• 기계저널
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• 제29권5호
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• pp.525-537
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• 1989

본교에서는 정압 공기베어링의 특성 및 다공질 정압 공기베어링의 현황, 문제점등에 대한 개괄적 인 소개를 하였다. 이상에서와 살펴본 바와 같이 정압 공기베어링은 고속, 고정도를 요하는 각종 산업용기기의 부품으로써 연구개발, 응용되어 왔으며 결과적으로 기술한계극복에 많은 기여를 하 였다. 앞으로의 첨단기술을 위주로 한 각종 가공, 측정분야에 있어서도 공기베어링은 많은 역할을 할 것이며 특히 다공질베어링을 중심으로 한 고강성 정압 공기베어링에 대한 기대는 매우 크다고 할 수 있다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.157.1-157.1
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• 2005

• 한국전산유체공학회지
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• 제13권2호
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• pp.62-67
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• 2008

This study aims to investigate numerically the static stiffness characteristics of porous air bearing and to estimate appropriate permeability values of porous medium. In particular, a new roughness model is proposed and implemented into the commercial CFD code (FLUENT Ver. 6.2) by using C language based user subroutine. The predicted results are extensively compared with experimental data. The roughness model is also validated through comparison with the results from open literature. It is found that the predictions for static stiffness are in good agreement with experimental data. Therefore, the suggested model based on the roughness Reynolds number can be used in studying the stiffness characteristics of porous air bearing effectively. In addition, numerical simulations of various diameter size and conditions are conducted. According the results, it is expected that the static stiffness of porous air bearing has the non-linear characteristics.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2005년도 추계학술대회논문집
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• pp.75-78
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• 2005

In this paper, an experimental study on porous air bearing stiffness for ultra precision positioning system was performed. In general manufacturer provide bearing stiffness under specific air pressure, but the air pressure used in the field is different. Therefore it is necessary to know the stiffness of air bearing under the pressure used in the field. In order to know that, experimental device which can realize actual operating conditions was made. Using this device, static and dynamic stiffness of air bearing can be obtained. As a result, displacement error occurred around 1 $\mu$m at recommended load.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.48-52
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• 2007

A lot of researches have been done in order to investigate the dynamic characteristics of the aerostatic porous bearing, most of them used analytical approaches and only a few used experimental approaches. However the experimental condition used in the previous experimental approaches was not realistic, where the porous bearing has been fixed and only the mass supported by the bearing was allowed to move vertically. The dynamic stiffness obtained by those experimental setups may be different with the real case where the mass and the bearing move together in horizontal direction. In this paper, the dynamic characteristics of the horizontally moving aerostatic circular porous air bearings are investigated by the experimental approach. The experimental apparatus was designed to realize its real operating condition used in most industrial applications. The experimental results were compared with the previous experimental ones.

• 연구논문집
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• 통권34호
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• pp.101-112
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurredinside the pads. In this paper, a motion error anaysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi Pad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed quantatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• 한국정밀공학회지
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• 제30권12호
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• pp.1327-1333
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• 2013

Air bearings are widely used in precision stages because of low friction and high motion accuracy, however, they suffer from low stiffness in comparison with rolling bearings or hydrostatic bearings. So, several preloading methods using weight, magnet and vacuum force, and opposing pads have been used to increase the stiffness of the air bearings. In this paper, pressure distributions of the vacuum preloaded porous air bearings are calculated using the proposed method. And then, the load capacity and stiffness are analyzed. For the vacuum preloaded air bearings, the stiffness is increased owing to reduced bearing clearance by vacuum force. The simulation results indicate that variation of vacuum pressure with clearance in the vacuum pocket gives rise to low stiffness, so the vacuum pocket should be designed for pressure to be constantly maintained regardless of the bearing clearance by means of large effective pumping speed.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.1170-1176
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• 2006

This study aims to investigate numerically the static and dynamic stiffness characteristics of porous air bearing and to estimate appropriate permeability values of porous medium. In particular, a new roughness model is proposed and implemented into the commercial CFD code (FLUENT Ver.6.2). The predicted results are extensively compared with experimental data for static cases. The roughness model is also validated through comparison with the results from open literature. For the dynamic cases, the deforming and re-meshing technique is used for describing fluid-solid interactions. It is found that the predictions for static stiffness are in good agreement with experimental data and the dynamic stiffness appears to be relatively smaller than the static stiffness. In addition, moving and dynamic analysis of air bearing seems to be possible to provide qualitative predictions even if there are somewhat discrepancies quantitatively, compared to experimental data.

• 한국정밀공학회지
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• 제21권7호
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• pp.185-194
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• 2004

In order to analyze the motion errors of the aerostatic stage, it is necessary to consider the influence of the moment variation occurred inside the pads. In this paper, a motion error analysis method utilizing the transfer functions on the reaction force and moment is proposed, and general characteristics of the transfer functions are discussed. Calculated motion errors by the proposed method show good agreement with the ones calculated by Multi fad Method, which is considered the entire table as an analysis object. Also, by the introduction of the transfer function of motion errors, which represent the relationship between the spatial frequency components of the rail form error and motion errors, motional characteristics of the porous aerostatic stage can be generalized. In detail, the influence of the spatial frequencies is analyzed qualitatively, and the patterns of the insensitive frequencies which almost do not affect the linear motion error or angular motion error according to the rail length ratio and the number of the pad are verified. The relationship between the moment variation occurred inside the pads and the motion errors is also verified together.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.135-136
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• 2006

A precise linear motion stage supported by magnetically preloaded air bearings is introduced where preloading magnetic actuators are combined with permanent magnets and coils to adjust air bearing clearance by controlling magnetic force actively. Each of the magnetic actuators has a permanent magnet generating nominal magnetic flux for required preload and a coil to perturb the magnetic force resulting adjustment of air-bearing clearance. The characteristics of porous aerostatic bearing are analyzed by numerical analysis, and analytic magnetic circuit model is driven for magnetic actuator to calculate nominal preload and variation of force due to current. A 1-axis linear stage motorized with a coreless linear motor and a linear encoder is built for verifying this design concept. With the active magnetic preloading actuators controlled with DSP board and PWM power amplifiers, the active on-line adjusting tests about the vertical, pitching and rolling motion were performed, and the result shows very good linearity.