• 한국정밀공학회지
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• 제17권1호
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• pp.21-26
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• 2000

This paper describes a positioning system for ultra-precision that will be utilized in semiconductor manufacturing field and precision machinery. This system is composed with laser scale unit with 10nm resolution, ball screw with LM guide, brushless DC servo motor, vibration isolator and is equipped in chamber for continuous measuring environment. The dynamic of table, the problem of servo control and the traceability for micro step motion are described. These data will be applied for getting more stable system with 50nm resolution.

• 한국정밀공학회지
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• 제12권2호
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• pp.37-47
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• 1995

In recent years, it has been variously developed for testing the accuracy of circular motion of NC machine tools, for example Telescoping Ball Bar Method by Bryan, Circular test Method by Knapp and $r^{-{\theta} }$ Method by Tsutsumi etc., but these methods are all 2-dimentional measuring methods on plane. These simple methods of circular motion accuracy test of NC machine tools have been studied by many reserchers as above, but it is not yet settled in the code of measuring methods of motion errors of NC machine tools, because of errors of measuring units and sensors, and also especially the difficulties of centering of measuring units and the spindle of machining center. In this paper, in use of 2 rotary encoders and 1 magnetic type linear scale with resolution of 0.5 .mu. m, it has become possible for measuring of 3 dimentional space motion accuracy.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1991년도 춘계학술대회 논문집
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• pp.176-194
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• 1991

A study on the Manufactiring of High-Precision Linear Scale by the Use of He-Ne Laser Interference Of late, along with the advancement of procision machining technology, the reauirement of super-precision measurement increases as time goes on, and the precision and accuracy of standard scale which is a basis of procision measurement has been cognized as a oriterion of industrial development in a nation. Up to now, mechanical and chemical methods have been widely employed to carve scale lines on linear scale, and it is impossible for the linear scale manufactured by means of those methods to guarantee the measurement with sub-micron level owing to errors attended with various problems. And the measuring length also bears errors subjected to the influence of surroundings condition, and shows inefficient circumstances in measurement on the ground of the complexity of measuring procedure as well as massive measuring apparatus. Hence in this paper, we described on technology by which we can carve scale lines thru optical method under the condition of laboratory by using rhcoherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurment of lengrh. In this researchin the case of setting scale interval to 20 .mu. m, we employed super-precision scale-carving device associated by Ar larser and acoustic optical modulator in lieu of flsahing lamp scale-carving device, and we consequently obtained superior linear scales carved with precision and accuracy of .+-. 0.3 .mu. m.

• 한국정밀공학회지
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• 제8권3호
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• pp.82-92
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• 1991

A study on the manufacturing of High Precision Linear Scalr using He-Ne Laser interference Of late, along with the advancement of precision machining technology, the requirement of super precision measurement increases as time goes on, and the accuracy of standard scale which is a basis of precision measurement has been cognized as a criterion of industrial development in a nationl. In this paper, we described on technology by which we could carve scale lines thru optical method under the condition of laboratory by using the coherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurement of length. Hence in this research in the case of setting scale interval to 20 ${\mu}m$, we employed super precision scale-carving device associated with Ar laser and acousto optic modulator in lieu of flashing lamp scale-carving device, and we obtained as experimental result superior linear scales carved within the accuracy of ${\pm}$0.3${\mu}m$.

• 대한기계학회논문집A
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• 제35권3호
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• pp.299-308
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• 2011

본 논문은 항만공사용 로봇의 실린더 길이 측정을 위한 압력 옵서버 개발이다. 로봇의 유압 실린더 제어를 위해 변위 센서가 필요하며 일반적으로 LVDT, 리니어 스케일 등이 사용된다. 이러한 센서는 실린더 외부몸통에 장착되므로 건설현장과 같은 열악한 환경에서 사용할 경우 내구성이 좋지 못하다. 본 논문에서는 압력센서를 이용하여 간접적으로 실린더 길이를 측정한다. 압력센서는 유압 밸브박스 내부에 장착되어 외부충격으로부터 보호되며 방수가 용이하다. 오일을 압축성 매개체로 간주하여 실린더의 위치와 속도 함수인 동적압력 방정식을 유도하고 RLS를 이용하여 실린더가 전진, 후진 리미트에 도달할 때마다 파라미터를 갱신한다.