A Study on the Manufacturing of High Precision Linear Scale Using He-Ne Laser Interference

He-Ne 레이저의 간섭을 이용한 고정밀 리니어 스케일의 제작에 관한 연구

A study on the manufacturing of High Precision Linear Scalr using He-Ne Laser interference Of late, along with the advancement of precision machining technology, the requirement of super precision measurement increases as time goes on, and the accuracy of standard scale which is a basis of precision measurement has been cognized as a criterion of industrial development in a nationl. In this paper, we described on technology by which we could carve scale lines thru optical method under the condition of laboratory by using the coherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurement of length. Hence in this research in the case of setting scale interval to 20 ${\mu}m$, we employed super precision scale-carving device associated with Ar laser and acousto optic modulator in lieu of flashing lamp scale-carving device, and we obtained as experimental result superior linear scales carved within the accuracy of ${\pm}$0.3${\mu}m$.