$NO_2$ Gas Sensor Utilizing Pt-$WO_3-Si_3N_4-SiO_2$ -Si-Al Capacitor
(Pt-$WO_3-Si_3N_4-SiO_2$ -Si-Al 캐패시터를 이용한 $NO_2$ 가스 센서)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 1998.11a
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- pp.105-108
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- 1998