• 센서학회지
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• 제6권1호
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• pp.72-80
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• 1997

실리콘 공정을 이용하여 마이크로 밸브(valve)를 제작할 때에 역방향 누설 유량은 중요한 문제중 하나이다. 본 논문에서는 플래퍼(flapper)와 노즐(nozzle)을 이용하여 누설 유량이 없는 마이크로 밸브를 설계하고, 실리콘 공정을 이용하여 제작하였다. 제작된 마이크로 밸브의 작동원리는 정방향 압력이 가해질 때에는 유체의 압력이 플래퍼를 위로 밀어서 유체를 흐르게 하고, 역방향 압력이 가해질 때에는 플래퍼를 밀지만 이때는 노즐의 입구에 의해 지지되므로 플래퍼나 노즐이 깨지지 않는 한 유체가 흐를 수 없게 된다. 노즐은 (100) 웨이퍼를 습식식각하여 제작하였고, 플래퍼는 역형상을 $20{\mu}m$만큼 플라즈마 식각장비(RIE)로 수직 식각한 뒤 뒷면에서부터 습식식각을 하여 제작하였다. 제작된 마이크로 플래퍼-노즐 밸브의 정적특성을 해석하였고, 순수를 사용한 실험결과와 비교하였다. 실험결과는 제작된 마이크로 플래퍼-노즐 밸브가 완전한 다이오드적인 특성을 가진다는 것을 보여 주었다.

• 한국자동차공학회논문집
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• 제8권1호
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• pp.54-62
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• 2000

The purpose of this study is to bring out the optimal design factors which effect on dynamic characteristics in the design of flow control servo valve with high response characteristics, and to verify the validity of the design factors. In this study, force feedback type flow control valve with nozzle/flapper and with no drain is studied. And, the effect of the parameters, such as fixed orifice, nozzle diameter, and maximum displacement between nozzle and flapper are analyzed. We have done simulations using the optimal design factors and simulink(Matlab) as a simulation tool, and verified the validity of our simulations by means of comparison our simulation results with an experimental results of another similar valve.

• 한국정밀공학회지
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• 제17권2호
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• pp.151-160
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• 2000

An experimental and theoretical analysis for the improvement of dynamic characteristics and design of electro-hydraulic flow control servo valve are performed. The theoretical results are compared with the experimental step responses, and the important design parameters of an electro-hydraulic flow control servo valve are derived by using the simulation program. Simulation parameters of nozzle jet coefficient and orifice and spool valve discharge coefficient are given through experiment. The theoretical and experimental step response curves show that the valve gain depends on the fixed orifice and nozzle $ratio(R_on)$ and is maximum at $R_on=1.$ And drain orifice in the flapper - nozzle return line creates a small back pressure, which improves the performance fur the valve.

• 대한기계학회논문집A
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• 제25권2호
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• pp.206-213
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• 2001

The positioner is an essential component of the control valve which is used to control quantity of the liquid in the pipe of chemical plants. In this paper, the experimental methodology for current pneumatic positioner was developed for the investigation of the static and dynamic characteristics of the positioner. The methodology was applied to evaluate response characteristics of two different positioners, which are current model in market and newly designed model. The experimental results of these two models were compared and analyzed.