• Korean Journal of Materials Research
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• v.7 no.2
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• pp.102-106
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• 1997

Micro gas sensors including thin film catal) tic type require stress-free memhrancs for etch stop of Si anisotropic etching and sublayer of sensing elements hecause stress is one of the main factors affecting breakdown of thin membranes. This paper reports the effects of deposition conditions on stress and refractive index of $SiN_{x}/SiO_{x}/(NON)$ films deposited by low pressure c11ernic;rl vapor deposition(L, t'CVI)) 2nd reactve sputtering. In the case of I.PCVI1, the stresses of $SiN_{x}$ and NON films arc $7.6{\times}10^{8}dyne/cm^2$ and $3.3{\times}10^{8}dyne/cm^2$, respectibely, and the refractive indices are 3.05 and 152, respectively. In the cxse oi the sputtered SiN, , compressi\e stress decreased in magnitude and then turned to tensility as increasing proc, ess pressure by lmtorr to 30mtorr and cicreasmg applied power density by $2.74W/cm^2$ to $1.10W/cm^2$. The hest value of film stress obt;~ined under condition of lOmtorr and $1.37W/cm^2$ in this' experiment was $1.2{\times}10^{9}dyne/cm^2$ cnnipressive. The refr~ict~ve index decreased from 2 05 to 1 89 as decreasing applied power density by lnitorr to 3Orntorr and increasing process pressure hy $2.74W/cm^2$ to $1.10W/cm^2$. Stresses of films deposited by both LPCVL) and sputtering decreased as incre;lsing temperature and showed plastic behavior as decreasing temperature.

• Journal of the Institute of Electronics Engineers of Korea CI
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• v.48 no.2
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• pp.38-46
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• 2011

3D motion analysis system which is currently widely used for walking analysis has limitations due to both necessity of wide space for many cameras for measurement, high cost, and complicated preparation procedure, which results in low accessability in use and application for clinical diagnosis. To resolve this problem, we developed 3-dimensional wireless ambulatory measurement system based on inertial sensor which can be easily applicable for clinical diagnosis for lower extremity deformity and developed system was evaluated by applying for 10 elderly people with diabetes mellitus. Developed system was composed of wireless ambulatory measurement module that consists of inertial measurement unit (IMU) which measures the gait characteristics, microcontroller which collects and precesses the inertial data, bluetooth device which transfers the measured data to PC and Window's application for storing and processing and analyzing received data. This system will utilize not only to measure lower extremity (foot) problem conveniently in clinical medicine but also to analyze 3D motion of human in other areas as sports science, rehabilitation.

• Journal of the Korean Society of Marine Environment & Safety
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• v.19 no.6
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• pp.666-673
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• 2013

This paper proposes the performance evaluation test of attitude heading reference system (AHRS) suitable for small high speed autonomous underwater vehicle(AUV). Although IMU can provides the detail attitude information, it is sometime not suitable for small AUV with short operation time in view of price and the electrical power consumption. One of alternative for tactical grade IMU is the AHRS based micro-machined electro mechanical system(MEMS) which can overcome many problems that have inhibited the adoption of inertial system for small AUV such as cost and power consumption. A cost effective and small size AHRS which incorporates measurements from 3-axis MEMS gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for AUV and the attitude calculation algorithm is derived based the coordinate transform equation and Kalman filter. The developed AHRS was validated through various performance tests as like the magnetometer calibration, operating experiments using land mobile vehicle and flight motion simulator (FMS). The test of magnetometer calibration shows the developed MEMS AHRS is robust to the external magent field change and the test with land vehicle proves the leveling error of developed MEMS AHRS is below $0.5^{\circ}/hr$. The results of FMS test shows the fact that AHRS provides the measurement with $0.5^{\circ}/hr$ error during 5 minutes operation time. These results of performance evaluation tests showed that the developed AHRS provides attitude information which error of roll and pitch are below $1^{\circ}$ and the error of yaw is below $5^{\circ}$ and satisfies the required specification. It is expected that developed AHRS can provide the precise attitude measurement under sea trial with real AUV.

• Journal of Bio-Environment Control
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• v.23 no.1
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• pp.26-30
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• 2014

Purpose of this study was a development of a sprayer arm auto control system that could be operated according to distance from pear trees for automation of pest control. Auto control system included two parts, hardware and software. First, controller was made with an MCU and relay switches. Two types of ultra-sonic sensors were installed to measure distance from pear trees: one on/off type that detect up to 3 m, and the other continuous type providing 0~5 V output corresponding to distance of 0~3 m. Second, an auto control algorithm was developed to control. Each spraying arm was controlled according to the sensor-based distance from the pear trees. And it could dodge obstacles to protect itself. Max and min signal values were eliminated, when five sensor signals was collected, and then signals were averaged to reduce sensor's noises. According to results of field experiment, auto control test result was better than non auto control test result. Spraying rates were 69.25% (left line) and 98.09% (right line) under non auto control mode, because pear trees were not planted uniformly. But, auto control test's results were 92.66% (left line) and 94.64% (right line). Spraying rate was increased by maintaining distance from tree.

• Science of Emotion and Sensibility
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• v.13 no.1
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• pp.235-242
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• 2010

Emotion science is one of the rapidly expanding engineering/scientific disciplines which has a major impact on human society. Such growing interests in emotion science and engineering owe the recent trend that various academic fields are being merged. In this paper we review the recent techniques in the measuring the emotion related elements and applications which include animal model system to investigate the neural network and behaviour, artificial nose/neuronal chip for in-depth understanding of sensing the outer stimuli, metabolic controlling using emotional stimulant such as sounds. In particular, microfabrication techniques made it possible to construct nano/micron scale sensing parts/chips to accommodate the olfactory cells and neuron cells and gave us a new opportunities to investigate the emotion precisely. Recent developments in the measurement techniques will be able to help combine the social sciences and natural sciences, and consequently expand the scope of studies.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1995.04a
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• pp.282-286
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• 1995

일반적으로 관성계 내의 물체에 대한 동적특성의 파악을 위해서는 속도, 가속도 및 각속도, 각가속도에 대한 정보를 필요로 하며 자이로는 이중에서 각속도를 측정하는 장치이다. 운동하는 질량에 회전각속도가 인가될 때 발생되는 코리올리힘을 측정하여 회전각속도를 검출하는 개념의 각속도 센서인 진동자이로는 성능이 회전형 자이로에 비해 떨어지나 구조가 간단하고 소형이며 대량생산이 가능한 장점이 있다. 진동자이로의 효시로는 1950년 영국의 Sperry Gyroscope Company의 "Gyroton"이며, 전자기력을 이용한 가진과 측정이 그 특징으로서 실험실 조건에서 지구의 자전속도를 측정할 수 있었다. 그후 1960년대에 General Electric에서 "VYRO"라는 모델을 개발했는데 압전소자를 이용하여 가진과 측정을 하는 방법이 사용되었다. 1980년대에 Watson Ind., Soderkvist등은 센서자체가 압전물질로 만들어진 자이로를 실험하였고 1990년도에 들어서는 진동자이로의 원리를 마이크로 머시닝 기술과 연계시켜서 소형 경량화와 대량생산을 목표로 연구가 일부 진행되고 있다. 현재 제품화되어 실제 응용되고 있는 예로는 무라다사의 삼각프리즘 형태의 자이로, 토킨사의 원통형 자이로 등이 있으며 이러한 자이로는 캠코더 화면의 안정화 장치에 주로 사용되고 있다. 본 논문에서는 압전소자의 압전, 전왜 방정식으로 출발하여 자이로헤드의 동적 거동을 해석하였다. 진동자이로는 물체의 공진주파수에서의 진동현상을 이용하며, 두 방향의 고유진동수를 일치시켜야 하는 등의 설계조건이 있다. 이러한 조건을 만족하도록 사각보 구조를 기본으로 하여 새로운 형태의 자이로헤드를 고안하였다. 자이로헤드의 구동회로를 설계, 해석하고 각속도를 측정할 수 있는 검출회로를 설계하여 설계된 진동자이로의 동적 특성을 확인하고 보정회로를 이용하여 사용 주파수 영역을 넓혔다.이용하여 사용 주파수 영역을 넓혔다.러한 강이성들이 보장되는 제어이론들 중 H$_{\infty}$ 제어이론이 많이 연구/응용 되고 있다. 특히 공칭 플랜트 모델과 함께 사용되는 플랜트 모델과 함께 사용되는 플랜트 불확실성 모델은 직접적으로 성능 및 안정도에 영향을 미치므로 주의 깊게 선정해야 한다. 방법의 실질적인 적용에는 어려움이 있다. 본 연구에서는 기존의 방법들의 단점을 극복할 수 있는 새로운 회귀적 모우드 변수 규명 방법을 개발하였다. 이는 Fassois와 Lee가 ARMAX모델의 계수를 효율적으로 추정하기 위하여 개발한 뱉치방법인 Suboptimum Maximum Likelihood 방법[5]를 기초로 하여 개발하였다. 개발된 방법의 장점은 응답 신호에 유색잡음이 존재하여도 모우드 변수들을 항상 정확하게 구할 수 있으며, 또한 알고리즘의 안정성이 보장된 것이다.. 여기서는 실험실 수준의 평 판모델을 제작하고 실제 현장에서 이루어질 수 있는 진동제어 구조물에 대 한 동적실험 및 FRS를 수행하는 과정과 동일하게 따름으로써 실제 발생할 수 있는 오차나 error를 실험실내의 차원에서 파악하여 진동원을 있는 구조 물에 대한 진동제어기술을 보유하고자 한다. 이용한 해마의 부피측정은 해마경화증 환자의 진단에 있어 육안적인 MR 진단이 어려운 제한된 경우에만 실제적 도움을 줄 수 있는 보조적인 방법으로 생각된다.ofile whereas relaxivity at high field is not affected by τS. On the other hand, the change in τV does not affect low field profile but strongly in fluences on both inflection fie이 and the maximum relaxivity value. The results shows a fluences on both inflection field and the

• Journal of the Korean Society of Radiology
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• v.5 no.6
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• pp.357-361
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• 2011

In this study, the liquid-crystal optical modulation X-ray detection system using a CdS which is a family of II-IV compound semiconductor was proposed. The system consist of the detector, the signal processing part, the liquid-crystal driving parts, microcontroller, and I/O parts, and was designed to be suitable for miniaturization and portable. In addition, the system can measure a wide range X-ray by using the detecting range selection. In order to evaluate the performance of the proposed system, the CdS sensor's output characteristics were confirmed in accordance with changes of dose, and excellent correlation was determined. And also, the optical penetration ratio was discussed in accordance with changes of the applied voltage by measuring the change of the liquid-crystal in accordance with changes of the applied voltage. Through these results, the characteristics of the liquid-crystal optical modulation system such as the excellent reproducibility and the noise immunity were confirmed. And we considered that the CdS cell-based liquid-crystal optical modulated portable X-ray detection system could be applied to compact, low-cost, portable system.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.37 no.9
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• pp.1093-1098
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• 2013

A single-crystal sapphire is used as a transparent bulletproof window material; however, few studies have investigated the dynamic behavior and fracture properties under high-speed impact. High-speed and high-resolution sequential images are required to study the interaction of the bullet with the brittle ceramic materials. In this study, a device is developed to capture the sequence of high-speed impact/penetration phenomena. This system consists of a speed measurement device, a microprocessor-based camera controller, and multiple CCD cameras. By using a linear array sensor, the speed-measuring device can measure a small (diameter: up to 1 2 mm) and fast (speed: up to Mach 3) bullet. Once a bullet is launched, it passes through the speed measurement device where its time and speed is recorded, and then, the camera controller computes the exact time of arrival to the target during flight. Then, it sends the trigger signal to the cameras and flashes with a specific delay to capture the impact images sequentially. It is almost impossible to capture high-speed images without the estimation of the time of arrival. We were able to capture high-speed images using the new system with precise accuracy.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2012.10a
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• pp.1000-1002
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• 2012

The material with superior biocompatibility and physical-chemical stability is required to fabricate high sensitive biosensors. Many kinds of biomaterials have been evaluated to apply for bioindustry. Recently, carbon based diamond and graphene thin films have been focal pointed as bio applications and their possibility is partially evaluated. Diamond thin film has many advantages for electrochemical and biological applications, such as wide potential window (3.0~3.5V), low background current and chemical-physical stability. And graphene film has many advantages as biomaterial, chemical-physical stability and conductivity. In this work, we have cultured human nerve cell (SH-SY5Y) on the nanocrystalline diamond, mirocrystalline diamond, graphene film and cell culture dish. We use MTT assay to evaluate the characteristics of cell culture on the substrates. As a result, nerve cell is well cultured on the carbon based diamond and graphene films as similar as cell culture dish. We expect that carbon materials have been applied for bioindustry such as biosensors.

• Journal of Sensor Science and Technology
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• v.10 no.5
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• pp.304-313
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• 2001

In this research, we investigate wet-etching properties of GaAs in $NH_4OH-H_2O_2-H_2O$, and develop the fabrication method of GaAs microstructures with rectangular cross section using (001) GaAs substrate. For obtaining wet-etching properties with respect to crystallographic orientation, the etch rates and cross-section etch profiles of (001) GaAs with 16 different compositions and the undercut rates with 5 different compositions are measured using $NH_4OH-H_2O_2-H_2O$ mixed solutions. From these experimental data, a new GaAs micromachining method in bulk (001) GaAs is proposed, and used to fabricate a released microbridges with a rectangular cross section. The developed GaAs micromachining method can be very useful for low-loss, highly-tunable capacitors for RF components and for integration with GaAs optical components.