• Title/Summary/Keyword: 나노-인덴테이션

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Finite Element Anlaysis of Nanoindentation Process and its Experimental Verification (나노 인덴테이션 공정의 유한요소해석 및 실험적 검증)

  • 이정우;윤성원;강충길
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2003.05a
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    • pp.116-119
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    • 2003
  • In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic restoration and pile-up was proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1-10nm Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

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Analysis of Material Deformation Behavior in Nanoindentation Process by using 3D Finite Element Analysis and its Experimental Verification (3차원 유한요소해석을 이용한 나노인덴테이션 공정에서의 소재거동해석 및 실험적 검증)

  • 이정우;윤성원;강충길
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2003.06a
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    • pp.1174-1177
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    • 2003
  • In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic recover and pile-up was proposed. The indenter was modeled a 3D rigid surface. Minimum mesh sizes of specimens are 1-10nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

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Mechanical Characteristics of ZnO Thin Films on Si Substrates by Nano Indentation Technology (나노인덴테이션기법을 이용한 ZnO/Si 박막의 기계적 특성)

  • Yoon, Han-Ki;Jung, Hun-Chae;Sohn, Jong-Yoon;Yu, Yun-Sik
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.138-143
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    • 2004
  • Recently there has been a great world-wide interest in developing and characterizing new nano-structured materials. These newly developed materials are often prepared in limited quantities and shapes unsuitable for the extensive mechanical testing. The development of depth sensing indentation methods have introduced the advantage of load and depth measurement during the indentation cycle. In the present work, ZnO thin films are prepared on Si(111), Si(100) substrates at different temperatures by pulsed laser deposition(PLD) method. Because the potential energy in c-axis is low, the films always show c-axis orientation at the optimized conditions in spite of the different substrates. Thin films are investigated by X-ray diffractometer and Nano indentation equipment. From these measurements it is possible to get elastic modulus and hardness of ZnO thin films on Si substrates.

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Determination of Mechanical Properties for Coating Layer of Galvannealed Sheet Steel using Nano-indentation and FEM (나노인덴테이션 시험과 유한요소해석을 이용한 합금화 온도별 GA강판의 코팅층 체적 거동 결정)

  • Jeon S. J.;Lee J. M.;Kim B. M.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2005.05a
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    • pp.389-392
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    • 2005
  • In the modern days, a galvannealed sheet steel(GA) instead of a cold rolled steel sheet has been widely used as an alternative to extend the life of automotive body. Accordingly, the mechanical properties of GA for automobiles were taken Into account and studied by comparing with the temperature variation on annealing in this study. To clarify the effect of surface features in the mechanical properties of GA, the several tests such as nanoindentation and FE-analysis were executed. For this goal use is made of the method of neural networks. The developed neural networks apply also to obtain reliable mechanical properties of the thin films. Load-displacement curve was computed by the analysis procedure and compared with experimental results.

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