• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.37-37
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• 2013

무전해도금법 (electroless plating)은 Brenner와 Riddell이 1946년에 처음으로 환원제를 이용한 금속의 침적을 electroless plating이라고 명명한 뒤 전기를 이용하지 않고 금속막을 얻을 수 있는 방법으로 인지되어왔다. 초기에는 용액이 불안정하였으나 용액의 안정성을 향상시키면서 꾸준히 산업체에 쓰여왔다. 무전해도금의 응용이 처음에는 니켈에 국한되었으나 구리의 무전해도금이 PCB에 사용되면서 80년대부터 전자산업에서 많이 쓰이게 되었다. 최근에는 무전해도금을 이용한 전자산업뿐만 아니라 MEMS와 같이 전기도금을 위한 전기접촉이 어려우면서 정밀한 균일도를 요구하는 분야에도 많이 쓰이고 있다. 본 발표에서는 무전해도금법의 일반적인 원리와 이를 이용한 IT 산업에서의 응용에 대하여 알아본다.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2001.07a
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• pp.100-103
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• 2001

In this study, the adhesion and thermal property of the electroless-deposited Cu thin film were investigated. The multilayered structure of Cu/TaN/Si was fabricated by electroless-depositing the Cu thin layer on the TaN diffusion barrier which was deposited by MOCVD on the Si substrate. The thermal stability was investigated by measuring the resistivity as post-annealing temperature far the multilayered Cu/TaN/Si specimen which was annealed at Ar gas. The adhesion property of Cu 171ms was evaluated by the scratch test. The adhesion of the electroless-deposited Cu film was compared with other deposition methods of thermal evaporation and sputtering. The scratch test showed that the adhesion of electroless plated Cu film on TaN was better than those of sputtered Cu film and evaporated Cu film.

• Journal of the Microelectronics and Packaging Society
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• v.6 no.1
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• pp.31-37
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• 1999

In this study, the thermal property and adhesion of the electroless-deposited Cu thin film were investigated. The multilayered structure of Cu /TaN /Si was fabricated by electroless-depositing the Cu thin layer on the TaN diffusion barrier which was deposited by MOCVD on the Si substrate. The thermal stability was investigated by measuring the resistivity as post-annealing temperature for the multilayered Cu /TaN /Si specimen which was annealed at atmospheres of $H_2$and Ar gases, respectively. The adhesion strength of Cu films was evaluated by the scratch test. The adhesion of the electroless-deposited Cu film was compared with other deposition methods of thermal evaporation and sputtering. The scratch test showed that the adhesion of electroless plated Cu film on TaN was better than that of sputtered Cu film and evaporated Cu film.

• Korean Chemical Engineering Research
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• v.45 no.6
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• pp.633-637
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• 2007

Electroless plating of Co-alloy thin films as capping layers for Cu interconnection has been investigated using alkali-free precursors such as $(NH_4)_2Co(SO_4)_2{\cdot}6H_2O$, $(NH_4)_2WO_4$, $(NH_4)H_2PO_4$, etc. The characteristics of the Co-alloy thin films were discussed by analyses of the effects of pH, Co-precursor concentration, and deposition temperature on the thickness and surface morphology of the films. The thickness of the Co-alloy thin films increased with increasing pH, Co-precursor concentration, and deposition temperature, similarly to the results of electroless plating of Co-alloy thin films using alkali-containing chemicals. The SEM images of the surface of the Co-alloy thin films showed that the proper ranges of pH and deposition temperature were 8.5~9.5 and $75{\sim}85^{\circ}C$, respectively. This work found a feasibility that Co-alloy thin films as capping layers for Cu interconnection could be electroless plated using alkali-free chemicals.

• Clean Technology
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• v.20 no.2
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• pp.136-140
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• 2014

The quaternary alloy (Co/Ni/P/Mn) coatings were prepared using electroless plating on the polypropylene. Compositions of the quaternary alloys (Co/Ni/P/Mn) were controlled by the amount of agents. The composition by EDS, morphology with SEM, film thickness, and surface electrical resistance of the samples were measured. Higher phosphorous content samples give larger electric resistance, thus a relationship is admitted between P content and electric resistance. The corrosivity of the coatings were evaluated by electrochemical methods in the 3.5 wt% NaCl and 5.0 wt% $H_2SO_4$ solutions, respectively. It was concluded that phosphorous addition enhances resistivity in the corrosion.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.128-128
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• 2017

무전해 도금이란 외부의 전원을 사용하지 않고 환원제를 이용하여 금속 피막을 석출시키는 방법이다. 이러한 무전해 도금은 최근에 와서 인쇄회로기판(printed circuit board)등 다양한 전자부품에 적용되고 있다. 최근 급격한 금 가격 상승으로 인해 전자부품용에 사용되는 금의 사용량을 감소시키거나 또는 금을 대체할 수 있는 도금 층에 관한 연구가 활발하게 진행되고 있다. 금을 대체할 수 있는 즉 비용 경감의 가능성이 있는 도금 재료로는 팔라듐이 유력하다. 팔라듐은 금의 약 1/2가격으로 우수한 내식성 및 낮은 접촉저항을 가지기 때문에 접점재료로서 오래전부터 사용되어져왔다. 무전해 팔라듐-인 도금의 착화제, 환원제, 경도, 접촉저항에 대한 연구는 많이 있지만 도금속도에 미치는 인자에 대해서는 명확하지 않은 것이 많다. 따라서 본 연구는 무전해 팔라듐-인 도금의 석출석도에 미치는 에틸렌디아민 농도의 영향에 대하여 조사하였다. 실험방법으로는 환원제로 차아인산을 사용하고 착화제로는 에틸렌디아민을 사용하여 문전해 팔라듐-인 도금액을 제조하였다. 에틸렌디아민의 농도는 각각 5ml/L, 7.5ml/L, 10ml/L, 12ml/L로 하였다. pH는 7.5, 온도는 $45^{\circ}C$로 하여 30분 동안 도금을 실시하였다. 무전해 팔라듐-인 도금속도는 정밀저울로 무게를 측정하였고 ICP-OES을 사용하여 도금층의 농도를 분석, XRF를 사용하여 성분분석과 XRD를 사용해 결정회절을 분석하였다. 또한 SEM을 사용하여 단면 관찰을 하였으며 석출속도에 미치는 에틸렌디아민의 영향을 전기화학 분극곡선을 통해서 고찰을 시도해 보았다.

• The korean journal of orthodontics
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• v.36 no.2 s.115
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• pp.145-152
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• 2006

The purpose of this study was to evaluate electroless plating as a method of increasing the diameter of an orthodontic wire in comparison with eletroplating. After pretreatment plating of the 0.016 inch stainless steel orthodontic wire, electroless plating was performed at $90^{\circ}C$ until the diameter of the wire was increased to 0.018 inch. During the process of electroless plating, the diameter of the wire was measured every 5 minutes to examine the increasing ratio of the wire's diameter per time unit. And to examine the uniformity, the diameter at 3 points on the electroless-plated orthodontic wire was measured. An X-ray diffraction test for analyzing the nature of the plated metal and a 3-point bending test for analyzing the physical property were performed. The electroless-plated wire group showed a increased tendency for stiffness, yield strength, and ultimate strength than the electroplated wire group. And there was a statistically significant difference between the two groups for stiffness and ultimate strength. In the electroless-plated wire group, the increasing ratio of the diameter was $0.00461{\pm}0.00003mm/5min$ (0.00092 mm/min). In the electroplated wire group, it was $0.00821{\pm}0.00015mm/min$. The results of the uniformity test showed a tendency for uniformity in both the plating methods. The results of this study suggest that electroless plating of the wire is closer to the ready-made wire than electroplating wire in terms of the physical property. However, the length of plating time needs further consideration for the clinical application of electroless plating.

• Proceedings of the Materials Research Society of Korea Conference
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• 1998.11a
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• pp.80-80
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• 1998

• Korean Journal of Materials Research
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• v.6 no.10
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• pp.1007-1016
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• 1996

무전해도금법에 의한 퍼멀로이 박막의 도금 최적조건 규명 및 자기적 특성 향상을 위하여 퍼멀로이 박막의 미세구조 및 자기적 특성 등을 연구하였다. 소지는 알루미나를 사용하였으며, 환원제는 boron을 포함하는 Ni-Fe-B도금막이 형성되는 DMAB(dimethylamine borane)를 사용하였다. 도금시 인가된 도금막이 무자장하에서 도금된 도금막과 비교하여 기공이 적고, 조밀한 막이 형성됨을 SEM을 통하여 확인하였다. 도금속도는 온도, pH, DMAB 농도가 증가할수록 증가하였다. 도금막에 함유되는 boron의 함량은 pH가 감소할수록, 온도와 DMAB농도가 증가할수록 증가하였다. 도금막 보자력값은 30$0^{\circ}C$에서 1시간 열처리하였을 때 약 4.5Oe로 감소하였고, 포화자기유도값은 3-5kG 정도 증가하였다. 이때 포화자기유도값은 자장하에서 도금된 후 열처리한 도금막이 무자장하에서 도금된 후 열처리한 도금막에 비하여 1.7kG 정도 높았다. 또한 열처리 후의 도금막이 열처리 전의 도금막에 비하여 기공이 적고 조밀한 도금막을 형성함을 볼 수 있었다.

• Korean Chemical Engineering Research
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• v.45 no.4
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• pp.384-390
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• 2007

In this study, electroless plating of copper was performed on PET film by using the blend of supercritical $CO_2$ and plating solution. The optimum volumetric ratio of supercritical fluid and plating solution was found to be 1:9 and dispersion property was poor at $CO_2$ vol% langer than 10%. Electroless plating of copper was best at $25^{\circ}C$ and 15 MPa. Role of added supercritical $CO_2$ is not to increase solubility but to disperse and maintain Cu-particles as the 1st particles.