• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.508-511
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• 2002

With increasing the needs for micro and precision parts, micro machining technology using micro tools has been studied to fabricate a small part with high density such as electronics, optics, communications, and medicine industry more than before. Though these micro tools have developed rapidly, it is difficult to apply them to micro fabrication technologies, because of the inherent manufacturing. In this study, micro tools(wc) to produce micro structures and parts were manufactured by cylindrical grinding machine employing ELID(Electrolytic In-process Dressing) technique and good dimensional accuracy was achieved. Furthermore we researched the characteristics of machining on the micro drilling using micro drills and manufactured micro tools. Finally it is confirmed that manufactured micro tools can be used for micro machining.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.12
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• pp.1805-1810
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• 2010

We present a simple, cost-effective, and fast fabrication process for three-dimensional (3D) microstructures; this process is based on multi-step electrochemical etching of metal foils which facilitates the mass production of 3D microstructures. Compared to electroplating, this process maintains uniform and well-controlled material properties of the microstructure. In the experimental study, we perform single-step electrochemical etching of aluminum foils for the fabrication of 2D cantilever arrays. In the single-step etching, the depth etch rate and bias etch rate are measured as $1.50{\pm}0.10 {\mu}m/min$ and $0.77{\pm}0.03 {\mu}m/min$, respectively. Using the results of single-step etching, we perform two-step electrochemical etching for 3D microstructures with probe tips on cantilevers. The errors in height and lateral fabrication in the case of the fabricated structures are $15.5{\pm}5.8% $ and $3.3{\pm}0.9%$, respectively; the surface roughness is $37.4{\pm}9.6nm$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.191-192
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.273-274
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.151-154
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• 2002

In this paper a mathematical model, the results of computer simulation and exprimental investigations of electrochemical machining with a too-electrode are presented. The experimental investigations were carried out in order to evaluate the influence of working voltage, initial interelectrode gap size, and metal remove rate. Accuracy of computer simulation evaluated by differences between results of experimental test and computer simulation depends on electrochemical machining coefficient, total overpotential of electrode process, current density, electrical conductivity of electrolyte, and etc. Metal removal rate would be predicted by the simulation of ECM process.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.134-140
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• 2008

Micro electrochemical machining (ECM) is conducted on stainless steel 304 using non-toxic electrolyte of citric acid. Electrochemical dissolution region is minimized by applying a few hundred second duration pulses between the tungsten SPM tip and the work material. ECM characteristics according to citric acid concentration, feeding velocity and electric conditions such as pulse amplitude, pulse frequency, and offset voltage are investigated through a series of experiments. Micro holes of $60{\mu}m$ in diameter with the depth of $50{\mu}m$ and $90{\mu}m$ in diameter with the depth of $100{\mu}m$ are perforated. Square and circular micro cavities are also manufactured by electrochemical milling. This research can contribute to the development of safe and environmentally friendly micro ECM process.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1897-1901
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• 2003

Recently, with the development of semiconductor technology the miniaturization of products as well as parts and the products with high precision are being required. In addition as a national competitive power is increasingly effected by micro part development through micro machining and the secure of micro machining technology, the study of micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tool under the size of 30$\mu\textrm{m}$ and machine micro holes through micro tool fabrication by grinding, the application of ELID to grinding wheel and the measurement of surface roughness for micro tool.

• Proceedings of the KSME Conference
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• 2003.11a
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• pp.1787-1792
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• 2003

Recently with the development of semiconductor technology, the miniaturization of parts and products as well as their high precision is required. In addition, as the national competitiveness is increasingly affected by the development of the micro parts through micro machining technology, the study of the micro machining technology is being conducted in many countries. The goal of this study is to fabricate micro tools under the size of $20{\mu}m$ and to machine micro holes using them. The fabrication is done by grinding and the application of ELID to the grinding wheel. The surface roughness of the micro tools is measured to evaluate the study.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1136-1141
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• 2004

In recent years, demands on microelectrode have been greatly enhanced because of its potential applications and mass production of microelectrodes is needed. An electrochemical fabrication is used as an method for the simple and cheap fabrication of multi microelectrodes. In this paper, one dimensional microelectrode array is used for fabricating of multi electrodes. A diffusion layer which is formed near the electrode surface has an effect on the shape error of multi microelectrodes. The optimal distance between electrodes to minimize shape errors of multi electrodes is investigated. Multi microelectrodes which has several tens of and hundreds of micrometer in diameter are fabricated at a time.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.154-154
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• 2004

초기 직경이 500$\mu\textrm{m}$인 텅스텐 봉을 전해에칭을 통하여 끝단 직경이 수 $\mu\textrm{m}$인 텅스텐 팁으로 가공하였다. 그리고, 적절한 전처리 과정을 거친 다증벽 탄소나노튜브를 제작된 텅스텐 팁 끝에 적절한 매니퓰레이션을 통하여 부착하였다. 이렇게 제작된 나노 팁(텅스텐 팁과 탄소나노튜브로 구성)은 매우 긴 탄소나노튜브의 길이 때문에 나노 팁으로 사용하기에 부적절한 경우가 많다. 즉, 나노 그리퍼로서 사용하기에는 적합하지 않은 경우가 있다. 이러한 점을 극복하기 위하여 전해에칭을 이용하여 나노 팁의 길이를 나노 그리퍼로 사용하기에 적합하도록 조절하였다.(중략)