The Fabrication of Reflective Multilayer Mirror for EUVL that Included The Structure of Ru/Mo/Si Multilayer by Magnetron Sputtering (Ru/Mo/Si 다층박막 구조를 가지는 극자외선 노광공정용 반사형 다층박막 미러의 제조)
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- Proceedings of the International Microelectronics And Packaging Society Conference
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- 2002.05a
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- pp.241-246
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- 2002