• Journal of the Semiconductor & Display Technology
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• v.17 no.1
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• pp.66-70
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• 2018

This paper is about the analysis on the vibration characteristic of tooling units on the precision bed in turning and hobbing automatic lathe for precision machining. An automatic lathe operating at about 12,000 RPM is a critical factor in the self-weight stress and deformation of the bed. Especially, the resonance frequency should be grasped in advance to prevent abnormal vibration that may occur during processing. If the wrong bed is used, the resonant frequency can have a fatal influence on the precision machining and increase the defective rate of precision machined parts such as semiconductor parts. In this paper, vibration characteristics were evaluated through static load and resonance frequency analysis of automatic lathe bed. As a result, the maximum stress was 14.52 MPa, the maximum deformation amount was $12.15{\mu}m$, and the natural frequency was 189.43 Hz. The resonance frequency was calculated as 500 Hz, and the stability was confirmed by being in the range of 200 Hz or more, which is the processing condition.

• Journal of the Semiconductor & Display Technology
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• v.20 no.1
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• pp.25-31
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• 2021

The semiconductor and display equipment demands an ultra-fine precision of several nm to several ㎛, and the scale is getting smaller due to the explosive development. The manufacturing process equipment for such products with ultra-fine precision is very sensitive to ultra-small vibrations flowing from the floor, resulting in problems of production defects and yield degradation. The vibration criteria are a standard that regulates the vibration environment of the floor where such precision process equipment will be installed. The BBN vibration criteria defined the allowable vibration velocity level in the frequency domain with a flat and inclined line and presented a rating according to it. However, the actual vibration criteria have appeared with various magnitudes in the frequency domain according to the dynamic characteristics of individual equipment. In this study, the relationship between the relative motion of two major points in the equipment and the vibration magnitude of the floor is presented using the frequency response function of a simple 3-DOF model. It is describing the magnitudes according to the frequency of the floor vibration that guarantees the allowable relative motion and this can be used as the vibration criteria. In order to obtain the vibration criteria experimentally a method of extracting through a modal test was introduced and verified analytically. It provides vulnerable frequency and magnitude to floor vibration in consideration of the dynamic characteristics of individual equipment. And it is possible to know necessary to improve the dynamic characteristics of the equipment, and it can be used to check the vibration compatibility of the place where the equipment will be installed.

• Journal of the Semiconductor & Display Technology
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• v.18 no.1
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• pp.112-116
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• 2019

This study was carried out by structural analysis using finite element method for designing high rigidity structure of multi - functional automatic lathe bed. As a result of comparison, it was confirmed that the weight was designed to be higher than the maximum deformation amount. The shape and dimensions of the main pillars and walls of the bed were changed to derive the most suitable design for the multifunction automatic lathe bed. A model of structural design was derived with the goal of minimizing the maximum deformation amount of $20{\mu}m$ or less and the weight of the bed. As a result of applying the derived design improvement proposal to the multifunctional automatic lathe bed, 57.4% weight reduction and maximum principal stress decreased by 45.0% than the initial design model. It is expected that the optimum design that meets these design conditions will reduce the weight of the structure as well as improve the safety of the structure and reduce the machining error in the operation of the machine tool.

• Journal of the Semiconductor & Display Technology
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• v.20 no.3
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• pp.152-156
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• 2021

Cartesian robot is used in semiconductor manufacturing. Friction between steel band and mover wears the steel band. The emission of wear particle from steel band contaminates semiconductor equipment. At the manufacturing site, the steel band is replaced periodically to minimize the generation of wear particle. But this is not a good way to minimize the generation of wear particle, because it is hard to specify the moment of replacement. We suggested the methodology to minimize the generation of wear particle using TRIZ technique. Also we made prototype robot which the solution is applied, and the performance of the solution was verified through experiments. As a result of verification, it was confirmed that the solution significantly reduced the generation of wear particle compared to the standard way.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.132-137
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• 2022

In this paper, we have studied the quadrature error reduction for the single drive 3-axis MEMS Gyroscope. There was a limitation of the previous study which is the z-axis quadrature error was large. To reduce this value, design methodologies were presented. And the methodologies included a different mesh application, z-rate spring structure change, and mass compensation for balancing of the structure. We conducted the modal analysis, drive mode analysis and sense mode analysis using COMSOL Multiphysics. As a result, a drive resonant frequency was 26003 Hz, with the x-sense, y-sense, z-sense being 26749 Hz, 26858 Hz, 26920 Hz, respectively. And the Mechanical sensitivity was computed at 2000 degrees per second(dps) input angular rate while the sensitivity for roll, pitch, and yaw was computed 0.011, 0.012, and 0.011 nm/dps respectively. And z-axis quadrature error was successfully improved, 2.78 nm to 0.95 nm, which the improvement rate was about 66 %.

• Journal of the Semiconductor & Display Technology
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• v.22 no.3
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• pp.62-66
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• 2023

With the advancement in technology and rapid increase in the demand for microelectromechanical systems (MEMS) based inertial measurement units (IMUs), high-volume production and test system remain a major challenge for the MEMS industry. To compete with the challenging market of Industry 4.0, here we developed an automatic test system to evaluate the performance of the ovenized IMU sensors as well as analyze the data. The automatic test system was developed by interfacing a commercial MEMS IMU (BMI 088) using LabVIEW. The BMI 088 was tested experimentally for long-term bias stability, ON/OFF bias repeatability, and root mean square (rms) noise. Furthermore, the data was analyzed through the developed test system. The results show that the automatic test system has improved the test time and reduced human effort. The developed automatic test system is a significant approach to MEMS research and development (R&D) to increase and improve the mass production of IMUs.

• Transactions of the KSME C: Technology and Education
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• v.4 no.1
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• pp.63-71
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• 2016

Although mechatronics education in a mechanical engineering curriculum is recently recognized as important, its experimental education has been done generally in the laboratory equipped with all the apparatus and could not be done at home by students. This paper introduces experimental educations on mechatronics, e.g., digital logic circuits, 7-segment LED drive, square wave generation, microcontroller programming using assembly and C languages, timer interrupt, and step motor drive using a small 5 V power supply, a breadboard, various electronic and electric components, a microcontroller and its programmer, a step motor, and a student's PC. In the developed mechatronics course, experimental educations are scheduled in parallel with content's lectures together, and cheap and economic experimental environment is prepared for students in which students can easily practice experimental works in advance or later at home by themselves.

• Ingenium
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• v.23 no.2
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• pp.20-25
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• 2016

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.92-97
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• 2019

In this paper, we investigated the problems and solutions in the production of scaffolds using commercially available FDM 3D printers. We used ADRIGE TRIZ algorithm to systematically analyze the problems and suggest solutions. We printed scaffolds using suggested solutions. We measured the pore size and printing time of the scaffolds. We have confirmed that the printing precision is greater than 99% and the printing time is decreased by half. The suggested solutions proved its validity through experiments and showed satisfactory results.

• Journal of the Semiconductor & Display Technology
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• v.16 no.3
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• pp.106-110
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• 2017

Due to the plasma applied from the outside, which acts as an etchant during the etching process, considerable heat is transferred to the wafer and a separate cooling process is performed to effectively remove the heat after the process. In this case, a direct cooling method using a refrigerant is suitable for cooling through effective heat exchange. The direct cooling method using the refrigerant using the latent heat exchange is superior to the cooling method using the sensible heat exchange. Therefore, in this paper, AMESim is used to design a direct refrigerant cooling system using latent heat exchange simulator was built.The constructed simulator is reliable compared with the actual experimental results. It is expected that this simulator will help to design and search for optimal process conditions.