• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.06a
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• pp.280-280
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• 2007

$Pb(Zr,Ti)O_3$ (PZT) 강유전체 박막은 높은 잔류 분극 (remanent polarization) 특성 때문에 현재 강유전체 메모리 (FeRAM) 소자에 적용하기 위하여 가장 활발히 연구되고 있다. 그런데 PZT 물질은 피로 (fatigue) 및 임프린트 (imprint) 등의 장시간 신뢰성 (long-term reliability) 특성이 취약한 단점을 가지고 있다. 이러한 신뢰성 문제를 해결할 수 있는 효과적인 방법 중의 하나는 $IrO_2$, $SrRuO_3$(SRO) 등의 산화물 전극을 사용하는 것이다. 많은 산화물 전극 중에서 SRO는 PZT와 비슷한 pseudo-perovskite 결정구조를 갖고 격자 상수도 비슷하여, PZT 커패시터의 강유전 특성 및 신뢰성을 향상시키는데 매우 효과적인 것으로 알려져 있다. 따라서 본 연구는 PZT 커패시터에 적용하기 위하여 SRO 박막을 증착하고 이의 전기적 특성 및 미세구조를 분석하고자 하였다. 또 실제로 SRO 박막을 상부전극과 PZT 사이의 버퍼 층 (buffer layer)으로 적용한 경우의 커패시터 특성도 평가하였다. 먼저 다결정 SRO 박막을 $SiO_2$/Si 기판 위에 DC 마그네트론 스퍼터링 법 (DC magnetron sputtering method)으로 증착하였다. 그 다음 이러한 SRO 박막의 미세구조, 결정성 및 전기적 특성이 증착 조건들의 변화에 따라서 어떤 경향성을 보이는지를 평가하였다. 기판 온도는 $350\;{\sim}\;650^{\circ}C$ 범위에서 변화시켰고, 증착 파워는 500 ~ 800 W 범위에서 변화시켰다. 또 Ar+$O_2$ 혼합 가스에서 산소의 혼합 비율을 20 ~ 50% 범위에서 변화시켰다. 이러한 실험 결과 SRO 박막의 전기적 특성 및 미세 구조는 기판의 증착 온도에 따라서 가장 민감하게 변함을 관찰할 수 있었다. 다른 증착 조건과 무관하게 $450^{\circ}C$ 이상의 온도에서 증착된 SRO 박막은 모두 주상정 구조 (columnar structure)를 형성하며 (110) 방향성을 강하게 나타내었다. 가장 낮은 전기 저항은 $550^{\circ}C$ 증착 온도에서 얻을 수 있었는데, 그 값은 약 $440\;{\mu}{\Omega}{\cdot}cm$ 이었다. SRO 버퍼 충을 적용하여 제작한 PZT 커패시터의 잔류 분극 (Pr) 값은 약 $30\;{\mu}C/cm^2$ 정도로 매우 높은 값을 나타내었고, 피로 손실 (fatigue loss)도 $1{\times}10^{11}$ 스위칭 사이클 후에 약 11% 정도로 매우 양호한 값을 나타내었다.

• Journal of the Korean Society for Nondestructive Testing
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• v.36 no.1
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• pp.18-26
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• 2016

The semiconductor industry is one of the key industries of Korea, which has continued growing at a steady annual growth rate. Important technology for the semiconductor industry is high integration of devices. This is to increase the memory capacity for unit area, of which key is photolithography. The photolithography refers to a technique for printing the shadow of light lit on the mask surface on to wafer, which is the most important process in a semiconductor manufacturing process. In this study, the width and step-height of wafers patterned through this process were measured to ensure uniformity. The widths and inter-plate heights of the specimens patterned using photolithography were measured using transmissive digital holography. A transmissive digital holographic interferometer was configured, and nine arbitrary points were set on the specimens as measured points. The measurement of each point was compared with the measurements performed using a commercial device called scanning electron microscope (SEM) and Alpha Step. Transmission digital holography requires a short measurement time, which is an advantage compared to other techniques. Furthermore, it uses magnification lenses, allowing the flexibility of changing between high and low magnifications. The test results confirmed that transmissive digital holography is a useful technique for measuring patterns printed using photolithography.

• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.3
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• pp.312-320
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• 2019

In this paper, we design a 512Kb eFlash IP using 110nm eFlash cells. We proposed eFlash core circuit such as row driver circuit (CG/SL driver circuit), write BL driver circuit (write BL switch circuit and PBL switch select circuit), read BL switch circuit, and read BL S/A circuit which satisfy eFlash cell program, erase and read operation. In addition, instead of using a cross-coupled NMOS transistor as a conventional unit charge pump circuit, we propose a circuit boosting the gate of the 12V NMOS precharging transistor whose body is GND, so that the precharging node of the VPP unit charge pump is normally precharged to the voltage of VIN and thus the pumping current is increased in the VPP (boosted voltage) voltage generator circuit supplying the VPP voltage of 9.5V in the program mode and that of 11.5V in the erase mode. A 12V native NMOS pumping capacitor with a bigger pumping current and a smaller layout area than a PMOS pumping capacitor was used as the pumping capacitor. On the other hand, the layout area of the 512Kb eFlash memory IP designed based on the 110nm eFlash process is $933.22{\mu}m{\times}925{\mu}m(=0.8632mm^2)$.

• Journal of the Korea Society of Computer and Information
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• v.14 no.9
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• pp.11-19
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• 2009

A RAM-based Neural Net(RBNN) which has multi-discriminators is more effective than RBNN with a discriminator. Experience Sensitive Cumulative Neural Network and 3-D Neuro System(3DNS) that accumulate the features point improved the performance of BNN, which were enabled to train additional and repeated patterns and extract a generalized pattern. In recognition process of Neural Net with multi-discriminator, the selection of class was decided by the value of MRD which calculates the accumulated sum of each class. But they had a saturation problem of its memory cells caused by learning volume increment. Therefore, the decision of MRD has a low performance because recognition rate is decreased by saturation. In this paper, we propose the method which improve the MRD ability. The method consists of the optimum MRD and the matching ratio prototype to generalized image, the cumulative filter ratio, the gap of prototype response MRD. We experimented the performance using NIST database of NIST without preprocessor, and compared this model with 3DNS. The proposed MRD method has more performance of recognition rate and more stable system for distortion of input pattern than 3DNS.

• Journal of the Institute of Electronics and Information Engineers
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• v.54 no.7
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• pp.21-28
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• 2017

Practical models for FPGA architectures which include performance- and/or density-enhancing components such as carry chains, wide function multiplexers, and memory/multiplier blocks are being applied to academic FPGA placement tools which used to rely on simple imaginary models. Previously the techniques such as pre-packing and multi-layer density analysis are proposed to remedy issues related to such practical models, and the wire length is effectively minimized during initial analytic placement. Since timing should be optimized rather than wire length, most previous work takes into account the timing constraints. However, instead of the initial analytic placement, the timing-driven techniques are mostly applied to subsequent steps such as placement legalization and iterative improvement. This paper incorporates the timing driven techniques, which check if the placement meets the timing constraints given in the standard SDC format, and minimize the detected violations, with the existing analytic placer which implements pre-packing and multi-layer density analysis. First of all, a static timing analyzer has been used to check the timing of the wire-length minimized placement results. In order to minimize the detected violations, a function to minimize the largest arrival time at end points is added to the objective function of the analytic placer. Since each clock has a different period, the function is proposed to be evaluated for each clock, and added to the objective function. Since this function can unnecessarily reduce the unviolated paths, a new function which calculates and minimizes the largest negative slack at end points is also proposed, and compared. Since the existing legalization which is non-timing driven is used before the timing analysis, any improvement on timing is entirely due to the functions added to the objective function. The experiments on twelve industrial examples show that the minimum arrival time function improves the worst negative slack by 15% on average whereas the minimum worst negative slack function improves the negative slacks by additional 6% on average.