• Journal of the Microelectronics and Packaging Society
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• v.19 no.1
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• pp.61-66
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• 2012

Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.

• Journal of the Korean Institute of Landscape Architecture
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• v.50 no.1
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• pp.68-77
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• 2022

The human thermal environment in an apartment complex located in Seoul was quantitatively analyzed to devise methods to modify human heat-related stresses in landscape and urban planning. Microclimatic data (air temperature, relative humidity, wind speed, and short- and long-wave radiation) were collected at 6 locations [Apt-center, roof (cement), roof (grass), ground, playground, and a tree-lined road] in the late spring and summer, and the data were used to estimate the human thermal sensation, physiological equivalent temperature (PET) and universal thermal climate index (UTCI). As a result, the playground location had the highest thermal environment, and the roof (grass) location had the lowest. The mean difference between the two locations was 0.8-1.1℃ in air temperature, 1.8-4.0% in relative humidity, and 7.5-8.0℃ in mean radiant temperature. In open space locations, the wind speed was 0.4-0.5 ms-1 higher than others. Also, a wind tunnel effect happened at the Apt-center location during the afternoon. For the human thermal sensation, PET and UTCI, the mean differences between the playground and roof (grass) locations were: 5.2℃ (Max. 11.7℃) in late spring and 5.4℃ (Max. 18.1℃) in summer in PET; and 3.0℃ (Max. 6.1℃) in late spring and 2.6℃ (Max. 9.8℃) in summer in UTCI. The mean differences indicated a level change in PET and 1/2 level in UTCI, and the maximum differences showed greater changes, 2-3 levels in PET, and 1-1.5 levels in UTCI. Moreover, the roof (grass) location gave 4.6℃ PET reduction and a 2.5℃ UTCI reduction in late spring, and a 4.4℃ PET reduction and a 2.0℃ UTCI reduction in the summer when compared with the roof (cement) location, which results in a 2/3 level change in PET and a 1/3 level in UTCI. Green infrastructure locations [roof (grass), ground, and a tree-lined road] were not statistically significant in the reduction of PET and UTCI in thermal environment modifying effects. The implementation of green infrastructure, such as rooftop gardens, grass pavement, and street tree planting, should be adopted in landscape planning and be employed for human thermal environment modification.

• Journal of the Korean Society of Marine Environment & Safety
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• v.29 no.4
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• pp.363-371
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• 2023

To construct a ship, blocks of various sizes must be moved and erected . In this process, lugs are used such that they match the block fastening method and various functions suitable for the characteristics of each shipyard facility. The sizes and shapes of the lugs vary depending on the weight and shape of the block structures. The structure is reinforced by welding the doubling pads to compensate for insufficient rigidity around the holes where the shackle is fastened. As for the method of designing lugs according to lifting loading conditions, a simple calculation based on the beam theory and structural analysis using numerical modeling are performed. In the case of the analytical method, a standardized evaluation method must be established because results may differ depending on the type of element and modeling method. The application of this ambiguous methodology may cause serious safety problems during the process of moving and turning-over blocks. In this study , the effects of various parameters are compared and analyzed through numerical structural analysis to determine the modeling conditions and evaluation method that can evaluate the actual structural response of the lug. The modeling technique that represents the plate part and weld bead around the lug hole provides the most realistic behavior results. The modeling results with the same conditions as those of the actual lug where only the weld bead is connected to the main body of the lug, showed a lower ulimated strength compared with the results obtained by applying the MPC load. The two-dimensional shell element is applied to reduce the modeling and analysis time, and a safety working load was verified to be predicted by reducing the thickness of the doubling pad by 85%. The results of the effects of various parameters reviewed in the study are expected to be used as good reference data for the lug design and safe working load prediction.