• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.08a
• /
• pp.81-81
• /
• 2013

반도체, LCD, MEMs 등 미세 전자소자의 제작과 깊은 관련이 있는 IT 산업은 자동차 산업과 함께 세계 경제를 이끌고 있는 핵심 산업이며, 그 발전 가능성이 크다고 할 수 있다. 이 중 반도체, LCD 공정 기술에 관해서 대한민국은 세계를 선도하여 시장을 이끌어 나가고 있는 실정이다. 이들의 공정기술은 주로 높은 수율(yield)을 기반으로 한 대량 생산 기술에 초점이 맞추어져 있기 때문에, 현재와 같은 첨예한 가격 경쟁력이 요구되는 시대에서 공정 기술 개발을 통해 수율을 최대한으로 이끌어 내는 것이 현재 반도체를 비롯한 미세소자 산업이 직면하고 있는 하나의 중대한 과제라 할 수 있다. 특히 반도체공정에 있어 발전을 거듭하여 현재 20 nm 수준의 선폭을 갖는 소자들의 양산이 계획 있는데 이와 같은 나노미터급 선폭을 갖는 소자 양산과 관련된 CD (critical dimension)의 감소는 공차의 감소를 유발시키고 있으며, 패널의 양산에 있어서 생산 효율 증가를 위한 기판 크기의 대형화가 이루어지고 있다. 또한, 소자의 집적도를 높이기 위하여 높은 종횡비(aspect ratio)를 요구하는 공정이 일반화됨에 따라 단일 웨이퍼 내에서의 공정의 균일도(With in wafer uniformity, WIWU) 및 공정이 진행되는 시간에 따른 균일도(Wafer to wafer uniformity)의 변화 양상에 대한 파악을 통한 공정 진단에 대한 요구가 급증하고 있는 현실이다. 반도체 및 LCD 공정에 있어서 공정 균일도의 감시 및 향상을 위하여 박막, 증착, 식각의 주요 공정에 널리 사용되고 있는 플라즈마의 균일도(uniformity)를 파악하고 실시간으로 감시하는 것이 반드시 필요하며, 플라즈마의 균일도를 파악한다는 것은 플라즈마의 기판 상의 공간적 분포(radial direction)를 확인하여 보는 것을 의미한다. 현재까지 플라즈마의 공간적 분포를 진단하는 대표적인 방법으로는 랭뮤어 탐침(Langmuir Probe), 레이저 유도 형광법(Laser Induced Fluorescence, LIF) 그리고 광섬유를 이용한 발광분광법(Optical Emission Spectroscopy, OES)등이 있으나 랭뮤어 탐침은 플라즈마 본연의 상태에서 섭동(pertubation) 현상에 의한 교란, 이온에너지 측정의 한계로 인하여 공정의 실시간 감시에 적합하지 않으며, 레이저 유도 형광법은 측정 물질의 제한성 때문에 플라즈마 내부에 존재하는 다양한 종의 거동을 살필 수 없다는 단점 및 장치의 설치와 정렬(alignment)이 상대적으로 어려워 산업 현장에서 사용하기에 한계가 있다. 본 연구에서는 최소 50 cm에서 최대 400 cm까지 플라즈마 내 측정 거리에서 최대 20 mm 공간 분해가 가능한 광 수광 시스템 및 플라즈마 공정에서의 라디칼의 상태 변화를 분광학적 비접촉 방법으로 계측할 수 있는 발광 분광 분석기를 접목하여 플라즈마 챔버 내의 라디칼 공간 분포를 계측할 수 있는 진단 센서를 고안하고 이를 실 공정에 적용하여 보았다. 플라즈마 증착 및 식각 공정에서 형성된 박막의 두께 및 식각률과 공간 분해발광 분석법을 통하여 계측된 결과와의 매우 높은 상관관계를 확인하였다.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.26 no.6
• /
• pp.817-822
• /
• 2002

Sooting characteristics of counterflow ethylene/propane mixture flames have been experimentally studied to investigate the fuel structure effect on PHM and soot formation. Laser-induced incandescene and laser-induced fluorescene techniques were employed to measure soot volume fraction and polycyclic aromatic hydrocarbon (PAH) concentration, respectively. Importance of $C_{3-}$species on PAH growth as well as the H-abstraction-C$_2$ $H_2$addition (HACA) mechanism has been emphasized, considering that PAH growth rate is greater for with mixed fuel than fer pure fuel flames. It was also confirmed that HACA pathways are the dominant soot growth mechanism. A new PAH growth model including both $C_{2-}$ and $C_{3-}$growth mechanisms is proposed based on the experimental results.

• 한국가시화정보학회:학술대회논문집
• /
• 2003.11a
• /
• pp.107-110
• /
• 2003

Characteristics of PAH and soot formation in coflow diffusion flames of methane, methane, propane, and ethylene have been experimentally studied to investigate the temperature and fuel structure effect on soot formation. PAH and soot images were acquired by applying PAH LIF and LII techniques, respectively and temperature was measured using R-type thermocouple. Direct photographs of soot particles have also been taken by transmission electron microscopy (TEM) through a thermophoretic sampling. Comparison of PAH and soot formation between the aliphatic fuels has shown the importance of fuel structure effect in diffusion flames.

• Proceedings of the KSME Conference
• /
• 2002.08a
• /
• pp.353-356
• /
• 2002

Planar laser induced fluorescence(PLIF) has been widely used to obtain two dimensional fuel distribution. Preliminary investigation was performed to measure quantitative air excess ratio distribution in an engine fueled with LPG. It is known that fluorescence signal from acetone as a fluorescent tracer is less sensitive to oxygen quenching than other dopants. Acetone was excited by KrF excimer laser (248nm) and its fluorescence image was acquired by ICCD camera with a cut-of filter to suppress Mie scattering from the laser light. For the purpose of quantifying PLIF signal, an image processing method including the correction of laser sheet beam profile was suggested. Raw images were divided by each intensity of laser energy and profile of laser sheet beam. Inhomogeneous fluorescence images scaled with the reference data, which was taken by a calibration process, were converted to air excess ratio distribution. This investigation showed instantaneous quantitative measurement of planar air excess ratio distribution for gaseous fuel.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.27 no.10
• /
• pp.1370-1376
• /
• 2003

The investigation of liquid fuel film on the cylinder liner is an essential to understand the engine-out hydrocarbon emissions formation in SI engines. In this research, two-dimensional visualization was carried out to investigate the liquid fuel film on the quartz liner in the optical engine. For this, the optical engine with hydraulic system was designed based on the commercial SI engine. The visualization was based on the laser-induced fluorescence with total reflection technique. Using a quartz liner and a special lens, only the liquid fuel film on the liner was visualized. With using this technique, the distribution of the fuel film on the cylinder liner was measured for different engine conditions and injection timing in the optical engine.

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2003.05b
• /
• pp.51-52
• /
• 2003

대기 중에서 HOx(OH, H $O_2$) 라디칼은 매우 중요한 산화제로, 대류권내 광화학 반응에 있어 그 역할이 핵심적이라 할 수 있다. 이러한 OH 라디칼의 정확한 농도를 측정하는 것은 대기의 산화능, 기후 변화 및 대기 중의 광화학 반응을 보다 정확히 이해하기 위해 매우 필요한 연구이다. 그러나 OH를 비롯한 HOx 라디컬의 농도 측정은 이들이 라디칼이기 때문에 매우 어려운 것이 사실이다. 즉, 이들은 대기 내에 존재하는 양이 절대적으로 적고 (OH: $10^{6}$molecules cm-$^3$, H $O_2$: $10^{8}$molecules cm-$^3$), 반응성이 커서 수명이 짧기 때문에 측정에 많은 어려움이 따른다. (중략)

• Transactions of the Korean Society of Automotive Engineers
• /
• v.11 no.6
• /
• pp.7-13
• /
• 2003

The purpose of this study is to investigate the effect of the in-cylinder flows and different injection timings on fuel behavior in the cylinder of a GDI engine. Three different flows types induced by using masked port, unmasked port, and port deactivation were tumble, swirl&tumble, and high swirl respectively. LIEF technique was applied to investigate the mixture formation and fuel distribution at ignition time in the transparent engine with optical access through the piston top and upper part of cylinder liner. Injection timings of 180,90, and 60 degrees before TDC were examined. It was found that tumble flow was more effective on the homogeneous mixture formation than other flow and swirl flow transported more fuel vapor to the exhaust side at early injection mode, and swirl and swirl & tumble flow made fuel vapor concentrate around the cylinder center at late injection mode.

• Journal of Advanced Marine Engineering and Technology
• /
• v.26 no.3
• /
• pp.362-374
• /
• 2002

For the purpose of development of a GDI engine, the in-cylinder phenomena, such as the spray behaviors, fuel distributions, unburned fuel, and flame characteristics were investigated in a single cylinder GDI engine. The GDI engine was equipped with a swirl type electronic injector and SCV(Swirl Control Valve). PLIF(Planar Laser Induced Fluorescence) system with KrF Excimer laser was used far the measurements of fuel distributions. The effects of the injector specifications, such as the spray cone angle and the offset angle on the in-cylinder phenomena were investigated. As a result, it was found that the injected fuel collided with the bottom of the bowl and moved upward along the exhaust side wall of piston bowl. This fuel vapor played an important role in the instance of spark ignition. The unburned fuel and flame characteristics were greatly influenced by the injector specifications.

• 한국연소학회:학술대회논문집
• /
• 2002.06a
• /
• pp.61-67
• /
• 2002

Characteristics of lifted flames in axisymmetric laminar coflow jets have been investigated experimentally. Approximate equations for velocity and concentration with virtual origins have been proposed to analyze the behavior of flames in coflow jets. Measuring Rayleigh intensity to investigate the concentration field. proposed approximate equations were confirmed. By using the results of OH PLIF, direct photography and Rayleigh scattering measurement, it is shown that the locations of maximum intensity in direct photography coincide with the tribrachial points in axisymmetric jets and the tribrachial points travel on the stoichiometric contour. For coflow jets, the experimental results of liftoff height have been successfully correlated with nozzle exit velocity using predicted behavior from proposed approximated equations. These results substantiate the stabilization mechanism in coflow jet is based on the balance between flame propagation speed and axial flow velocity, same as for the free jets.

• Journal of ILASS-Korea
• /
• v.6 no.3
• /
• pp.1-7
• /
• 2001

In this study, quantitative measurement of nitric oxide concentration distributions visualization were investigated in the laminar $CH_4/O_2N_2$ nixed flame by Planar laser-induced fluorescence(PLIF). The NO A-X (0,0) vibrational band around 226nm was excited using a XeCl excimer-pumped dye laser. Selecting an appropriate NO transition minimizes interference from Rayleigh scattering and $O_2$ fluorescence. The measurements were taken in $CH_4/O_2N_2$ premixed flame with equivalence ratios varying from $1.0{\sim}1.6$, and a fixed flow rate of 3slpm. NO was found to produce primarily between an inner premixed and an outer nonpremixed flame front, and total NO concentration is raised when equivalence ratios increase. These results suggest that prompt NO is likely to contribute to MO formation in $CH_4/O_2N_2$ premixed flame. Furthermore, this trend was well matched with previous works.