• Title/Summary/Keyword: 레이저 직접묘화

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Deposition of Micropattern using The Laser Direct Writing Method with a polymer coating layer (폴리머 코팅층 레이저 직접묘화법을 이용한 미세패턴증착)

  • Lee, Bong-Gu
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.15 no.12
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    • pp.6980-6985
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    • 2014
  • A micro-conductive pattern was fabricated on an insulating substrate ($SiO_2$) surface using a laser direct writing method. In the LIFT process, when the laser beam irradiates a thin metal film, the photon energy is absorbed by the film and converted to thermal energy, and the thermal decomposition reaction produced by the resulting heat conduction forms a deposit on the substrate. The resistivity of the micro-electrodes deposited through LIFT process with and without polymer coating was measured. The results showed that the electric conductivity of the micro-pattern and micro-structure can be increased approximatly two times when the deposited micropattern is fabricated through a LIFT process with a polymer coating, compared to the case without a polymer coating.

Direct Patterning Technology of Indium Tin Oxide Layer using Nd:$YVO_4$ Laser Beam (Nd:$YVO_4$ 레이저 빔을 이용한 인듐 주석 산화물 직접 묘화 기술)

  • Kim, Kwang-Ho;Kwon, Sang-Jik
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.45 no.11
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    • pp.8-12
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    • 2008
  • For the reduction of fabrication cost and process time of AC plasma display panel (PDP), indium tin oxide (ITO) layer was patterned as bus electrode using Nd:$YVO_4$ laser. In comparison with the chemically wet etched ITO patterns, laser ablated ITO patterns showed the formation of shoulders and ripple-like structures at the edge of the ITO lines. For the reduction of shoulders and ripple-like structures, pulse repetition rate and scan velocity of laser was changed. In addition, we analyzed a discharge characteristic of PDP test panel to observe how the shoulders and ripple-like structures influence on the PDP. Based on experimental results, the pattern etched at the 500 mm/s and 40 kHz was better than any other condition. From this experiment we could see the possibility of the laser direct patterning for the application to the patterning of ITO in AC-PDP.