstrated that cleansing regimes have affected the efficacy and discomfort of iontophoretic transdermal delivery of lidocaine. These findings indicate that cleansing agents without oil ingredient contributed to more comfort, and more successful achievement of the iontophoretic transdermal delivery.

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Clinical Effect of Arthrocentesis for Patients with Disc Displacement without Reduction of Temporomandibular Joint : Report of Cases (측두하악관절의 비정복성 관절원판변위 환자에 대한 관절강 세정술의 임상효과 : 증례보고)

  • Kim, Cheul;Kim, Young-Jun
    • Journal of Oral Medicine and Pain
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    • v.31 no.2
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    • pp.177-183
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    • 2006
  • The management of refractory pain and limitation of mouth opening in the temporomandibular joint (TMJ) is both challenging and controversial. Arthrocentesis is a simple technique and it can be used instead of more invasive surgical procedures for patients who failed to conventional conservative treatments. The patients in this case report had complained persistent severe pain and restricted mandibular movement of TMJ, although they had been treated with conservative therapy, e.g., stabilization splint therapy, behavioral therapy, physical therapy, pharmacological therapy. Therefore we employed arthrocentesis for these patients, and they showed significant reduction of pain and improvement of mandibular movement after repetitive arthrocentesis. We recommend arthrocentesis as an effective, minimally invasive technique for patients with continuing severe pain and restricted mobility in the TMJ that is unresponsive to conservative management.

증착조건에 따른 $ZrO_2$ 게이트 유전막의 특성

  • 유정호;남석우;고대홍
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.106-106
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    • 2000
  • 반도체 소자가 미세화 됨에 따라 게이트 유전막으로 사용되는 SiO2의 박막화가 요구되나, boron penetration에 의한 Vt shift, 게이트 누설전류, 다결정 실리콘 게이트의 depletion effect 그리고 quantum mechanical effect 때문에 ~20 급에서 한계를 나타내고 있다. 이에 0.1$\mu\textrm{m}$이상의 design rule을 갖는 logic이나 memory 소자에서 요구되어지는 ~10 급 게이트 산화막은 SiO2(K=3.9)를 대신하여 고유전율을 갖는 재료의 채택이 필수 불가결하게 되었다. 고유전 박막 재료를 사용하면, 두께를 두껍게 해도 동일한 inversion 특성이 유지되고 carrier tunneling 이 덜하여 등가 산화막의 두께를 줄일 수 있다. 이러한 고유전박막 재료중 가장 활발히 연구되고 있는 재료는 Ta2O5, Al2O3, STO 그리고 BST 등이 있으나 Ta2O5, STO, BST 등은 실리콘 기판과 직접 반응을 한다는 문제를 가지고 있으며, Al2O3는 유전율이 낮의 재료가 최근 주목받고 있다. 본 실험에서는 ZrO2, HfO2 또는 그 silicates 등의 재료가 최근 주목 받고 있다. 본 실험에서는 ZrO2 박막의 증착조건에 따른 물리적, 전기적 특성 변화에 대하여 연구하였다. RCA 방식으로 세정한 P-type (100) 실리콘 기판위에 reactive DC sputtering 방법으로 압력 5mtorr, power 100~400W, 기판온도는 100-50$0^{\circ}C$로 변화시켜 ZrO2 박막을 증착한 후 산소와 아르곤 분위기에서 400-80$0^{\circ}C$, 10-120min으로 열처리하였다. 증착직후의 시편들과 열처리한 ZrO2 박막의 미세구조와 전기적 특성 변화를 관찰하였다. 우선 굴절율(RI)를 이용해 ZrO2 박막의 밀도를 예측하여 power와 기판온도에 따라 이론값 2.0-2.2 에 근접한 구조를 얻은 후 XRD, XPS, AFM, 그리고 TEM을 사용하여 ZrO2 박막의 chemical bonding, surface roughness 그리고 interfacial layer의 특성을 관찰하였다. 그리고 C-V, I-V measurement를 이용해 capacitance, 유전율, 누설전류 등의 전기적 특성을 관찰해 최적 조건을 설정하였다.

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Ceramic Membrane Application for the Bayer Process of Aluminium hydroxide Production (수산화알루미늄 제조 Bayer 공정에서 Ceramic membrane 여과 실용화 공정 개발)

  • 김정학;이성오;구자경;남승하;이시철
    • Proceedings of the Membrane Society of Korea Conference
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    • 2003.11a
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    • pp.146-148
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    • 2003
  • Bayer 공정은 가성소다를 이용하여 보오크사이트로부터 수산화알루미늄을 추출하는 공정이다. 그러나 보오크사이트 추출 후 1차 침전공정에서 반응한 보오크사이트 잔사는 침전시킴으로써 깨끗한 공정액을 분리하는 데 이때 침전되지 못한 다량의 분산성 고형물이 공정액 중에 존재하게 되는데 이를 분산성 보오크사이트(레드머드) 미립자라하며 보통 80-100mg/$\ell$의 농도를 나타낸다. 그러므로 이를 제거하기 위해 다음 공정인 입상여과필터 공정을 사용하는데 이때 필터링 효율증대를 위해 보조제로써 다량의 소석회(Ca(OH)$_2$)를 투여하여 공정액 중의 고형물을 농도를 8-100mg/$\ell$에서 5mg/$\ell$로 낮추는 공정을 사용하고 있다. 특히 국내 수산화알루미능 제조회사일 KC(주)의 경우 소석회 사용량이 일 10톤, 년간 약 3,600톤을 사용함으로써 소석회의 사용량에 따라 같은 량의 슬러지가 발생되게 된다. 따라서 여과후 발생되는 슬러지의 처리비용 문제(연간 9천만원)와 소석회의 미립자에 의한 공정액의 2차 오염과 제품 품질 저하(quality claim) 및 소석회 사용량에 따른 연간 원료비(연간 3억원) 등의 상당한 문제점을 나타내고 있는 실정이다. 아울러 최근 고품위 수산화알루미늄의 공급 요구에 따라 여과시 정제기준이 점차 낮아져 이제는 1mg/$\ell$ 이하를 유지하여야 하는 근본적인 문제에 봉착해있는 실정이다. 그러므로 본 연구에서는 소석회를 사용하는 입상여과법을 대체하기 위한 신공정개발을 추진하였으며, 그동안 카트리지여과법 등의 다양한 실험 결과로부터 최근 필터 보조제를 첨가하지 않는 물리적 여과방법인 세라믹 막 여과법의 적용 가능성을 확인하고 친환경공정인 세라믹 막 여과 실용화 공정 기술을 개발하였다. 세라믹 막 여과 법은 여과 보조제를 사용하지 않으므로 2차적인 슬러지 발생등의 환경문제를 발생하지 않으며, 공정액에 첨가제를 투입하지 않으므로 순환형 친환경공정으로 각광받을 수 있다. 본 연구에서는 고온, 고농도의 NaOH 수용액의 처리에 적합한 막소재와 발생될 수 있는 제반 문제점 등을 파악하였고, 장기간의 실험을 거쳐 최적 투과 압력(Trans membrane pressue), 세정 조건 및 주기, 막재질에 있어서 보강하여야 할 Point, 최적 운전 조건들을 토출해 내었고, 향후 실제 Plant에 적용할 계획이다.

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Stripping of High-Dose Ion-Implanted Photoresist Using Co-solvent and Ultra-sonication in Supercritical Carbon Dioxide (초임계이산화탄소 내에서 공용매 및 초음파를 이용한 고농도이온주입 포토레지스트의 제거)

  • Kim, Seung-Ho;Lim, Kwon-Taek
    • Clean Technology
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    • v.15 no.2
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    • pp.69-74
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    • 2009
  • A high-dose ion-implanted photoresist (HDIPR) was stripped off from the surface of a semiconductor wafer by using a mixture of supercritical carbon dioxide and a co-solvent. The additional ultrasonication improved the stripping efficiency remarkably and thus reduced the stripping time by supplying physical force to the substrate. We investigated the effect of co-solvents, co-solvent concentration, and stripping temperature and pressure on the stripping efficiency. The wafer surfaces before and after stripping were analyzed by scanning electron microscopy and by an energy dispersive X-ray spectrometer. The HDIPR could be stripped off completely in 3 min with 10%(w/w) acetone/sc$C0_2$ mixture at 27.6 MPa and 343 K.

Contaminant Mechanism and Management of Tracksite of Pterosaurs, Birds, and Dinosaurs in Chungmugong-dong, Jinju, Korea (천연기념물 진주 충무공동 익룡·새·공룡발자국 화석산지의 오염물 형성 메커니즘과 관리방안)

  • Myoungju Choie;Sangho Won;Tea Jong Lee;Seong-Joo Lee;Dal-Yong Kong;Myeong Seong Lee
    • Economic and Environmental Geology
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    • v.56 no.6
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    • pp.715-728
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    • 2023
  • Tracksite of pterosaurs, birds, and dinosaurs in Chungmugong-dong in Jinju was designated as a natural monument in 2011 and is known as the world's largest in terms of the number and density of pterosaur footprints. This site has been managed by installing protection buildings to conserve in 2018. About 17% of the footprints of pterosaur, theropod, and ornithopod in this site under management in the 2nd protection building are of great academic value, but observation of footprints has difficulties due to continuous physical and chemical damage. In particular, the accumulation of milk-white contaminants is formed by the gypsum and air pollutant complex. Gypsum remains evaporated with a plate or columnar shape in the process of water circulation around the 2nd protection building, and the dust is from through the inflow of the gallery windows. The aqueous solution of gypsum, consisting of calcium from the lower bed and sulfur from grass growth, is catchmented into the groundwater from the area behind the protection building. Pollen and a few minerals other constituents of contaminants, go through the gallery window, which makes it difficult to expel dust. To conserve the fossil-bearing beds from two contaminants of different origins, controlling the water and atmospheric circulation of the 2nd protection building and removing the contaminants continuously is necessary. When cleaning contaminants, the steam cleaning method is sufficiently effective for powder-shaped milk-white contaminants. The fossil-bearing bed consists of dark gray shale with high laser absorption power; the laser cleaning method accompanies physical loss to fossils and sedimentary structures; therefore, avoiding it as much as possible is desirable.

Catalytic Oxidation of Aromatic Compounds over Spent Ni-Mo and Spent Co-Mo based Catalysts: Effect of Physico-chemical Pretreatments (폐 Ni-Mo 및 폐 Co-Mo계 촉매상에서 방향족 화합물의 촉매산화: 물리화학적 전처리 효과)

  • Shim, Wang Geun;Kang, Ung Il;Kim, Chai
    • Applied Chemistry for Engineering
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    • v.21 no.1
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    • pp.63-70
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    • 2010
  • Transition metal based spent catalysts (Ni-Mo and Co-Mo), which were scrapped from the petrochemical industry, were reused for the removal processes of volatile organic compounds (VOCs). Especially the optimum regeneration procedures were determined using the removal efficiency of VOCs. In this work, the spent Ni-Mo and spent Co-Mo catalysts were pretreated with different physic-chemical treatment procedure: 1) acid aqueous solution, 2) alkali solution, 3) chemical agent and 4) steam. The various characterization methods of spent and its regenerated catalysts were performed using nitrogen adsorption, X-ray diffraction (XRD) and scanning electron microscopy (SEM) equipped with an energy dispersive spectrometry (EDS). It was found that all spent catalysts were found to be potentially applicable catalysts for catalytic oxidation of benzene. The experimental results also indicated that among the employed physico-chemical pretreatment methods, the oxalic acid aqueous (0.1 N, $C_2H_2O_4$) pretreatment appeared to be the most efficient in increasing the catalytic activity, although the catalytic activity of spent Ni-Mo and spent Co-Mo catalysts in the oxidation of benzene were greatly dependent on the pretreatment conditions. The pretreated spent catalysts at optimum condition could be also applied for removing other aromatic compounds (Toluene/Xylene).