• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.2093-2095
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• 2004

본 논문은 압전소자를 구동장치로 사용한 마이크로 펌프의 제작과 실험에 관한 논문이다. 마이크로 펌프의 상부기판은 polydimethyl siloxane(PDMS)을 소재로 미세유로에 상시 닫힌 밸브가 일체화된 구조로 제작되었고, 하부기판은 polymethyl methacrylate(PMMA)를 소재로 3개의 압전 디스크가 구동기로 부착되었다. 최종적으로 상, 하부 기판은 액상 PUMS로 접합하여 제작했다. 구동기의 입력신호는 6상으로 구형파를 인가하여 연동구동하며 주파수와 전압을 가변하면서 유량을 측정하였다. 구동 주파수가 0.167 Hz이고 전압이 20 V일 때, 마이크로펌프의 1회 토출량은 104 nl이고, 유량은 1.04${\mu}{\el}$/min이다.

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.140.1-140.1
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• 2005

• Proceedings of the KSME Conference
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• 2005.11a
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• pp.46.1-46.1
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• 2005

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1645-1646
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• 2006

Micro ElectroMechanical Systems (MEMS) 기술을 이용한 초미세 유체 제어 시스템 (마이크로 펌프, 마이크로 밸브, 마이크로 채널, 마이크로 믹서 등)은 화학, 생명분야의 DNA 분석, 항원-항체 분석, 질병의 진단 등에 사용되는 lab-on-a-chip, micro total analysis system ($\mu$-TAS) 등에서 화학 및 바이오 유체를 제어하는 분석 시스템의 일부분으로서 사용되며 필수적으로 요구된다. 본 논문에서는 이러한 microchip을 구현하기 위해 초미세 유체 제어 소자인 마이크로 펌프와 밸브를 같은 기관 위에 polydimethylsiloxane (PDMS)와 indium tin oxide (ITO)-Glass를 사용하여 동일한 구조로 집적 하였다. 마이크로 펌프의 pumping rate은 인가 직류 펄스 전력의 주파수와 duty 비를 변화시켜 최적화하였다. 직류 펄스 전력 500 mW를 인가하였을 때 주파수 2 Hz, duty 비 7 %에서 약 $1.05{\mu}l/min$의 최대 유량이 측정되었다. 마이크로 밸브는 ITO 히터에 전력을 인가함으로서 유량의 on/off 제어가 잘 됨을 확인할 수 있었고 유체를 closing하기 위해 필요한 전력은 약 300 mW이다.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.37 no.8
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• pp.744-750
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• 2009

In this study, the pumping performance of a piezoelectric valveless micropump is simulated. The micropump, which was developed in the previous work, is composed of a four-layer lightweight piezocomposite actuator, a polydimethylsiloxane (PDMS) pump chamber, and two diffusers. The piezoelectric domain, the fluid domain and the structural domain are coupled in the three-dimensional simulation. We used ANSYS for the piezoelectric and structural domains and ANSYS CFX for the fluid domain. The effects of driven frequency on the flow rate have been investigated by simulating the flow characteristics for 10 Hz and 40 Hz driven frequencies. The flow rates with respect to driven frequencies up to 300 Hz have been calculated.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2009.05a
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• pp.361-364
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• 2009

Vacuum facility is required for high altitude space environment test to develop small thruster to be applied for micro-satellite. After selecting vacuum equipment and integrating the chamber to simulate 100-120km attitude with max, $10^{-5}\;torr$. We tested the performance of high vacuum chamber. We designed, fabricated the knudsen pump and analyzed pressure gradient efficiency of membrane according to Knudsen number under vacuum conditions. We described the upgrade plan to a thermal vacuum chamber.

• Journal of Sensor Science and Technology
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• v.10 no.4
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• pp.232-238
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• 2001

We fabricated micro-pump using stereolithography technology. The pump was fabricated using PZT for its drive and used non-movable valve of diffuser/nozzle concept. Size of the pump chamber is, $14mm{\psi}$, narrow hole of diffuser/nozzle is $0.5mm{\psi}$ and wide hole $1mm{\psi}$ and chamber depth is 1.2mm, respectively. We confirmed its operation at frequency 100Hz, supply voltage $90{\sim}250Vp-p$. As the result of the pump working measurement, when ethanol is used, the pressure head difference between inlet and outlet of the pump is about 53mm in the frequency of 100Hz, 200V of Vp-p.

• ICROS
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• v.4 no.5
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• pp.26-32
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• 1998

• 유체기계공업학회:학술대회논문집
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• 2004.12a
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• pp.748-753
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• 2004

The performance of a valveless micropump driven by chamber wall oscillation was numerically investigated for various frequency and amplitude of the oscillation. The numerical study was performed in the range of oscillation frequency from 200Hz to 1000Hz and amplitude from $1{\mu}m$ to $15{\mu}m$. And optimal values for the parameters are found. At the oscillation frequency 600Hz, the net flow rate of micropump shows a maximum value. Also the results show good agreement with the experimental results. The total flow rate was increased with the oscillation amplitude. However, the net flow rate was found to be decreased over $7{\mu}m$.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2008.11a
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• pp.36-40
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• 2008

Minimization of nozzle induces many flow losses in micro-propulsion system. In this study, we studied about thermal transpiration based new conceptual micro propulsion system to overcome these losses. Thermal transpiration device(Knudsen pump) having no moving parts can self-pump the gaseous propellant by temperature gradient only (cold to hot). We designed, fabricated the knudsen pump and analyzed pressure gradient efficiency of membrane according to Knudsen number under vacuum condition. In this paper, we compared mass flow rate of Knudsen pump by using different membrane type ; Polyimide and Hangi, Korean traditional paper.