• Journal of the Korean Magnetics Society
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• v.12 no.3
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• pp.99-102
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• 2002

We fabricated TMR devices which have doubly oxidized tunnel barrier using plasma oxidation method to form homogeneously oxidized AlO tunnel barrier. We sputtered 10 $\AA$-bottom Al layer and oxidized it with oxidation time of 10 sec. Subsequent sputtering of 13 $\AA$-Al was performed and the metallic layer was oxidized for 50, 80, and 120 sec., respectively. The electrical resistance changed from 500 Ω to 2000 Ω with increase of oxidation time, while variation of MR ratio was little spreading 27∼31 % which is larger than that of TMR device of ordinary single tunnel barrier. We calculated effective barrier height and width by measuring I-V curves, from which we found the barrier height was 1.3∼1.8 eV sufficient for tunnel barrier, and the barrier width (<15.0 $\AA$) was smaller than physical thickness. Our results may be caused by insufficient oxidation of Al precursor into A1$_2$O$_3$. However, doubly oxidized tunnel barriers were superior to conventional single tunnel barrier in uniformity and density. Our results imply that we were able to improve MR ratio and tune resistance by employing doubly oxidized tunnel barrier process.

• Membrane Journal
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• v.20 no.4
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• pp.278-289
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• 2010

A series of composite membranes based on sulfonated poly(arylene ether sulfone) (SPAES) were prepared via addition of tetraethyl orthosilicate (TEOS) and solution casting method. The morphological structure, water uptake, proton conductivity of the resulting composite membranes were extensively investigated as function of the content of TEOS. By the sol-gel reaction, TEOS molecules were not completely converted to $SiO_2$ particles, but formed only oligomer-type. Also, EDS confirms that the resulting silicon dioxide was homogeneously distributed in the composite membranes. As the content of TEOS increased, the prepared membranes increased water uptake and proton conductivity at high temperature and low relative humidity condition. In particular, considerably high proton conductivity (0.015 S/cm) at $120^{\circ}C$ and 48%RH was demonstrated in the composite membrane containing 200% TEOS, which is 10 times greater than that of unmodified SPAES membrane. Also, the composite membranes were found to have enhanced thermal stability compared to the unmodified membrane.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.78-78
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• 2000

다결정 실리콘-게르마늄 (poly-SiGe)은 태양전지 개발에 있어서 중요한 물질이다. 우리는 소량의 Ge(x=0.05)으로부터 다량의 Ge(x=0.67)을 함유한 수소화된 비정질 실리콘-게르마늄 (a-SiGe:H) 박막의 고상결정화 과정을 ESR (electron spin resonance)방법으로 조사해보았다. 먼저 PECVD 방법으로 Corning 1737 glass 위에 a-Si1-xGex:H 박막을 증착시켰다. 증착가스는 SiH4, GeH4 가스를 썼으며, 기판온도는 20$0^{\circ}C$, r.f. 전력은 3W, 증착시 가스압력은 0.6 Torr 정도이었다. 증착된 a-SiGe:H 박막은 $600^{\circ}C$ N2 분위기에서 다시 가열되어 고상결정화 되었고, 결정화 정도는 XRD (111) peak의 세기로부터 구해졌다. ESR 측정은 상온 x-band 영역에서 수행되었다. 측정된 ESR스팩트럼은 두 개의 Gaussian 함수로써 Si dangling-bond와 Ge dangling-bond 신호로 분리되었다. 가열 초기의 a-SiGe:H 박막 결함들의 스핀밀도의 증가는 수소 이탈에 기인하고, 또 고상결정화 과정에서 결정화된 정도와 Ge-db 스핀밀도의 변화는 서로 깊은 상관관계가 있음을 알 수 있었다. 특히 Ge 함유량이 큰 박막 (x=0.21, 0.67)에서 뿐만 아니라 소량의 Ge이 함유된 박막(x=0.05)에서도 Ge dangling-bond가 Si dangliong-bond 보다 고상결정화 과정에서 더 중요한 역할을 한다는 것을 알수 있었다. 또한 초기 열처리시 Si-H, Ge-H 결합에서 H의 이탈로 인하여 나타나는 Si-dangling bond, Ge-dangling bond 스핀밀도의 최대 증가 시간은 x 값에 의존하였는데 이러한 결과는 x값에 의존하는 Si-H, Ge-H 해리에너리지로 설명되어 질 수 있다. 층의 두께가 500 미만인 커패시터의 경우에 TiN과 Si3N4 의 계면에서 형성되는 슬릿형 공동(slit-like void)에 의해 커패시터의 유전특성이 파괴된다는 사실을 알게 되었으며, 이러한 슬릿형 공동은 제조 공정 중 재료에 따른 열팽창 계수와 탄성 계수 등의 차이에 의해 형성된 잔류응력 상태가 유전막을 기준으로 압축응력에서 인장 응력으로 바뀌는 분포에 기인하였다는 사실을 확인하였다.SiO2 막을 약화시켜 절연막의 두께가 두꺼워졌음에도 기존의 SiO2 절연막의 절연 파괴 전압 및 누설 전류오 비교되는 특성을 가졌다. 이중막을 구성하고 있는 안티퓨즈의 ON-저항이 단일막과 비교해 비슷한 것을 볼 수 잇는데, 그 이유는 TiO2에 포함된 Ti가 필라멘트에 포함되어 있어 필라멘트의 저항을 감소시켰기 때문으로 사료된다. 결국 이중막을 구성시 ON-저항 증가에 의한 속도 저하 요인은 없다고 할 수 있다. 5V의 절연파괴 시간을 측정한느 TDDB 테스트 결과 1.1$\times$103 year로 기대수치인 수십 년보다 높아 제안된 안티퓨즈의 신뢰성을 확보 할 수 있었다. 제안된 안티퓨즈의 이중 절연막의 두께는 250 이고 프로그래밍 전압은 9.0V이고, 약 65$\Omega$의 on 저항을 얻을수 있었다.보았다.다.다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상 분사기술의 최적화에 의한 기능성 나노 입자 제조 기술을 확립하고 2차 오염 발생원인 유기계 항균제를 무기계 항균제로 대체할 수 있다. 이와 더불

• Membrane Journal
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• v.28 no.6
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• pp.379-387
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• 2018

This study was conducted to improve the membrane characteristics and performance by increasing hydrophilicity by adding additives to the ultrafiltration polysulfone (PSf) hollow fiber membrane. The mixed matrix membranes (MMMs) were prepared by dispersing 15 nm of fumed silica (FS) in the spinning solution at 0.1, 0.3 and 0.5 wt%. SEM analysis was carried out to confirm the cross-section and surface condition. It was confirmed that mean pore radius of the hollow fiber increased by 4 nm as FS was added. In addition, contact angle measurement was carried out for the hydrophilicity analysis of hollow fiber membranes, and it was confirmed that the hydrophilicity of MMMs were increased by adding of FS. In the case of water permeability, the membrane including FS showed 91~96 LMH and showed 5~11% more increase than PSf membrane. In the antifouling performance test, relative flux reduction ratios of FS mixed hollow fiber membranes were lower than that of PSf membranes, and it was confirmed that increase of hydrophilicity hinders adsorption of hydrophobic BSA on the membrane surface.

• Membrane Journal
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• v.32 no.2
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• pp.140-149
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• 2022

In this study, the conditions of low temperature and high pressure of biogas upgrading process using polysulfone membrane have been designed and tested to achieve the high recovery and efficiency corresponding to those of the highly selective polymeric materials. Polysulfone hollow fiber membrane with 4-component dope solution was spun via non-solvent induced phase separation. The hollow fiber membrane was mounted into a 1.5 inch housing. The effective area was 1.6 m², and its performance was examined in various operation temperatures and pressures. CO₂ and CH₄ permeances were 412 and 12.7 GPU at 20℃, and 280 and 3.6 GPU at -20℃, respectively, while the CO₂/CH₄ selectivity increased from 32.4 to 77.8. Single gas test was followed by the mixed gas experiments using single-stage and double stage where the membrane area ratio varied from 1:1 to 1:3. At the single-stage, CH₄ purity increased and the recovery decreased as the stage-cut increased. At the double stage, the area ratio of 1:3 showed the higher CH₄ recovery as decreasing the operation temperature at the same purity of CH₄ 97%. Finally, polysulfone hollow fiber membranes have yielded of both CH₄ purity and recovery of 97% at -20℃ and 16 barg.

• Journal of the Korean Chemical Society
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• v.47 no.5
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• pp.439-446
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• 2003

Surface-enhanced Raman(SER) spectroscopy was utilized to investigate the adorption orientation of the 4-biphenylcarboxylic acid(BPCA) derivatives, such as 4'-cyano-BPCA(c-BPCA), 4'-mercapto-BPCA(m-BPCA), and 4'-amino-BPCA(a-BPCA), which were adsorbed on Au and Ag colloid monolayers. For the systematic approach, information regarding the adsorption behavior of benzoic acid, biphenyl, and BPCA was applied to the target molecules. From the spectral behaviors of benzene ring, C-H stretching, carboxylate anion, and the other finger printing vibrational modes, it was concluded that only the m-BPCA was adsorbed tilt with thiol group being adsorbed on Au surface, whereas the other molecules were adsorbed flat on both Au and Ag surfaces.

• Electrical & Electronic Materials
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• v.6 no.2
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• pp.152-160
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• 1993

MNOS 구조에서 23.angs.의 얇은 산화막을 성장한 후 LPCVD방법으로 S $i_{3}$ $N_{4}$막을 각각 530.angs., 1000.angs. 두께로 달리 증착했을때 비휘발성 기억동작에 미치는 전하주입 및 기억유지 특성을 자동 .DELTA. $V_{FB}$ 측정 시스템을 제작하여 측정하였다. 전하주입 측정은 펄스전압 인가전의 초기 플랫밴드전압 0V.+-.10mV, 펄스폭 100ms 이내로 설정하고 단일 펄스전압을 인가하였다. 기억유지특성은 기억트랩에 전하를 포획시킨 직후 $V_{FB}$ 유지와 0V로 유지한 상태에서 $10^{4}$sec까지 측정하였다. 본 논문에서 유도된 산화막 전계에 대한 터넬확률을 적용한 전하주입 이론식은 실험결과와 잘 일치하였으며 본 해석방법으로 직접기억트랩밀도와 이탈진도수를 동시에 평가할 수 있었다. 기억트랩의 포획전하는 실리콘쪽으로의 역 터넬링으로 인한 조기감쇠가 컸으며 $V_{FB}$ 유지인 상태가 초기 감쇠율이 0V로 유지한 경우 보다 낮았다. 그리고 기억유지특성은 S $i_{3}$ $N_{4}$막의 두께보다 기억트랩밀도의 의존성이 크며 S $i_{3}$ $N_{4}$막두께의 축소로 기록전압을 저전압화시킬 수 있음을 알 수 있었다.

• Membrane Journal
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• v.17 no.3
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• pp.233-243
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• 2007

In this study, a separate. which is a microporous membrane based on poly(vinylidene fluoride)(PVdF) was prepared by phase inversion method. Being prepared by dissolving the PVdF in the N,N'-dimethylformamide(DMF) with mechanical stirring, the homogenous casting solution was cast onto a clean glass plate. Pore size and porosity of the membranes were controlled by changing preparation condition. The highest porosity of the membrane was 78.6%. The mechanical property of the membrane was determined by using an universal testing machine(UTM). The morphology of the membrane was investigated by scanning electron microscopy(SEM). The cross-section of the membrane shows sponge-like small micro-pores.

• Membrane Journal
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• v.28 no.4
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• pp.233-242
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• 2018

To study gas membrane using GO (graphene oxide), the PEBAX [poly(ether-block-amide)]-GO polymer composite membrane was prepared by adding GO to PEBAX. Through this composite membrane, gas permeation characteristics for $H_2$, $N_2$, $CH_4$, and $CO_2$ were studied. As a result of the gas permeation test, the permeability of $N_2$, $CH_4$, and $CO_2$ to PEBAX-GO composite membranes gradually decreased as the GO content increased. On the other hand, the gas permeability of $H_2$ increased with the increase of GO content, and it was 21.43 barrer at the GO content of 30 wt%, which was about 5 times higher than that of PEBAX membrane. This is because the GO was easier to operate with a fast and selective gas transport channel for $H_2$ than other gases. The increased selectivity ($H_2/N_2$) and selectivity ($H_2/CH_4$) were influenced by the diffusion selectivity by the permeate gas size. The increased selectivity ($CO_2/N_2$) and selectivity ($CO_2/CH_4$) were more influenced by the solubility selectivity due to the affinity of $CO_2$ and GO for -COOH.

• Membrane Journal
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• v.22 no.3
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• pp.201-207
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• 2012

In this study, we investigated permeation of single gas ($N_2$, $O_2$, $CF_4$, and $SF_6$) through flat sheet membrane composed of PDMS (poly-dimethylsiloxane) and PEBAX (polyether block amides). Gas permeation experiment was performed with various feed pressure. Permeability was estimated using permeation flux measured by continuous-flow technique. The permeability of gases except $SF_6$ in PDMS were decreased with the upstream pressure increased. $SF_6$ is much more permeable than $CF_4$, which is due to higher critical temperature of $SF_6$. The permeability decreased in the following order: $O_2$ > $N_2$ > $SF_6$ > $CF_4$. On the other hand, the permeability of gases in PEBAX followed the order: $O_2$ > $N_2$ > $CF_4$ > $SF_6$ which are opposite of the order of kinematic diameter (${\AA}$)($SF_6$ > $CF_4$ > $N_2$ > $O_2$). The $SF_6/CF_4$ pure gas selectivity in PDMS was 2.1 at 0.7 MPa.