• Title/Summary/Keyword: 다결정다이아몬드

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Diamond 박막의 밀찰력 향상에 대한 연구

  • 이건환;이철룡;권식철
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.139-139
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    • 1999
  • 다이아몬드는 지구상에서 가장 단단한 물질로 잘 알려져 있을 뿐만 아니라 공업적 측면에서 볼 때, 여러 가지 특출한 성질들을 동시에 지니고 있다. 인장강도, 압축강도, 탄성계수 등 기계적 특성이 우수하고 넓은 광투과성과 내열, 내화학, 내방사성을 지니고 있으며, 열전도율이 높고 전기적으로 절연체이다. 또한 hole이동도가 높고 도핑에 의해서 반도체적 특성을 나타낸다. 이와 같이 매우 뛰어난 성질을 공업적으로 응용하기 위하여 이전부터 많은 연구가 행해져 왔으며, 1980년대에 들어와 박막이나 코팅 형태로의 합성이 가능한 기상합성법이 큰 발전을 보임으로써 다이아몬드의 우수한 특성을 여러 분야에서 폭넓게 응용할 수 있게 되었다. 특히 마찰 응용분야에 최적의 재료로 추천되고 있다. 지금도 Epitaxial 다이이몬드를 기지 위에 성장시키고 다결정질박막을 여러 가지 비다이아몬드(Si, W, Mo 등) 기지 위에 성장시키는 연구가 계속되고 있으며 공구강 위엥 경질코팅으로써 한층 개선된 다이아몬드박막 제조를 위한 수많은 연구노력들이 집중되고 있다. 그러나 일반탄소강에 다이아몬드박막을 성장시키기 위한 많은 노력들은 크게 바람직하지 않은 non-diamond carbon(black carbon or graphitic soot)의 형성 때문에 방해를 받고 있다. 계면에서 이들의 형성은 증착된 다이아몬드박막과 금속기지의 저조한 밀착력을 나타내게 된다. 이외 같이 다이아몬드박막의 응용을 위하여 다이아몬드피막에 요구되는 중요한 조건은 기지에 대해서 강한 밀착력을 나타내는 것이며, 동시에 상대물에 대하여 낮은 마찰계수를 가져야 한다. 그러나 다이아몬드와 금속기지는 서로 다른 열챙창계수(각각 0.87$\times$10-6K-1, 12$\times$10-6K-1)의 차이로 인하여 밀착력이 현저히 떨어진다는 단점으로 인해 산업화에 많은 제약을 받아왔다. 이러한 문제점을 해결하기 위하여 본 연구에서는 다이아몬드박막과 금속기지 사이에 중간층을 이용하는 방법을 제안하였다. 이러한 시도는 일반적으로 중간층 형성 금속인 Ti 또는 TiN 등이 적용되었으나 원하는 결과를 얻지 못하였다. 즉 carbon과 Fe의 상호확산, non-diamond carbon상의 형성 그리고 열잔류응력을 완화시키고 일반탄소강 위에 다이아몬드박막을 형성시켜 우수한 밀착력을 얻기 위한 목적에 미흡하였던 것이다. 이에 중간층으로 Cr 또는 Cr계 화합물 박막을 이용하였는 바, 이 중간층을 이용한 결과 우수한 밀착력을 나타내는 다이아몬드박막을 얻었으며 열적, 구조저으로 모재와 다이아몬드에 적합한 결과를 얻을 수 있었다. 본 연구에 의해 얻어진 결과들은 재료 가공을 위하여 높은 경도와 내마모성등이 요구되는 절삭공구나 금형의 수명 향항에 크게 기여할 것이며 산업적으로 큰 응용이 기대된다.

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The use of spectroscopic Ellipsometey for the observation of diamond thin film growth by microwave plasma chemical vapor deposition (마이크로웨이브 플리즈마 화학기상증착에 의한 다이아몬드 박막의 성장 관찰을 위한 분광 Ellipsometry의 이용)

  • 홍병유
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.240-248
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    • 1998
  • The plasma chemical vapor deposition is one of the most utilized techniques for the diamond growth. As the applications of diamond thin films prepared by plasma chemical vapor deposition(CVD) techniques become more demanding, improved fine-tuning and control of the process are required. The important parameters in diamond film deposition include the substrate temperature, $CH_4/H_2$ gas flow ratio, total, gas pressure, and gas excitation power. With the spectroscopic ellipsometry, the substrate temperature as well as the various parameters of the film can be determined without the physical contact and the destructiveness under the extreme environment associated with the diamond film deposition. It is introduced how the real-time spectroscopic ellipsometry is used and the data are analyzed with the view of getting the growth condition and the accompanied features for a good quality of diamond films. And it is determined the important parameters during the diamond film growth, which include the final sample will be measured with Raman spectroscopy to confirm the diamond component included in the film.

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Investigation on the Effect of the Nano-diamond Powder on the Surface Properties of Chromium Composite Layers (나노 다이아몬드 분말이 크롬 복합 도금층의 표면 물성에 미치는 영향 연구)

  • ;Hue, N.V.
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2007.11a
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    • pp.85-86
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    • 2007
  • 상용으로 사용되고 있는 Sargent bath에 수십 나노크기의 다이아몬드 분말을 혼입하여 전기도금법에 의해 매우 우수한 표면 특성을 갖는 크롬 복합 도금층을 얻었다. 상기 복합 도금층은 순수 크롬 도금층의 미세 경도(Hy. 801)보다 높은 값(Hy. 920)을 나타내었고, 내마모성은 약 3-4배 뛰어난 성능을 보였다. 또한, NaCl 수용액에서 수행한 내식성 테스트에서는 크롬 복합 도금층이 순수 크롬 도금층대비 1/6 수준의 passive current를 가졌다. SEM을 통한 표면 형상 관찰 결과 크롬 도금층에 혼입된 나노 다이아몬드 분말은 단결정 혹은 다결정의 형태로 존재하였다.

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Fabrication of PCD Micro Tool and its Hybrid Micro Machining (다결정 다이아몬드를 이용한 미세 공구 제작과 이를 이용한 미세 복합 가공)

  • Doan, Cao Xuan;Kim, Bo-Hyun;Chung, Do-Kwan;Chu, Chong-Nam
    • Journal of the Korean Society for Precision Engineering
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    • v.28 no.6
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    • pp.694-700
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    • 2011
  • Since polycrystalline diamond (PCD) has high hardness like diamond, it has been used as tool material for lathe and milling of non-ferrite material. A micro tool fabricated from PCD material can be used for micro machining of hard material such as tungsten carbide, glass, and ceramics. In this paper, micro PCD tools were fabricated by micro EDM (electrical discharge machining) and used for micro grinding of glass. Craters generated on the tool surface by EDM spark work as like grits in grinding process. The effects of tool shapes, tool roughness and PCD grain size were investigated. Also studied was a hybrid process combining electrochemical discharge machining (ECDM) and micro grinding for micro-structuring of glass.

Prediction of Surface Roughness on the PCD Tool Turned Aluminum Alloys by using Regression Analysis (Al합금 PCD 선산가공에서 회귀분석에 의한 표면거칠기 예측)

  • Lee, Sun-Woo;Lee, Dong-Ju
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.3
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    • pp.41-47
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    • 2012
  • Surface roughness is widely used as an index for processing degree of accuracy. Recently, regression analysis to predict the machining results are actively used to characterize a cutting operations. In the past, diamond machining had been used for ultra precision cutting operation, but now industrial diamond tools like PCD(Polycrystaline Diamond) has been widely used in ultraprecision machining of nonferrous metals. In this study, the authors focus on the effect of PCD tool property on the surface roughness of different types of aluminum alloy after cutting process by CNC operated lathe. Based on the regression analysis approach on a surface roughness data obtained by experiment, predictive analysis of surface roughness is effective to achieve better surface quality.

A study on the mirror like machining of Al-Si alloy for extraction of Si particle (Al-Si합금의 Si석출 경면가공에 관한 연구)

  • 이은상;김정두
    • Transactions of the Korean Society of Mechanical Engineers
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    • v.16 no.12
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    • pp.2279-2286
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    • 1992
  • A hypereutectic Aluminum-Silicon Alloy is widely used in the parts of autombile because of high-resistance and good strength. In this study, the cutting of a hypereutectic Al-Si alloy (A390) for extraction of Si particle was experimentally investigated. By proper selection of cutting tool materials and optimization of cutting conditions, economical machining of this alloy is achieved. The surface roughness relates closely with the feed rate and cutting speed.

A Prediction of Surface Roughness on the PCD Tool Turned Al5083 by using Regression Analysis (Al5083 PCD 선삭가공에서 회귀분석에 의한 표면거칠기 예측)

  • Lee, Sun-Woo;Lee, Dong-Ju
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.11 no.6
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    • pp.69-74
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    • 2012
  • Surface roughness is widely used as an index for processing degree of accuracy. Recently, regression analysis to predict the machining results are actively used to characterize a cutting operations. In the past, diamond machining had been used for ultra precision cutting operation, but now industrial diamond tools like PCD(Polycrystalline Diamond) have been widely used in ultraprecision machining of nonferrous metals. In this study, the authors focus on the effect of PCD tool property on the surface roughness of Al5083 aluminum alloy after cutting process by CNC operated lathe. Based on the regression analysis approach on a surface roughness data obtained by experiment, predictive analysis of surface roughness is effective to achieve better surface quality.

A Study on the Cutting Characteristics of Glass Fiber Reinforced Plastics by Tool Materials and Type (유리섬유강화 플라스틱의 공구재질 및 형상에 따른 절삭특성에 관한 연구)

  • An, Sang-Ook;Noh, Sang-Lai
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.20 no.4
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    • pp.1216-1224
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    • 1996
  • In the use of glass fiber reinforced plastics it is often necessary to cutting the components, but the cutting GFRP is often made difficult by the delamination of composites and the short tool life. In this paper, the machinability of GFRP by mean of tool materials and type was experimentally investigated. By proper selection of cutting tool material and type excellent machining of this workpiece is achieved. The surface quality relate closely with the feed rate and cutting tools.

Diamond thin film deposition on Ni in microwave plasma CVD (Microwave plasma CVD에서 Ni 기판에 다이아몬드 박막 증착)

  • Kim, Jin-Kon;Ryu, Su-Chak;Cho, Hyun
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.12 no.6
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    • pp.311-316
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    • 2002
  • Two different approaches, namely two-step deposition process and Bias-Enhanced Nucleation (BEN) technique have been examined for deposition of high quality diamond thin film on polycrystalline Ni which has low chemical activity with the carbon neutrals provided from the $CH_4/H_2$mixtures. A two-step deposition process, consisted of pre-deposition of soot layer at lower temperatures and subsequent deposition at higher temperature condition, has been developed to deposit diamond layer directly on Ni substrate. Diamond particles were observed after deposition step at $925^{\circ}C$ for 5 hours and those particles seem to be nucleated from the soot layer pre-deposited at lower temperatures ($810^{\circ}C$). Diamond particles of a substantial size were found on Ni substrate after biasing -220 V for 10 minutes and subsequent deposition for 2 hours while no diamond particles were observed under the conditions without applied bias.

Characteristic of neuroblastoma cell (SH-SY5Y) culture on the crystalline diamond film (다결정 다이아몬드 필름의 신경종양세포(SH-SY5Y) 배양 특성)

  • Nam, Hyo-Geun;Oh, Hong-Gi;Kim, Dae-Hoon;Kim, Min-Hye;Park, Hye-Bin;Jhee, Kwang-Hwan;Song, Kwang-Soup
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.12 no.4
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    • pp.10-15
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    • 2013
  • In order to fabricate high sensitive and stable biosensors, we require the material with superior biocompatibility and physical-chemical stability. Many kinds of biomaterials have been evaluated to apply for bioindustry. Recently, carbon based diamond thin films have been focal pointed as bio-applications and their possibility has been evaluated. Diamond thin film has many advantages for electrochemical and biological applications, such as wide potential window (3.0-3.5V), low background current and chemical-physical stability. In this work, we have cultured neuroblastoma cell (SH-SY5Y) on the crystalline diamond films. We use MTT assay to evaluate the characteristic of cell culture on the substrates. As a result, neuroblastoma cell was cultured on the crystalline diamond film as similar as cell culture dish.