• Title/Summary/Keyword: 레이저간섭계

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A Possible Application of the Nonuniform Electric Field Measurement Using Laser Interferometer and Pockels Effect (레이저 간섭계와 포켈스 효과를 이용한 불평등 전계 측정)

  • Gang, Won-Jong;Gu, Ja-Yun
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.51 no.6
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    • pp.240-245
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    • 2002
  • In this paper, a novel optical measuring system for the measurement of nonuniform electric field was proposed. The electric field distorted by the discharges was detected through proposed optical measuring system based on the Pockets effect and Mach-Zehnder interferometer. In order to produce distorted electric field, corona discharge was generated from needle-plane electrode in air and detected by optical measuring system. This optical measuring system is constructed by He-Ne laser, single mode optical fiber, $2{\times}2$ 50/50 beam splitter, $LiNbO_3$ Pockets cell, photo detector and PC. In this system, output signal of Pockels sensor is measured by digital oscilloscope and transferred to the PC for recording and statistical processing. Through this paper, a promising possibilities of proto-type optical measuring system were evinced.

전이금속이 도핑된 Si 박막의 열처리 효과에 따른 구조 및 자기적 성질

  • Seo, Ju-Yeong;Park, Sang-U;Lee, Gyeong-Su;Song, Hu-Yeong;Kim, Eun-Gyu;Son, Yun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.184-184
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    • 2011
  • 반도체 전자 소자의 초고집적회로(VLSI, Very Large Scale Integrated Circuit)가 수년간 지속됨에 따라 실리콘 기반으로 하는 MOSFET 성능의 한계에 도달하게 되었다. 재료 물성, 축소, 소자 공정 등에 대한 원인으로 이를 극복하고자 하는 재료와 성능향상에 관한 연구가 진행되고 있다. 이에 기존 시스템의 전자의 전하 정보만을 응용하는 것이 아니라 전자의 스핀 정보까지 고려하는 스핀트로닉스 연구분야가 주목을 받고 있다. Spin-FET는 스핀 주입, 스핀 조절, 스핀측정 등으로 나뉘어 연구되고 있으며 이 중 스핀 주입의 효율 향상이 우선시 해결되어야 한다. 일반적으로 스핀 주입 과정에서 소스가 되는 강자성체와 스핀 확산 거리가 긴 반도체 물질과의 Conductance mismatch가 문제되고 있다. 이에 자성 반도체는 근본적인 문제를 해결하고 반도체와 자성체의 특성을 동시에 나타내는 물질로써, Si과 Ge (4족) 등의 반도체뿐만 아니라, GaAs, InP (3-5족), ZnO, ZnTe (2-6족) 등의 반도체 또한 많은 연구가 이루어지고 있다. 자성 반도체에서 해결해야 할 가장 큰 문제는 물질이 자성을 잃는 Curie 온도를 상온 이상으로 높이는 것이다. 이에 본 연구는 전이금속이 도핑된 4족 Si 반도체 박막을 성장하고 후처리 공정을 통하여 나타나는 구조적, 자기적 특성을 연구하였다. 펄스 레이저 증착 방법을 통하여 p-type Si 기판위에 전이금속 Fe이 도핑된 박막을 500 nm 로 성장하였다. 성장 온도는 $250^{\circ}C$로 하였고, 성장 분압은 $3 {\times}10^{-3}$Torr 로 유지하며 $N_2$ 가스를 사용하였다. 구조적 결과를 보기 위해 X선 회절 분석과 원자력 현미경 결과를 확인하였고, 자기적 특성을 확인하기 위해 저온에서 초전도 양자 간섭계로 조사하였다. XRD를 통해 (002)면, (004)면의 Si 기판 결정을 보았으며, Fe 관련된 이차상이 형성됨을 예측해 보았다. ($Fe_3Si$, $Fe_2Si$ 등) 초전도 양자 간섭계에서 20 K에서 측정한 이력 현상을 관찰하고, 온도변화에 따른 전체 자기모멘트를 관찰하였으며 이는 상온에서도 강자성 특성이 나타남을 확인하였다.

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A Study on Performance Evaluation of 3-Axis Pipe Profile-Cutting Machine (3축 파이프 형상 절단기의 성능평가에 관한 연구)

  • Lho, Tae-Jung;Lee, Wook-Jin;Kim, Hwa-Il
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.11 no.6
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    • pp.1955-1960
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    • 2010
  • A performance of CNC 3-axis pipe profile-cutting machine we developed was evaluated by measuring and verifying a positioning accuracy of its feeding unit and a cutting shape accuracy of pipe workpiece. The positioning accuracy was verified by comparing moving distance actuated by PLC motion controller with actual one measured by a laser interferometer. The cutting shape accuracy was also verified by comparing a cutting shape obtained through scanning and 3D modeling the pipe workpiece with that through CL data.

KrF 엑시머 레이저를 이용한 웨이퍼 스텝퍼의 제작 및 성능분석

  • 이종현;최부연;김도훈;장원익;이용일;이진효
    • Korean Journal of Optics and Photonics
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    • v.4 no.1
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    • pp.15-21
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    • 1993
  • This paper describes the design and development of a KrF excimer laser stepper and discusses the detailed system parameters and characterization data obtained from the performance test. We have developed a deep UV step-and-repeat system, operating at 248 nm, by retrofitting a commercial modules such as KrF excimer laser, precision wafer stage and fused silica illumination and 5X projection optics of numerical aperture 0.42. What we have developed, to the basic structure, are wafer alignment optics, reticle alignment system, autofocusing/leveling mechanisms and environment chamber. Finally, all these subsystem were integrated under the control of microprocessor-based controllers and computer. The wafer alignment system comprises the OFF-AXIS and the TTL alignment. The OFF-AXIS alignment system was realized with two kinds of optics. One is the magnification system with the image processing technique and the other is He-Ne laser diffraction type system using the alignment grating on the wafer. 'The TTL alignment system employs a dual beam inteferometric method, which takes advantages of higher diffraction efficiency compared with other TTL type alignment systems. As the results, alignment accuracy for OFF-AXIS and TTL alignment system were obtained within 0.1 $\mu\textrm{m}$/ 3 $\sigma$ for the various substrate on the wafers. The wafer focusing and leveling system is modified version of the conventional systems using position sensitive detectors (PSD). This type of detection method showed focusing and leveling accuracies of about $\pm$ 0.1 $\mu\textrm{m}$ and $\pm$ 0.5 arcsec, respectively. From the CD measurement, we obtained 0.4 $\mu\textrm{m}$ resolution features over the full field with routine use, and 0.3 $\mu\textrm{m}$ resolution was attainable under more strict conditions.

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The Development and Installation of the DNSM 1meter Telescope

  • Choi, Eunwoo;Hur, Hyeonoh;Jeon, Hae-Jin;Hong, Daegil;Choi, Dong-Soo;Kim, Kyoung-Rock;Cho, Young-Dong;Kwak, Tae-Yoon
    • The Bulletin of The Korean Astronomical Society
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    • v.41 no.2
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    • pp.53.1-53.1
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    • 2016
  • 국립대구과학관 천체 관측 핵심시설인 1m 반사망원경을 개발하고 설치 완료하였다. 본 발표에서는 국립대구과학관 1m 망원경의 시스템 사양과 개발 및 설치과정을 전반적으로 기술하고 앞으로의 활용계획에 대해 소개하고자 한다. 이번에 도입된 주망원경은 지난 2014년 11월부터 광학계 및 마운트 설계를 시작으로 2016년 5월까지 약 1년 6개월의 개발기간을 거쳐 설치 완료되었다. 순수 국내기술로 개발된 주망원경은 주경 1,000mm(부경 300mm)의 유효구경을 가지며 후방초점거리가 700mm인 초점비 F/8의 리치-크레티앙 방식의 광학계로 설계되었다. 레이저 간섭계를 이용하여 거울면 전체의 형상 오차를 정밀하게 측정한 결과 주경면 PV < ${\lambda}/4$, RMS < ${\lambda}/20$, 부경면 PV < ${\lambda}/10$, RMS < ${\lambda}/50$의 형상 정밀도를 가진다. 포크형태의 경위대식 마운트 구조로 방위각, 고도 양축과 디로테이터에 각각 모터가 장착되어 움직이는 다이렉트 드라이브 방식으로 구동된다. 최대 구동속도는 $2^{\circ}/s$이상, 포인팅 정밀도는 2'이하, 10분간 추적 정밀도는 3"이하(10분간 오토가이더 추적 정밀도는 1"이하)의 구동 성능을 가진다. 제어용 컨트롤 시스템은 JTCS(Justek Telescope Control System)를 사용한다. 성능 평가를 위해 시험 관측된 10~13등급 사이 10개의 별들에 대한 FWHM 측정결과는 4~5" 범위에 있다. 앞으로 지속적인 성능 평가와 업그레이드를 통해 향후 정밀도를 높여 학술 연구용으로 공개할 예정이다. 이번 국립대구과학관 1m 주망원경의 도입으로 지역 천문교육 프로그램이 한 단계 더 도약할 수 있을 것으로 기대한다.

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A study of the hologram which records the interference of light with computer (컴퓨터로 빛의 간섭을 기록하는 홀로그램(CGH)의 특성 연구)

  • Lee, Jeong-Yeong;Jang, Woo-Yeong
    • Journal of Korean Ophthalmic Optics Society
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    • v.10 no.4
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    • pp.305-312
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    • 2005
  • In this thesis, Lohmann's algorithm and FFT (fast Fourier transform) are used to synthesize binary-phase holograms. FFT computing is carried out for the calculation of complex wavefronts of $128{\times}128$ sampling points of an object that is numerically specified. Then using the Lohmann's algorithm, the amplitude and the phase of complex wavefronts are encoded in binary holograms on each sampling points. PC (personal computer) and laser printer are used to plot binary-phase holograms and CGH (computer generated holograms) films are obtained from this plot by photographic reduction. Holographic images of numerically specified objects are reconstructed from the He-Ne laser and the inverse Fourier optics system. We estimate the quality of holographic images according to the sampling number, application of random phase, amplitude clipping and bleaching the CGH film. We derive optimized conditions to reconstruct better holographic images and to reduce the speckle noise. FFT and Lohmann's algorithm are implemented with MS Visual BASIC 6.0 for the programming of binary-phase hologram.

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Analysis of Zig-Zag Error in Gantry Type Machine (문형 공작기계의 Zig-Zag 오차 분석)

  • Lee, Eung Suk;Lee, Seung Bum;Kim, Gi Hwan;Min, Deul Le;Park, Jong Bum;Park, Min Su;Jin, E Lim;Kim, Tae Sung
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.39 no.2
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    • pp.157-162
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    • 2015
  • A large five-axis gantry-type machine performs cutting operations by moving the gantry, along with a bed. During operation, there are three sources of position (zig-zag) errors: 1) the position difference between two control motors on the X axis, 2) friction difference from the different column weights, and 3) torque of the rotating spindle. This study improved the performance of a gantry-type machine by analyzing these three error sources. We changed the mass of a column in the gantry structure and measured the effect on the friction result. We also studied the spindle torque influences on the movement performance of the gantry in relation to the spindle rotation.

Improvement of size measurement polystyrene spheres of diameters 3$\mu$m and 10$\mu$m by optical microscope with CCD camera (CCD 카메라가 장착된 광학현미경을 사용한 폴리스티렌구 (3 $\mu$m와 10 $\mu$m)의 평균지름측정)

  • 정기영;박병천;깅주식;송원영;오범환
    • Korean Journal of Optics and Photonics
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    • v.9 no.6
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    • pp.362-367
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    • 1998
  • Center Distance Finding (CDF) is a technique to find the sphere diameter by measuring the distance between two contacting spheres. The focal spots of the sphere clusters are formed in the back-focal plane by the transmission-mode optical microscope with the pseudothermal illumination source. Digital images taken by the CCD camera were processed by the software called Global Lab Image. The centers of the focal spots are found and the spot positions are expressed in terms of the CCD pixel elements, whose coordinate are calibrated by a heterodyne interferometer. The new CDF measurement system has been developed, which are more advantageous in time and convenience than the existing system, while the measurement uncertainly remains sufficient for its use as a magnification standard for optical microscopy. Two kinds of polystyrene spheres whose nominal diameters 3 and 10 $\mu\textrm{m}$ (NIST SRM 1962 and 1960) are measured with the uncertainly less than 1% at the confidence level of 99%, and the results are compared with the results of National Institute of Standards and Technology.

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Design of Polymer Composites for Effective Shockwave Attenuation (충격파 완화 복합재의 설계)

  • Gyeongmin Park;Seungrae Cho;Hyejin Kim;Jaejun Lee
    • Composites Research
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    • v.37 no.1
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    • pp.21-31
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    • 2024
  • This review paper investigates the use of shockwave attenuating materials within composite structures to enhance personnel protection against blast-induced traumatic brain injury (bTBI). This paper also introduces experimental methodologies exploited in the generation and measurement of shockwaves to evaluate the performance of the shock dissipating composites. The generation of shockwaves is elucidated through diverse approaches such as high-energy explosives, shock tubes, lasers, and laser-flyer techniques. Evaluation of shockwave propagation and attenuation involves the utilization of cutting-edge techniques, including piezoelectric, interferometer, electromagnetic induction, and streak camera methods. This paper investigates phase-separated materials, including polyurea and ionic liquids, and provides insight into composite structures in the quest for shockwave pressure attenuation. By synthesizing and analyzing the findings from these experimental approaches, this review aims to contribute valuable insights to the advancement of protective measures against blast-induced traumatic brain injuries.

Development of a Signal Conditioning Circuit for Capacitive Displacement Sensors and Performance Evaluation (정전용량형 변위 센서 신호 처리 회로 개발 및 성능 평가)

  • Kim, Jong-Ahn;Kim, Jae-Wan;Eom, Tae-Bong;Kang, Chu-Shik
    • Journal of the Korean Society for Precision Engineering
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    • v.24 no.9
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    • pp.60-67
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    • 2007
  • A signal conditioning circuit for capacitive displacement sensors was developed using a high frequency modulation/demodulation method, and its performance was evaluated. Since capacitive displacement sensors can achieve high resolution and linearity, they have been widely used as precision sensors within the range of several hundred micrometers. However, they inherently have a limitation in low frequency range and some nonlinearity characteristics and so a specially designed signal conditioning circuit is needed to handle these properties. The developed signal processing circuit consists of three parts: linearization, modulation/demodulation, and nonlinearity compensation. Each part was constructed discretely using several IC chips and passive elements. An evaluation system for precision displacement sensors was developed using a laser interferometer, a precision stage, and a PID position controller. The signal processing circuit was tested using the evaluation system in the respect of resolution, repeatability, linearity, and so on. From the experimental results, we know that a highly linear voltage output can be obtained successfully, which is proportional to displacement and the nonlinearity of output is less than 0.02% of full range. However, in the future, further investigation is required to reduce noise level and phase delay due to a low-pass filter. The evaluation system also can be applied effectively to calibration and evaluation of precision sensors and stages.