• Title/Summary/Keyword: 레이저어블레이션

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Simulations for Internal Defect Inspection Using Laser Generated Ultrasonic Wave in Ablation Regime (어블레이션 영역 레이저 초음파의 시뮬레이션과 내부결함 검사)

  • Kim, Jin-Gyum;Choi, Sungho;Jhang, Kyung-Young
    • Journal of the Korean Society for Nondestructive Testing
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    • v.34 no.3
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    • pp.226-232
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    • 2014
  • In the present study, the characteristics of laser ultrasound in the ablation regime are investigated using simulations and experiments. The laser ultrasonic technique has been recognized as a noncontact method in the field of nondestructive tests (NDTs). In hostile environments (such as hot temperatures), this method has various advantages over the conventional contact ultrasonic method. In particular, in the ablation regime, the laser ultrasonic technique is suitable for inspecting internal defects because of the high amplitude and directivity of the longitudinal wave. In this paper, a simulation model for laser ultrasound in the ablation regime was developed. This model was subsequently applied to a defective specimen using the B-scan method to locate defects. Finally, we performed an experimental test to verify the simulation results. Consequently, the simulation demonstrated good agreement with the experimental test.

A study on the laser ablation of the copper metal foil by 355nm pulse laser (355nm 펄스 레이저를 이용한 구리 박막의 레이저 어블레이션에 대한 연구)

  • Oh J.Y;Shin B.S.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2006.05a
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    • pp.667-668
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    • 2006
  • Usually nanosecond pulsing laser ablation of metal is under thermal effect. Many studies of the theoretical analysis and modeling to predict a result of laser ablation of metal are suggested on the basis of the photothermal mechanism. In this paper, we investigate the etching depth and laser fluence of laser ablation of copper films. We proposed the simplified SSB Model(Srinivasan-Smrtic-Babudp model) to study the photothermal effect of nanosecond pulsing laser ablation of copper thin metal. The experimental results were obtained by using the 355nm DPSS $Nd:YVO_4$ laser.

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Laser application in 3-D micromachining (레이져를 이용한 3차원 형상가공에 관한 연구)

  • 윤경구;이성국;황경현
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1995.10a
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    • pp.75-78
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    • 1995
  • This paper presents the feasibility of laser ablation process in 3-D micro machining of MEMS (micro Electro Mechanical System)parts. The micro machining characteristics of polymer(Energy fluence, pulse repetition rate, number of pulse, ablation rate)are investigated and 3-D micro machined samples are demonstrated.

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DPSS UV Laser Projection Ablation of IC Substrates using an INVAR Mask (INVAR 마스크 응용 반도체 기판 소재의 고체 UV 레이저 프로젝션 어블레이션)

  • Sohn, Hyonkee;Choe, Hanseop;Park, Jong-Sig
    • Laser Solutions
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    • v.15 no.4
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    • pp.16-19
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    • 2012
  • Due to the fact that the dimensions of circuit lines of IC substrates have been forecast to reduce rapidly, engraving the circuit line patterns with laser has emerged as a promising alternative. To engrave circuit line patterns in an IC substrate, we used a projection ablation technique in which a metal (INVAR) mask and a DPSS UV laser instead of an excimer laser are used. Results showed that the circuit line patterns engraved in the IC substrate have a width of about 15um and a depth of $13{\mu}m$. This indicates that the projection ablation with a metal mask and a DPSS UV laser could feasibly replace the semi-additive process (SAP).

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Effects of Process Parameters on Laser Ablation Based Machining and Measurements (레이저 어블레이션 기반 가공 및 계측에서 공정변수의 영향)

  • Jeong, Sung-Ho;Lee, Seok-Hee
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.12
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    • pp.1359-1365
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    • 2011
  • The changes of ablation characteristics with respect to laser parameters and material parameters during pulsed laser ablation of solids were discussed with experimental results. Although laser wavelength, laser pulse width, and laser pulse energy are the primary factors to be considered, it is shown that other parameters such as laser spot size and material properties also critically influence on the ablation results. It is further demonstrated that the microstructural characteristics of the target can lead to completely different ablation rate and surface morphology.