• Korean Journal of Materials Research
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• v.7 no.4
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• pp.322-329
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• 1997

ECR 마이크로 플라즈마 CVD법에 의하여 단결정 Si기판위에서 대면적에 걸쳐 방향성을 가진 다이아몬드박막을 성공적으로 성장시키고, 막 증착공정을 바이어스처리 단계와 성막단계의 2단계로 나누어 실시할 때 바이어스처리 단계에서 여러 공정 매개변수들이 다리아몬드 핵생성밀도에 미치는 효과에 관하여 조사하였다. 기판온도$600^{\circ}C$, 압력 10Pa, 마이크로파 전력 3kW, 기판바이어스 +30V의 조건으로 바아어스 처리할 때, 핵생성에 대한 잠복기간은 5-6분이며, 핵생성이 완료되기 까지의 시간은 약 10분이다. 10분 이후에는 다이아몬드 결정이 아닌 비정질 탄소막이 일단 형성된다. 그러나 성장단계에서 이러한 비정질 탄소막은 에칭되어 제거되고 남아있는 다이다몬드 핵들이 다시 성장하게 된다. 또한 기판온도의 증가는 다이아몬드 막의 결정성을 높이고 핵생성 밀도를 증가시키는 데에 별로 효과가 없다. ECR플라즈마 CVD법에서 바이어스처리 테크닉을 사용하면, 더욱 효과적임을 확인하였다. 총유량 100 sccm의 CH$_{3}$OH(15%)/He(85%)계를 사용하여 가스압력 10Pa, 바이어스전압 +30V마이크로파 전력 3kW, 온도 $600^{\circ}C$의 조건하에서 40분간 바이어스처리한 다음 다이아몬드막을 성장시켰을 때 일시적으로나마 제한된 지역에서 완벽한 다이아몬드의 에피성장이 이루어졌음을 SEM으로 확인하였다. 이것은 Si기판상에서의 다이아몬드의 에피성장이 가능함을 시사하는 것이다. 그밖에 라만분광분석과 catodoluminescence 분석에 의한 다이아몬드의 결정질 조사결과와 산소방전 및 수소방전에 의한 챔버벽의 탄소오염효과 등에 관하여 토의하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.3
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• pp.699-706
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• 2018

The permeation properties of plasma polymer membranes were studied for permanent gases such as He, $H_2$, $O_2$, $N_2$, $CH_4$ and condensable vapors such as $CO_2$, $C_2H_4$, $C_3H_8$. The plasma polymers were prepared by the discharge of microwave or radiofrequency(RF) wave. Hexamethyldisiloxane (HMDS) vapor was used as a monomer for plasma polymerization. In HMDS plasma-polymerized membranes prepared under microwave discharge, the permeability coefficient was dependent of the kinetic molecular diameter of the permeate gases. Additionally the membranes showed higher $O_2/N_2$ permselectivity compared to the plasma polymers from radiofrequency discharge. On the contrary, in the HMDS plasma-polymerized membranes prepared under radiofrequency discharge, the permeability coefficient was dependent of the critical temperature of the permeant gases. The membranes showed high selectivities of $C_2H_4$ and $C_3H_8$ over $N_2$. The permeability coefficient of plasma polymerized membranes prepared under microwave discharge was dependent of the molecular diameter of permeant gases because of high crosslinking density of the membrane. However, the crosslinking density of the plasma polymerized membranes prepared under RF discharge was lower because the energy density of RF wave is weaker than that of microwave. Hence, the permeability of RF plasma polymerized membranes became dependent of the critical temperature rather than molecular diameter of the gases.

• Journal of Satellite, Information and Communications
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• v.12 no.3
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• pp.80-85
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• 2017

In this paper, a mircrowave breakdown of X-band circular waveguide cavity filter, which occurred during ground test, was introduced, and electro-magnetic field simulation results to identify a root cause, and the analysis of possibility of its occurrence on orbit operation were presented. Filter modeling for simulation was conducted with a commercial tool (FEST3D), and electric fields inside the filter were monitored at the input of 1 W continuous wave. In our observation, strong electric field intensities were monitored on the tuning screws especially at the input of band-edge frequencies. The threshold power levels for the breakdown were also estimated and compared with the input power levels actually injected to the filter. From this estimation, we could figure out that the power exceeding the breakdown threshold was injected to the filter so that strong electric fields were generated and temperature increased high, and this became a root cause of the electrical short. Our further analysis showed that this kind of microwave breakdown is not likely to occur on orbit operation, and multipactor is expected not to occur at the input of band-edge frequencies. As a measure to prevent the microwave breakdown, we suggested to avoid the injection of band-edge frequencies and inject lower power levels to the filter.

• Applied Chemistry for Engineering
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• v.19 no.4
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• pp.445-451
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• 2008

In order to regenerate the activated carbon polluted by volatile organic compounds (VOCs) using microwave, adsorption and desorption characteristics of benzene over activated carbon (AC) coated with insulating materials were investigated. Physical characteristics of activated carbon and insulator-coated ACs were investigated by means of $N_2$ gas adsorption and scanning electron microscopy (SEM). The amount of VOC adsorbed showed a positive relationship with the specific surface area of the ACs, and spark discharge over insulator-coated ACs did not occur. Potassium silicate (PS) was the best binder for coating of insulating materials on AC. Amount of benzene desorbed by microwave irradiation was dependent on output power of microwave. Nearly same performance was obtained even though the adsorption-desorption operation under microwave irradiation was repeated 5 times. Finally, it was known that the microwave heating was a very effective mean for regenerating the polluted AC.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.161-163
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• 2004

본 논문에서는 마이크로파로 여기 시켜 방전하는 고출력 무전극 HID 황 램프와 다른 발광 물질의 광학적 특성을 설명하고, 특히 원편파를 이용하여 정지된 램프에서 방전시켜 광학적 특성을 측정하였다. 그리고 순수 황에 특정 화합물을 첨가하여 색도를 조절하여 연색성 지수를 순수 황보다 좋게 할 수 있었다.

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.95.1-95
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• 2003

• Proceedings of the Korean Ceranic Society Conference
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• 2003.04a
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• pp.96.1-96
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• 2003

• Proceedings of the Korean Environmental Sciences Society Conference
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• 2006.05a
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• pp.111-112
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• 2006

기존 활성탄의 표면 코팅으로 인해 GAC의 방전 및 온도 상승을 제어 함으로써 탈착 시 문제점으로 나타났던 폭발의 위험을 줄였으며 또한 급격한 온도 상승으로 인한 톨루엔의 분해를 줄임으로 톨루엔 회수의 가능성을 확인할 수 있었으며 GAC의 내구력 또한 강화된 것으로 사료 된다.

• Proceedings of the Korean Vacuum Society Conference
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• 2006.02a
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• pp.115-115
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• 2006

• Applied Chemistry for Engineering
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• v.21 no.1
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• pp.11-17
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• 2010

Modifying surface of activated carbon for the electrode of EDLC with an organic electrolyte was investigated to improve the electrochemical performance of EDLC by the microwave radiation. Three kinds of activated carbons, prepared activated carbon from petroleum cokes and pitch cokes and commercial activated carbon BP-25, were used for this study. For all investigated activated carbons, hydrophilic functional groups-containing oxygen disappeared from the surface of activated carbon as microwave radiation. And as microwave radiation time was increased, the specific surface area and total pore volume of activated carbons were reduced and average pore diameter were increased. From theses effects, interfacial resistance of EDLC with the modified activated carbon electrode was drastically decreased, and discharge capacitance was increased although the specific surface area of activated carbon was reduced by this microwave radiation.