• 한국진공학회지
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• 제21권1호
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• pp.36-40
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• 2012

마이크로미터 크기의 역학적 공진기의 제작과 그 공진 주파수 변화를 이용하여 질량 변화량을 측정하는 방법에 대해 연구 하였다. 공진기의 공진 주파수를 측정하기 위해서 레이저의 간섭효과를 이용한 광학적 측정법을 사용하였는데 이 방법은 나노미터 스케일의 변위까지 감지할 수 있을 정도로 매우 감도가 높은 측정법이다. 공진기는 압전 세라믹(piezo ceramic) 위에 원자현미경(atomic force microscope)의 캔티레버를 붙여서 만들었는데 이 방법은 압전판이 캔티레버의 공진 주파수로 진동할 때 캔티레버의 변위가 가장 크게 변화됨을 이용한 것이다. 또한, 전자 빔 증착기(e-beam evaporation system)를 사용하여 금을 캔티레버 위에 증착하여 질량을 변화시킨 후에 질량 변화량에 따른 공진주파수의 변화량을 측정하였다. 이 공진기는 질량센서의 역할을 수행할 수 있으며 수 마이크로그램을 감지할 수 있는 감도를 가짐을 확인하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.637-640
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• 2005

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of $0\~30{\mu}N$ by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), and the force vs. deflection. From this relationship, the force constant of the cantilever was calculated to 3.45 N/m with a standard deviation of 0.01 N/m. It shows that there is a big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer s specifications.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2008년도 추계학술대회A
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• pp.1773-1777
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• 2008

The proper orthogonal decomposition(POD) is used to the modal analysis of microcantilever of dynamic mode atomic force microscopy(AFM). The proper orthogonal modes(POM) are extracted from vibrating signals of microcantilever when it resonates and taps the sample. We present recent ideas based on POD and detailed experiments that yield new perspectives into the microscale structures. The linearized modeling technique based on POD is very useful to show the principal characteristics of the complex dynamic responses.

• 한국기계가공학회지
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• 제12권6호
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• pp.117-124
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• 2013

Recently, the cell adhesion phenomenon that occurs in or between cells and other substances has become an important field of research in biology and biomedical engineering. Among the research, the foundational studies primarily experiment using biomedical materials (e.g. Glass Beads) attached to an AFM cantilever. For cell adhesion research, the mechanism where biomedical materials can be attached to the cantilever must be developed for this purpose; however, the mechanism remains an insufficient step. In this paper, a new stage where the Glass Bead can be attached to the cantilever is designed and fabricated;, the mm range movement in the stage is controlled using the stepping motor with a minimum displacement of $1{\mu}m$. The adhesive flow is also controlled using a PZT actuator. In addition, through the air suction, the cantilever holder can be fixed to the stage. The new stage including the bond inflows mechanism is evaluated and analyzed using theory and experiments.