통합 검색 | Korea Science

김용우;이진석;김경식;한재원
- 한국레이저가공학회:학술대회논문집
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- 한국레이저가공학회 2006년도 춘계학술발표대회 논문집
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- pp.123-128
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- 2006
We constructed a micro-patterning system that build patterns on a photoresist coated wafer using laser direct writing system. Confocal microscope system was adapted for real-time auto-focusing of the laser writing lens to generate lines of uniform width.
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신보성;김정민;김재구;조성학;장원석;양성빈
- 한국소성가공학회:학술대회논문집
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- 한국소성가공학회 2003년도 추계학술대회논문집
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- pp.391-394
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- 2003
Laser direct writing process is developed 3rd harmonic Diode Pumped Solid State Laser with the near visible wavelength of 355 m sensitive polymer is irradiated by UV laser and developed using polymer solvent to obtain quasi-3D. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, laser focus and optical properties of polymer. This process could be to fabricate a single mode waveguide without expensive mask projection method. Experimentally, the patterns of trapezoidal shape were manufactured into dimension of 8.4 mm width and 7.5 mm height. Propagation loss of straight waveguide measured 3 dB/cm at 1,550 nm.
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김정민;신보성;김재구;장원석
- 한국정밀공학회지
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- 제20권12호
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- pp.42-47
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- 2003
The laser direct writing method has some advantages of being maskless, allowing rapid and inexpensive prototyping in comparison to conventional mask-based photolithography. In general, there are two kinds of laser direct writing methods such as the laser ablation method and the laser polymerization method. The laser polymerization method was studied fur manufacturing waveguide in this paper. It is important to reduce line width for image mode waveguides, so some investigations will be carried out in various conditions of process parameters such as laser power, writing speed, focusing height and optical properties of polymer. Experimentally, the optical waveguide was manufactured trapezoid shape. Through SEM the waveguide was 20 ${\mu}{\textrm}{m}$ width and 7.4 ${\mu}{\textrm}{m}$ height.
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강희신;서정;이제훈;김정오
- 한국정밀공학회:학술대회논문집
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- 한국정밀공학회 2004년도 춘계학술대회 논문요약집
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- pp.238-238
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- 2004
폴리머는 20세기 중반부터 그 사용량이 급격히 늘어나고 있고 또한 사용범위도 매우 광범위해진 중요한 재료이다. 석유화학공업의 발달과 더불어 초기의 고분자공업은 범용수지의 생산에 주로 의존하였으나 최근에는 용도가 다양해지고 기능화 되면서 소량, 고가의 기능성 고분자재료들이 많이 나타나고 있다.(중략)
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