• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.19 no.1
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• pp.61-70
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• 2008

This paper presents the flexible MEMS transmitter based on flexible printed circuit board or FPCB, which can be transformed to arbitrary shape. The FPCB is suitable to fabricate light weight and small size modules with the help of its thin thickness. Moreover a module based on FPCB can be attached on the arbitrary curved surface due to its flexible enough to be lolled up like paper. In this paper, the flexible MEMS transmitter integrated on FPCB for a short-distance sensor network which is based on orthogonal frequency division multiplexing(OFDM) communication system is proposed. The active device of the proposed flexible MEMS transmitter is fabricated on InGaP/GaAs HBT process which has been used for power amplifier design to take advantages of high linear and high efficient characteristics. Moreover, the passive devices such as the filter and signal lines are integrated and fabricated on the FPCB board. The performance of the fabricated flexible MEMS transmitter is analyzed with EVM characteristics of the output signal.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.32 no.7
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• pp.542-548
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• 2008

A thermal mass air flow sensor (MAFS), which consists of a micro-heater and thermo-resistive sensors on the silicon-nitride ($Si_3N_4$) thin membrane structure, is micro-fabricated by MEMS processes. Two thermo-resistive temperature sensors are located at $100{\mu}m$ upstream and downstream from the micro-heater respectively. The thermal characteristics are measured to find the best measurement indicator. The micro-heater is operated under constant power condition, and four flow indicators are investigated. The normalized temperature indicator shows good physical meaning and is easy to use in practice. It is found that the configurations and heating power of thermal-resistive elements are the dominant factors to determine the range of the flow measurement in the MAFS with higher sensitivity and accuracy.

• Electronics and Telecommunications Trends
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• v.30 no.6
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• pp.21-30
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• 2015

압력센서란 두 물체 간의 상호 작용하는 힘의 크기를 나타내는 물리적 양을 측정하는 디바이스로서 힘의 전달 크기, 힘의 방향 등을 측정하는 데 매우 광범위하게 사용되고 있는 센서이다. 사용하는 분야는 의료, 자동차, 항공, 공업계측, 가전, 환경제어분야 등의 전반적 산업제품과 산업시설에 응용되고 있으며, 측정원리는 힘의 변화에 따른 재료의 변위, 변형, 진동수, 변화, 열전도율 변화 등을 이용하는 것으로 종전의 기계식 감지방법에서 현재는 센서장치의 소형화를 위하여 반도체소자 제작기술과 Micro Electro Mechanical System(MEMS)기술을 이용하는 초소형, 저전력형 센서개발로 계속 발전하고 있다. 본고에서 멤스(MEMS) 압력센서의 최근 제품 기술 개발과 시장 및 산업동향을 알아보고 향후 더욱더 확장될 압력센서제품 기술의 기초 정보를 제공하고자 한다.

• Journal of Sensor Science and Technology
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• v.15 no.5
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• pp.357-361
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• 2006

This paper reports a new technology to implement complex PDMS microchannels, which are simply constructed using three-dimensional photoresist structures as mold for PDMS replica process. The process utilizes LOR resist as a sacrificial layer to levitate the structural photoresist and multi-step exposure to control the thicknesses of photoresist structures. Various shapes of photoresist structures were successfully fabricated. Using the PDMS replica method, the three-dimensional photoresist structures are demonstrated to be applicable for implementing complex microchannels in PDMS. In addition, more complex multilevel microchannels are constructed by bonding two PDMS layers with just single PDMS alignment.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1932-1934
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• 2003

본 논문은 신경전달물질 중 우울증, 신부전증의 지표 물질인 세로토닌의 농도를 극미량의 시료를 사용하여 정량할 수 있는 방법을 개발하기 위해 초소형 효소 고정화 전극을 개발하였다. 전극은 실리콘 웨이퍼 상에 반도체 공정을 이용하여 마이크로 크기의 Pt 박막 전극을 제작하였고, 전기화학적 방법으로 pyrrole 단량체를 Pt 전극 상에 순환전압전류법을 이용하여 산화적으로 전기 중합하였다. 효소의 고정은 일정 전압을 인가한 시간대 전류법으로 고정화하였다. 제작된 전극은 시간대 전류법으로 세로토닌의 농도에 따른 감도를 측정하였다. 세로토닌의 농도 범위 $1.0{\mu}mol/L{\sim}10mmol/L$에서의 감도는 $7.0{\mu}$A/decade를 나타내었으며, 실험결과에 따라 전극의 표면에서 발생하는 전류는 세로토닌의 농도에 비례함을 알 수 있었다. 전극의 표면분석은 Scanning Electron Microscopy(SEM), Energy Dispersive X-ray Spectroscopy(EDX) 그리고 Auger Electron Spectroscopy(AES)를 이용하여 분석하였다.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.986-992
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• 2007

This paper presents the fabrication and characterization of carbon films pyrolyzed with various photoresists for bioMEMS applications. To verify the usefulness of pyrolyzed carbon films as an electrode material in an electrochemical biosensor developed by the authors, interactions between avidin and biotin on the pyrolyzed carbon film were studied via electrochemical impedance spectroscopy based on electrostatic interactions between avidin and negatively-charged ferricyanide. The pyrolyzed carbon films were characterized using a surface profiler, a precision semiconductor parameter analyzer, a nanoindentor, scanning electron microscopy, and atomic force microscopy. Amine conjugated biotin was immobilized on the electrode using EDC/NHS as crosslinkers after $O_2$ plasma treatment to enhance functional groups on the carbon electrode pyrolyzed at $1000^{\circ}C$ with AZ9260. The detection of avidin binding with different concentrations in a range of 0.75 nM to $7.5\;{\mu}M$ to the pyrolyzed carbon electrode modified with biotin was carried out by measuring the electrochemical impedance change. The results show that avidin binds to the biotin on the electrode not by non-specific interaction but by specific interaction, and that EIS successfully detects this binding event. Pyrolyzed carbon films are a promising material for miniaturization, integration, and low-cost fabrication in electrochemical biosensors.