• Journal of Sensor Science and Technology
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• v.6 no.1
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• pp.72-80
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• 1997

One of the concerns in micro fluidic valve designs is that of reverse direction leakage. This paper designs and fabricates a new fluidic valve to achieve zero leakage. The design uses flapper and nozzle elements. In the forward direction the working fluid pushes the flapper upward to allow flow. In the reverse direction, the flapper pushes against the orifice seat, and thus, no flow can be generated, unless the flapper or nozzle element breaks. The nozzle element fabrication involves fabricating an orifice by wet etching of (100) wafer, The flapper element fabrication involves $20{\mu}m$ deep patterning of the negative image of the flapper, followed by wet etching from backside. Flow experiments were conducted with DI water as the working fluid, and the results are compared to analytical predictions. The results show that the developed flapper-nozzle valve achieves a true diodic flow characteristic.

• Transactions of the Korean Society of Automotive Engineers
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• v.8 no.1
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• pp.54-62
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• 2000

The purpose of this study is to bring out the optimal design factors which effect on dynamic characteristics in the design of flow control servo valve with high response characteristics, and to verify the validity of the design factors. In this study, force feedback type flow control valve with nozzle/flapper and with no drain is studied. And, the effect of the parameters, such as fixed orifice, nozzle diameter, and maximum displacement between nozzle and flapper are analyzed. We have done simulations using the optimal design factors and simulink(Matlab) as a simulation tool, and verified the validity of our simulations by means of comparison our simulation results with an experimental results of another similar valve.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.2
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• pp.151-160
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• 2000

An experimental and theoretical analysis for the improvement of dynamic characteristics and design of electro-hydraulic flow control servo valve are performed. The theoretical results are compared with the experimental step responses, and the important design parameters of an electro-hydraulic flow control servo valve are derived by using the simulation program. Simulation parameters of nozzle jet coefficient and orifice and spool valve discharge coefficient are given through experiment. The theoretical and experimental step response curves show that the valve gain depends on the fixed orifice and nozzle $ratio(R_on)$ and is maximum at $R_on=1.$ And drain orifice in the flapper - nozzle return line creates a small back pressure, which improves the performance fur the valve.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.2
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• pp.206-213
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• 2001

The positioner is an essential component of the control valve which is used to control quantity of the liquid in the pipe of chemical plants. In this paper, the experimental methodology for current pneumatic positioner was developed for the investigation of the static and dynamic characteristics of the positioner. The methodology was applied to evaluate response characteristics of two different positioners, which are current model in market and newly designed model. The experimental results of these two models were compared and analyzed.