• Journal of the Korean Crystal Growth and Crystal Technology
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• v.9 no.6
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• pp.597-600
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• 1999

By periodically varying the current density and etching time during anodic oxidation of crustalline silicon wafers in 15% HF-ethanol solution, we obtained porous silicon multilayers which have periodically varying refractive index. We fabricated the porous silicon microcavity (PSM) which consist of porous silicon multilayers (I), active layer of porous silicon, and porous silicon multilayers (II) and investigated its physical properties. The AFM (Atomic Force Microscope) measurement from the cross section of multilayers (I and II) shows uniformity of high refractive index and low index layers as well as the active layer. We observed the characteristics of Bragg reflector when the thickness of layers was 1/4 and the thickness of active layer was twice of the effective wavelength, which can be used as a filter for specific wavelength. We found the emission characteristic from the PSM, which FWHM (full width half maximum) was considerably decreased and emission intensity was increased.

• Journal of Sensor Science and Technology
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• v.4 no.4
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• pp.70-74
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• 1995

We have observed anisotropic anodisation process for porous silicon formation. The starting material was (100) silicon $n/n^{+}/n$ wafer structured by $n^{+}$-diffusion on n-type substrate and by subsequent n-epitaxial growth. After the top n-silicon epitaxial layer was etched to open the porous silicon layer(PSL) anodisation window, anodisation takes place only to $n^{+}$-buried layer. The process of porous silicon formation on (100) sample was anisotropic, which was evident from that the shapes of the reacted porous silicon layer was all squarelike regardless of the shapes of reaction windows. The experimental results show that the PSL anodisation process does not depend on chemical reaction but does on electrical conduction property, which is hole mobility depending on the crystal direction.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.9
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• pp.31-36
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• 1999

A capacitance-type sensor using porous silicon layer is developed to measure aqueous alcohol concentration. Since alcohol, so called ethanol, is very permeable into the silicon wafer, it is often used to help chemical reaction when the silicon wafer is processed under some aqueous solution. In this work, the sensing property was measured for the alcohol concentration from zero to near 100 percent with two types of samples with porous silicon layer formed in 25 and 35% HF solution, respectively. Good reliability as well as fast response time and good linearity were shown over 10kHz and the measured capacitance was observed to be inverse to alcohol concentration due to the decrease of the whole dielectric constant in porous silicon layer.

• Journal of the Korean Ceramic Society
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• v.39 no.10
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• pp.919-927
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• 2002

In order to fabricate double-layered porous materials powders of different particle sizes were pressed stepwise. Ford＇s equation which predicts the fired density with the change in pressed density was employed in order to adjust the difference in sintering shrinkage of the green body with double-layered porous structure. Double-layered porous materials were characterized by investigating microstructures and permeability. SEM micrographs showed the distinct difference in pore sizes of double-layered porous material. Permeability of single-layered porous material increased by increasing the starting particle sizes and porosity as well. Permeability of the double-layered porous material depends largely on the layer of small pore diameter.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 1994.10a
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• pp.323-330
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• 1994

본 연구에서는 다공질 흡음재료 중 closed cell 구조를 갖는 발포수지재료(Foamed Material)에 음(sound)이 입사할 때 발생하는 흡음현상을 보다 정확히 예측하기 위해서 다공질 흡음재료에 대한 Biot 이론에 근거한 Allard의 모델링기법[4]을 이용하여 해석 프로그램을 개발하였고, 이를 이용하여 다공질 흡음재료가 단층(single layer)일 때 이 재료의 Surface Impedance와 흡음률(Absorption Coefficient)을 예측하고, 물성치(parameters)변화에 따른 다공질 흡음재료의 흡음특성을 분석하였으며, 이 재료가 자동차 제조시 사용되는 압연강판(rolled steel piate)에 부착되었을 때의 투과손실(Transmission Loss)을 예측하였고, 또한 다공질 흡음재료는 중고주파 대역의 음에 대한 흡음특성은 좋지만 저주파 대역의 음에 대한 흡음특성은 좋지 않으므로 흡음 재료의 저주파 대역의 흡음특성을 향상시키기 위해서 2층(two layers)으로 하였을 때의 흡음특성을 분석하였다. 본 논문의 연구결과는 자동차 제조시 사용되어지는 다공질 흡음재료는 물론 산업용기계나 건축용등 여러 분야에서 사용되어지는 다공질 흡음재료의 흡음특성 분석에 응용될 수 있으리라 기대된다.

• Journal of Energy Engineering
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• v.10 no.3
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• pp.266-271
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• 2001

Buoyancy-driven natural convection is analysed by employing a linear stability theory in hori-zontal porous media with net through flow. Darcy's law is used to model the flow characteristics in porous media. Bated on the results of linear stability analysis, a heat transfer correlation was obtained by employing weakly nonlinear analysis. As the net through flow increases, the system becomes more stable and the effect of the Darcy-Rayleigh number on the Nusselt number decreases.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.32-37
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• 1999

A capacitance-type humidity sensor with mesa structure in which porous silicon layer is used as humidity-sensing material is developed and its humidity sensing properties are measured. This sensor has a structure where two electrodes are set on the up-side of the wafer against the past typical structure having these electrodes on the up and down-side of the wafer. Therefore, the sensor can be fabricated monolithically to be more compatible with the IC process technology, and is possible to detect more correct output capacitance by removing the effect of the parasitic capacitance from the bottom layer and other junctions. To do this, the sensor was fabricated using process such as localized formation of porous silicon, oxidation of porous silicon layer, and etching of oxidized porous silicon layer. From the completed samples, the dependence of capacitance on the relative humidity of 55 to 90% more was measured at room temperature. As the result, the measured capacitance increased monotonously higher at the low frequency of 120 Hz, where the capacitance was observed to increase over 300%.

• Journal of the Korean Ceramic Society
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• v.37 no.11
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• pp.1119-1125
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• 2000

용융 Si 침윤 방법에 의한 새로운 다공질 RBSC 제조공정이 개발되었으며, 용융 Si 침윤공정 방법으로 제조된 다공질 RBSC의 최대 3-점 파괴 강도는 18 MPa, 최대 기공율은 46% 범위이었다. 용융 Si 침윤방법으로 제조된 다공질 RBSC의 기계적 특성 및 기공율은 성형체내 SiC 입자 표면의 카본 source의 양 및 침윤시 사용된 Si의 양에 직접적으로 영향을 받는 것으로 나타났다. 침윤시 상대 Si 양은 40%를 사용하였으며, SiC 입자 표면에 graphite와 phenol resin을 함께 코팅한 성형체를 사용하여 제조된 다공질 RBSC에서 최대 파괴강도 값을 얻었다. 상대 Si의 양의 증가는 다공질 RBSC의 파괴강도를 감소시켰으며, SiC 입자 표면의 카본 source 코팅층은 graphite와 phenol resin을 같이 사용하였을 때 다공질 RBSC의 파괴강도는 증가되었으나, RBSC 내 기공율은 감소되었다.

• Proceedings of the Korean Society for Rock Mechanics Conference
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• 1995.03a
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• pp.121-134
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• 1995

대수층의 수리상수를 산출하기 위한 양수시험 분석에 이용되는 가장 기본적인 이론은 Theis 이론이다. Theis 이론에서는 지하수의 흐름은 2차원의 방사상 흐름이다. 그러나, 1차 공극으로 이루어진 충적층 대수층이나 사암과 같은 다공질 대수층과는 달리 기반암내에 발달되어 있는 균열 대수층은 균열(fractures), 열극(fissures) 또는 단층과 같은 2차 공극으로 이루어져 있다. (중략)

• Proceedings of the Korean Society of Dyers and Finishers Conference
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• 2003.04a
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• pp.101-107
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• 2003

국내에서는 90년대 후반 이후부터 건식코팅 중 제조공정이 단순하고 제조비용의 부담이 적으며 생산속도가 빠른 친수성 폴리우레탄 수지를 사용한 비다공질 투습방수포가 점차 확대되어 일반적으로 많이 제조되어지고 있다. 친수무공형 투습방수포는 다공질형의 투습방수포와는 달리 연속적인 비다공질의 solid한 코팅 층으로 구성되어진다. 이러한 비다공질 막은 물에 대하여 내수압이 뛰어나며 투습도는 친수성 피막의 두께에 반비례하는 특징을 가지고 있다. (중략)